Apparatus for matching a variable load impedance with an RF power generator impedance

• US 5,654,679 A
• Filed: 06/13/1996
• Issued: 08/05/1997
• Est. Priority Date: 06/13/1996
• Status: Expired due to Term

• Current Assignee: RF Power Products, Inc. (Advanced Energy Industries, Inc. (China))
• Original Assignee: RF Power Products, Inc. (Advanced Energy Industries, Inc. (China))
• Inventors: Ciszek, Andrew, Stach, Joseph, Mavretic, Anton
• Primary Examiner(s): GENSLER, PAUL L
• Application Number:
  US08/662,886
• Time in Patent Office: 418 Days
• Field of Search: 333/17.3, 333/99 PL, 333/32, 343/861, 315/111.21
• US Class Current: 333/17.3
• CPC Class Codes: H03H 7/40 Automatic matching of load impedance to source impedance

Abstract

An apparatus for matching the variable impedance of a load with the fixed impedance of a radio frequency (RF) power generator to provide maximum power transfer. The impedance matching network further allows an RF power generator to vary the frequency of the voltage applied to a load, e.g., a plasma chamber as may be utilized in semiconductor or flat panel plasma display manufacturing processes. The impedance matching network further utilizes fixed solid state components to adjust the impedance of the attached load to provide maximum power transfer between the generator and the load. A parallel switched capacitor network is controlled by an electrical switching means such as PIN diodes to turn fixed capacitors on or off. A means for varying the frequency of the applied voltage is used to match the impedance of the load with the impedance of the RF power generator within milliseconds.

Claims

1. An impedance matching network coupling a radio frequency power generator (RFPG) to a load, comprising:

a phase detector coupled to said RFPG, said phase detector detecting a phase shift in a voltage and a current provided by said RFPG;

a magnitude detector coupled to said RFPG, said magnitude detector detecting a magnitude of an impedance of said load;

a first capacitance coupled in parallel to said load;

an inductance coupled in series with said load;

a second capacitance coupled in series with said load;

a switching circuit coupled to said magnitude detector for coupling and decoupling said first capacitance to ground depending on said magnitude of said impedance of said load detected by said magnitude detector.

2. The impedance matching network of claim 1 wherein said first capacitance is further comprised of a plurality of capacitors coupled in parallel to said load.

3. The impedance matching network of claim 2 wherein said plurality of capacitors equals at least 8 capacitors.

4. The impedance matching network of claim 2 wherein said plurality of capacitors equals at least 16 capacitors.

5. The impedance matching network of claim 2 wherein each one of said plurality of capacitors has a fixed value of capacitance.

6. The impedance matching network of claim 5 wherein each one of said plurality of capacitors has a value of capacitance generally one-half the value of capacitance as a previous capacitor in said plurality of capacitors.

7. The impedance matching network of claim 2 wherein said switching circuit is comprised of a plurality of diodes each coupled to one of said plurality of capacitors for coupling and decoupling said one of said plurality of capacitors to ground.

8. The impedance matching network of claim 7 wherein each one of said plurality of diodes has a large intrinsic region between a p-doped semiconducting region and an n-doped semiconducting region.

9. The impedance matching network of claim 2 wherein said switching circuit is comprised of a plurality of radio frequency relays, each coupled to one of said plurality of capacitors for coupling and decoupling one of said plurality of capacitors to ground.

10. An impedance matching network coupled to a transmission line, said transmission line coupling a radio frequency power generator to a load, said impedance matching network comprising:

a phase detector coupled to said transmission line, said phase detector detecting a phase shift in a voltage and a current on said transmission line;

a frequency synthesizer circuit coupled to said phase detector, said frequency synthesizer circuit changing the frequency of said voltage depending on said phase shift in said voltage and said current on said transmission line detected by said phase detector;

a magnitude detector coupled to said transmission line, said magnitude detector detecting an impedance on said transmission line;

a plurality of capacitors coupled to said transmission line parallel to said load;

an inductance coupled to said transmission line in series with said load;

a capacitance coupled to said transmission line in series with said load, said capacitance, said plurality of capacitors, and said inductance forming an L-type impedance matching network;

a plurality of switches, each coupled to one of said plurality of capacitors, said plurality of switches coupling and decoupling said plurality of capacitors to a ground depending on said impedance of said transmission line detected by said magnitude detector; and

,

a controller coupled to said magnitude detector and said plurality of switches for controlling said plurality of switches depending on said magnitude of said impedance on said transmission line.

11. The impedance matching network of claim 10 further comprising a resistance coupled to said transmission line parallel to said load, said resistance maintaining said plurality of capacitors in a discharged state depending on said magnitude of said impedance of said transmission line.

12. The impedance matching network of claim 10 wherein said plurality of capacitors equals 8 capacitors.

13. The impedance matching network of claim 10 wherein said plurality of capacitors equals 16 capacitors.

14. The impedance matching network of claim 10 wherein each one of said plurality of capacitors has a fixed value of capacitance.

15. The impedance matching network of claim 10 wherein said plurality of switches is comprised of a plurality of diodes each coupled to one of said plurality of capacitors for coupling and decoupling said one of said plurality of capacitors to said ground.

16. The impedance matching network of claim 15 wherein each one of said plurality of diodes is a PIN diode.

17. The impedance matching network of claim 10 wherein said plurality of switches is comprised of a plurality of radio frequency relays each coupled to one of said capacitors for coupling and decoupling said one of said plurality of capacitors to said ground.