Single resist layer lift-off process for forming patterned layers on a substrate

• US 5,654,128 A
• Filed: 02/15/1996
• Issued: 08/05/1997
• Est. Priority Date: 10/21/1994
• Status: Expired due to Fees

• Current Assignee: NGK Insulators Limited
• Original Assignee: NGK Insulators Limited
• Inventors: Hsu, Duanfu Stephen
• Primary Examiner(s): Duda, Kathleen
• Application Number:
  US08/601,826
• Time in Patent Office: 537 Days
• Field of Search: 430/311, 430/313, 430/314, 430/315, 430/317, 430/318, 430/323, 430/324, 430/329, 430/330, 430/3
• US Class Current: 430/324
• CPC Class Codes: G03F 7/168 Finishing the coated layer, e.g. drying, baking, soaking
• CPC Class Codes: G03F 7/40 Treatment after imagewise removal, e.g. baking
• CPC Class Codes: G03F 7/422 using liquids only G03F7/421 takes precedence
• CPC Class Codes: H05K 3/143 Masks therefor H05K3/048 takes precedence

Abstract

A single resist layer lift-off process for forming patterned layers on a substrate, wherein a post-soak bake is used to control the extent to which chlorobenzene penetrates the resist layer. A post-metallization bake can also be employed to improve lift-off of the resist layer. The process of the present invention provides the resist profile with increased overhang length and the sidewalls of the resist profile with a negative slope. Such increased overhang length and negative slope prevent metallization of the sidewalls of the resist, and thus facilitate more rapid removal of the resist during lift-off.

Claims

1. A process for forming a pattern of material on a substrate, comprising the steps of:

depositing a single photoresist layer on an upper surface of said substrate to form a resist/substrate preform;

subjecting said resist/substrate preform to a first heat treatment to adhere said resist layer to said substrate;

immersing said resist/substrate preform in a bath of aromatic solvent;

subjecting said resist/substrate preform to a second heat treatment;

exposing portions of said resist layer in the shape of said pattern;

developing said resist layer to remove said exposed portions thereof and form a patterned resist layer wherein openings are provided through said resist layer to expose the upper surface of said substrate;

applying a layer of deposition material on the patterned resist layer and through the openings therein to forms aid pattern of said deposition material on the upper surface of said substrate;

subjecting said substrate, with the remaining resist layer and deposition material thereon, to a third heat treatment at a temperature within a range of about 100°

C. to 140°

C. and

immersing said substrate, with the remaining resist layer and deposition material thereon, in a solvent bath to lift-off said resist layer, with deposition material thereon, while leaving said pattern of deposition material on the upper surface of said substrate.

2. The process of claim 1, wherein said resist layer comprises novolak resins.

3. The process of claim 1, wherein said first heat treatment is performed at a temperature ranging from 80°

-100°

C. for about 10-30 minutes.

4. The process of claim 1, wherein said first heat treatment is performed at about 90°

C. for about 20 minutes.

5. The process of claim 1, wherein said aromatic solvent comprises chlorobenzene.

6. The process of claim 5, wherein said resist/substrate preform is immersed in chlorobenzene for 5-25 minutes.

7. The process of claim 5, wherein said resist/substrate preform is immersed in chlorobenzene for 10-20 minutes.

8. The process of claim 5, wherein said resist/substrate preform is immersed in chlorobenzene for about 15 minutes.

9. The process of claim 1, wherein said second heat treatment is performed at a temperature ranging from 80°

-100°

C. for about 5-15 minutes.

10. The process of claim 1, wherein said second heat treatment is performed at about 9020 C. for about 10 minutes.

11. The process of claim 1, wherein UV radiation is used to expose portions of said resist layer.

12. The process of claim 11, wherein said portions of said resist layer are exposed for about 5-15 seconds.

13. The process of claim 11, wherein said portions of said resist layer are exposed for about 7.5 seconds.

14. The process of claim 1, wherein said deposition material comprises metal.

15. The process of claim 14, wherein said metal is selected from the group consisting of Al, Au, Cr, Ni, Pt, Ta, Ti, mixtures thereof of and alloys thereof.

16. The process of claim 1, wherein said substrate comprises a transparent material.

17. The process of claim 16, wherein said substrate comprises at least one material selected from the group consisting of GaAs and LiNbO₃.

18. The process of claim 1, wherein said solvent bath comprises acetone.

19. The process of claim 18, wherein said solvent bath is subjected to ultrasonic agitation.

20. The process of claim 19, wherein said resist layer, with said deposition material formed thereon, is removed from said substrate in no more than 15 minutes.

21. The process of claim 1, wherein said third heat treatment is performed at a temperature ranging from 110°

-130°

C. for about 20-30 minutes.

22. The process of claim 1, wherein said third heat treatment is performed at about 120°

C. for about 25 minutes.

23. The process of claim 1, wherein said second heat treatment is performed at a temperature greater than 80°

C., but not greater than 100°

C.

24. The process of claim 1, wherein said third heat treatment is performed for about 15 to 35 minutes.