Method and device for lacquering or coating of a substrate by a capillary slot

• US 5,654,041 A
• Filed: 10/25/1995
• Issued: 08/05/1997
• Est. Priority Date: 12/22/1994
• Status: Expired due to Term

• Current Assignee: Hamatech APE GmbH & Co. KG. (SÜSS MicroTec SE)
• Original Assignee: Steag Microtech GmbH
• Inventors: Stummer, Manfred, Appich, Karl
• Primary Examiner(s): Bareford, Katherine A.
• Application Number:
  US08/547,779
• Time in Patent Office: 650 Days
• Field of Search: 427/443.2, 427/434.3, 427/434.5, 118/401, 118/429
• US Class Current: 427/434.5
• CPC Class Codes: B05C 9/02 for applying liquid or other fluent material to surfaces by single means not covered by groups B05C1/00 - B05C7/00, whether or not also using other means
• CPC Class Codes: H01L 21/6715 Apparatus for applying a liquid, a resin, an ink or the like H01L21/67126 takes precedence

Abstract

A device for coating substrates with a capillary slot includes a component having a capillary slot with an outlet opening. A container filled with a coating fluid is provided. The component is positioned in the container such that the capillary slot communicates with the coating fluid and such that the coating fluid is supplied to the capillary slot. A device for moving vertically the outlet opening of the capillary slot relative to the container is also provided.

Claims

1. A method for coating an underside of a substrate with a coating fluid, contained in a container and supplied to the underside of the substrate from the container via a capillary slot having an outlet opening by capillary action;

said method comprising the steps of;

lifting the outlet opening of the capillary slot from a rest position, in which the outlet opening is submerged in the coating fluid, into a lifted position above the fluid level of the coating fluid;

moving the substrate and the outlet opening relative to one another reducing a distance between the substrate and the outlet opening to a first spacing wetting of the underside of the substrate with the coating fluid present at the outlet opening;

subsequently enlarging the first spacing to a second spacing sufficient for coating the underside of the substrate by capillary action;

moving the substrate across the capillary slot for coating the underside of the substrate.

2. A method according to claim 1, further comprising, after the step of moving the substrate across the capillary slot, the step of instantly lowering the fluid level in the container in order to effect a movement of the coating fluid counter to a direction of flow of the coating fluid caused by capillary action to thereby end coating of the underside of the substrate.

3. A method for coating an underside of a substrate with a coating fluid contained in a container and supplied with a component comprising a capillary slot, the capillary slot having an outlet opening that, in a rest position of the component, is submerged in the coating fluid;

said method comprising the steps of;

lifting the outlet opening of the capillary slot from the rest position into a lifted position above the fluid level of the coating fluid;

lowering the underside of the substrate toward the outlet opening to a first spacing in order to effect wetting of the underside of the substrate with the coating fluid present at the outlet opening.

4. A method according to claim 3, further comprising the steps of enlarging the first spacing to a second spacing sufficient for coating of the underside of substrate by capillary action and moving the substrate across the capillary slot for coating the underside of the substrate.

5. A method according to claim 4, further comprising, after the step of moving the substrate across the capillary slot, the step of instantly lowering the fluid level in the container in order to effect a movement of the coating fluid counter to a direction of flow of the coating fluid caused by capillary action to thereby terminate coating of the underside of the substrate.

6. A device for coating an underside of a substrate by a capillary slot;

said device comprising;

a component having a capillary slot with an outlet opening;

a container filled with a coating fluid;

said component positioned in said container such that said outlet opening of said capillary slot is submerged in a rest position of said component in said coating fluid;

means for lifting said component from said rest position into a lifted position in which said outlet opening is above a fluid level of said coating fluid for coating the underside of the substrate and for lowering said component from said lifted position into said rest position.

7. A device according to claim 6, wherein said component is vertically lifted and lowered.

8. A device according to claim 6, further comprising a closure apparatus for closing said container when said device is not in use.

9. A device according to claim 8, wherein said closure apparatus comprises an upper angular member connected to an upper side of said closure apparatus so as to be laterally slidable.

10. A device according to claim 6, wherein said container comprises an overflow for maintaining a constant level of the coating fluid in said container.

11. A device according to claim 6, further comprising a pump and a supply container, wherein said pump replenishes an amount of the coating fluid used for coating the substrate with coating fluid from said supply container to the interior of said container.

12. A device according to claim 6 further comprising a filtering device and a pump connected to said container, wherein said pump recirculates the coating fluid from said container through said filtering device for filtering the coating fluid.

13. A device according to claim 12, further comprising a means for automatically interrupting the filtering of the coating fluid during a coating step for coating a substrate.

14. A device according to claim 6, further comprising an element having an adjustable volume, said element arranged in said container within the coating fluid.

15. A device according to claim 14, wherein said element is a bellows.

16. A device according to claim 15, wherein said bellows comprises a linear drive for adjusting the adjustable volume.

17. A device according to claim 6, wherein said component comprises two knife-shaped parts forming therebetween said capillary slot with said outlet opening.

18. A device according to claim 17, wherein said container has a top with an opening and wherein said opening has a width selected such with respect to a size of said knife-shape parts that said opening surrounds said knife-shaped parts at a spacing.

19. A device according to claim 17, wherein said knife-shaped parts at the outlet opening have a horizontal surface having a width within a range of 0.1 to 0.5 mm.

20. A device according to claim 19, wherein said width is substantially 0.3 mm.