Hinge for micro-mechanical device

• US 5,652,671 A
• Filed: 06/30/1994
• Issued: 07/29/1997
• Est. Priority Date: 06/30/1994
• Status: Expired due to Fees

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Knipe, Richard L., Poradish, Frank J.
• Primary Examiner(s): Neyzari, Ali
• Assistant Examiner(s): BEY, DAWN MARIE
• Application Number:
  US08/268,741
• Time in Patent Office: 1,125 Days
• Field of Search: 359/291, 359/298, 359/230, 359/846, 359/847, 359/848, 359/849, 359/850, 359/290
• US Class Current: 359/291
• CPC Class Codes: E05D 1/02 made of one piece
• CPC Class Codes: G02B 26/0816 by means of one or more reflecting elements

Abstract

An improved hinge (12) for a micro-mechanical device (10). The hinge is fabricated from alternating layers (12a, 12b) of different materials. A first material is selected on the basis of its amenability to fabrication processes and a second material is chosen for its strength, or some other desired characteristic, relative to the first material.

Claims

1. An improved micro-mechanical device of a type having at least one moving element that is supported by a hinge, wherein the improvement comprises:

a hinge that has alternating layers of a first material and a second material, said first material being amenable to processing of said micro-mechanical device and said second material being less ductile than said first material, wherein both said materials constitute said hinge during operation of said device, and wherein said hinge supports said moving element such that said moving element rests upon said first material, supported by said hinge over an air gap and said second material extends over said first material from a support post to said moving element.

2. The device of claim 1, wherein said first material is primarily aluminum.

3. The device of claim 2, wherein said second material is primarily alumina.

4. The device of claim 2, wherein said second material is primarily titanium.

5. The device of claim 2, wherein said second material is primarily tungsten.

6. The device of claim 2, wherein said second material is primarily tantalum.

7. The device of claim 2, wherein said second material is primarily chromium.

8. The device of claim 2, wherein said second material is primarily zinc sulfide.

9. The device of claim 1, wherein said second material is primarily aluminum nitride.

10. A improved method of fabricating a hinge for a micro-mechanical device having at least one moveable element attached to the hinge so that said element may move, said improvement comprising the steps of:

depositing a layer of a first material upon a spacer layer, said first material being amenable to processing of said micro-mechanical device;

depositing a layer of a second material over said layer of a first material, said second material being less ductile than said first material;

etching said first or said second layer, or both, to pattern said hinge, wherein said hinge remains constituted from both layers after said etching; and

depositing a third layer of material to form said moveable element, such that said moveable element rests on said first material, supported by said hinge over an air gap and said second material extends over said first material from a support post to said movable element.

11. The device of claim 10, wherein said first material is primarily aluminum.

12. The device of claim 11, wherein said second material is primarily alumina.

13. The device of claim 11, wherein said second material is primarily titanium.

14. The device of claim 11, wherein said second material is primarily tungsten.

15. The device of claim 11, wherein said second material is primarily aluminum nitride.

16. A digital micro-mirror device (DMD), comprising:

a substrate upon which the following elements are fabricated;

at least one landing electrode, a support post, a hinge extending from said support post, a mirror attached to said hinge, wherein said hinge is deformable so as to permit said mirror to move toward said landing electrode upon being subjected to an applied force; and

wherein said hinge has alternating layers of a first material and a second material, said first material being selected for its amenability to processing of said DMD and said second material being selected for its greater strength relative to said first material, wherein both materials constitute said hinge in operation of said device wherein said second material extends from said post to said mirror, covering said first material.

17. The device of claim 16, wherein said first material is primarily aluminum.

18. The device of claim 17, wherein said second material is primarily alumina.

19. The device of claim 18, wherein said layers of said first material are approximately 75 angstroms thick, and said layers of said second material are each approximately 50 angstroms thick.

20. The device of claim 16, wherein each of said layers is less than 100 angstroms thick.