Piezoelectric vibrator and acceleration sensor using the same

• US 5,652,385 A
• Filed: 08/30/1995
• Issued: 07/29/1997
• Est. Priority Date: 03/01/1993
• Status: Expired due to Term

• Current Assignee: Murata Manufacturing Co Limited
• Original Assignee: Murata Manufacturing Co Limited
• Inventors: Nakamura, Takeshi, Kaneko, Takayuki
• Primary Examiner(s): Oda, Christine K.
• Application Number:
  US08/521,426
• Time in Patent Office: 699 Days
• Field of Search: 310/321, 73/DIG. 4, 73/504.04, 73/504.12, 73/514.15, 73/514.16, 73/514.29, 73/514.34, 73/514.35, 73/514.38, 73/DIG. 1
• US Class Current: 73/514.29
• CPC Class Codes: G01P 15/09 by piezoelectric pick-up
• CPC Class Codes: G01P 15/0907 of the compression mode type
• CPC Class Codes: G01P 15/0922 of the bending or flexing mode type
• CPC Class Codes: G01P 15/097 by vibratory elements
• CPC Class Codes: G01P 15/18 in two or more dimensions

Abstract

Four piezoelectric elements are formed on both surfaces of a plate-shaped vibrating body. Two piezoelectric elements are formed to be opposite to each other at one side of the longitudinal center portion of the vibrating body. Another two piezoelectric elements are formed to be opposite to each other at the other side of the longitudinal center portion of the vibrating body. By applying a signal to the piezoelectric elements, the vibrating body is vibrated in a longitudinal direction. In this time, the vibrating body is vibrated in such a manner that longitudinal expansion and contraction take place simultaneously in a part of the vibrating body. By using such vibration, both longitudinal ends are not displaced in spite of the vibration of the vibrating body. The vibrating body can be used as an acceleration sensor measuring the output voltages from the piezoelectric elements of the vibrating body.

Claims

1. An acceleration sensor comprising:

a plurality of plate-shaped vibrating bodies connected with each other so that surfaces of said vibrating bodies are crossed on one central axis; and

piezoelectric elements formed on the surfaces of said plurality of plate-shaped vibrating bodies, wherein

said vibrating bodies connected with each other vibrate in such a manner that longitudinal expansion and contraction take place inversely at both sides of center portions of said vibrating bodies by applying a driving signal to said piezoelectric elements.

2. An acceleration sensor according to claim 1, wherein two of said plurality of plate-shaped vibrating bodies are connected with each other so that the surfaces of said vibrating bodies are crossed at a right angle on said one central axis, and opposite surfaces of each of said vibrating bodies each having a pair of piezoelectric elements formed thereon.

3. An acceleration sensor according to claim 2, wherein one pair of said piezoelectric elements formed on one of said vibrating bodies are polarized from an outside toward a surface of said vibrating body, and the other pair of said piezoelectric elements formed on another of said vibrating bodies are polarized from a surface of said another vibrating body toward the outside.

4. An acceleration sensor according to claim 2, further comprising oscillator means connected to said piezoelectric elements.

5. An acceleration sensor according to claim 4, wherein driving signals from said oscillator means having a same phase are applied to each pair of said piezoelectric elements formed on said vibrating bodies.

6. An acceleration sensor according to claim 4, wherein said oscillation circuit is connected to the piezoelectric elements via resistors.

7. An acceleration sensor according to claim 4, further including first and second differential circuits connected to said piezoelectric elements.

8. An acceleration sensor according to claim 1, which further comprises frames connected with each other for supporting both ends of said vibrating bodies connected with each other.

9. An acceleration sensor according to claim 8, wherein one pair of said piezoelectric elements formed on one of said vibrating bodies are polarized from an outside toward a surface of said vibrating body, and the other pair of said piezoelectric elements formed on another of said vibrating bodies are polarized from a surface of said another vibrating body toward the outside.

10. An acceleration sensor according to claim 8, further comprising oscillator means connected to said piezoelectric elements.

11. An acceleration sensor according to claim 10, wherein driving signals from said oscillator means having a same phase are applied to each pair of said piezoelectric elements formed on said vibrating bodies.

12. An acceleration sensor according to claim 1, further comprising frames formed in U-shape, each plate-shape vibrating body fixed to a center portion of a respective frame.

13. An acceleration sensor according to claim 12, wherein each plate-shape vibrating body is connected with a respective frame at both width ends wherein a hole is formed at a connecting part of the plate-shaped vibrating body and the respective frame.

14. An acceleration sensor according to claim 13, further comprising a ring-shaped holding member for holding said frames.

15. An acceleration sensor according to claim 14, wherein said ring-shaped holding member holding each frame at a position corresponding to the connecting part of the plate-shape vibrating bodies.

16. An acceleration sensor according to claim 1, wherein weights are formed at end portions of the plate-shape vibrating bodies.

17. An acceleration sensor according to claim 1, wherein said piezoelectric elements are used for driving and further comprising additional piezoelectric elements used for detecting.

18. An acceleration sensor according to claim 17, wherein said additional piezoelectric elements are formed adjacent to said piezoelectric elements.

19. An acceleration sensor according to claim 1 further comprising

flames formed in a U-shaped, said plate-shape vibrating body fixed to a center portion of a respective frame,

a hole formed at a connecting part of each plate-shape vibrating body and a respective frame, and

weights formed at end portions of the vibrating bodies.

20. An acceleration sensor according to claim 19, wherein said piezoelectric elements are used for driving and further comprising additional piezoelectric elements used for detecting.

21. An acceleration sensor according to claim 20, wherein said additional piezoelectric elements are formed adjacent to said piezoelectric elements.

22. An acceleration sensor according to claim 19, further comprising a ring-shaped holding member for holding said frames.

23. An acceleration sensor according to claim 22, wherein said ring-shaped holding member holding each frame at a position corresponding to the connecting part of the plate-shape vibrating bodies.

24. An acceleration sensor according to claim 19, wherein said oscillation circuit is connected to the piezoelectric elements via resistors.

25. An acceleration sensor according to claim 24, further including first and second differential circuits connected to said piezoelectric elements.