×

Apparatus for matching a variable load impedance with an RF power generator impedance

  • US 5,654,679 A
  • Filed: 06/13/1996
  • Issued: 08/05/1997
  • Est. Priority Date: 06/13/1996
  • Status: Expired due to Term
First Claim
Patent Images

1. An impedance matching network coupling a radio frequency power generator (RFPG) to a load, comprising:

  • a phase detector coupled to said RFPG, said phase detector detecting a phase shift in a voltage and a current provided by said RFPG;

    a magnitude detector coupled to said RFPG, said magnitude detector detecting a magnitude of an impedance of said load;

    a first capacitance coupled in parallel to said load;

    an inductance coupled in series with said load;

    a second capacitance coupled in series with said load;

    a switching circuit coupled to said magnitude detector for coupling and decoupling said first capacitance to ground depending on said magnitude of said impedance of said load detected by said magnitude detector.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×