Method for manufacturing salicide semiconductor device

• US 5,656,519 A
• Filed: 02/13/1996
• Issued: 08/12/1997
• Est. Priority Date: 02/14/1995
• Status: Expired due to Fees

• Current Assignee: NEC Corporation
• Original Assignee: NEC Corporation
• Inventors: Mogami, Tohru
• Primary Examiner(s): QUACH, TUAN N
• Application Number:
  US08/600,532
• Time in Patent Office: 546 Days
• Field of Search: 437/41 SM, 437/41 GS, 437/190, 437/192, 437/193, 437/200, 437/228, 257/384, 257/413, 156/653.1
• US Class Current: 438/303
• CPC Class Codes: H01L 21/28052 the conductor comprising a silicide layer formed by the silicidation reaction of silicon with a metal layer formed by metal ion implantation H01L21/28044
• CPC Class Codes: H01L 21/823835 silicided or salicided gate conductors
• CPC Class Codes: H01L 29/665 using self aligned silicidation, i.e. salicide formation of conductive layers comprising silicides H01L21/28518
• CPC Class Codes: H01L 29/66545 using a dummy, i.e. replacement gate in a process wherein at least a part of the final gate is self aligned to the dummy gate
• CPC Class Codes: H01L 29/6659 with both lightly doped source and drain extensions and source and drain self-aligned to the sides of the gate, e.g. lightly doped drain [LDD] MOSFET, double diffused drain [DDD] MOSFET
• CPC Class Codes: Y10S 438/97 Specified etch stop material

Abstract

In a method for manufacturing a salicide MOS device, a gate insulating layer and a polycrystalline silicon gate electrode layer are formed on a monocrystalline silicon substrate. A sidewall insulating layer is formed on a sidewall of the gate electrode layer, and impurities are introduced into the substrate with a mask of the sidewall insulating layer and the gate electrode layer, thus forming impurity diffusion regions in the substrate. Then, an upper portion of the gate electrode layer is etched out. Finally, a metal layer is formed on the entire surface, and a heating operation is carried out, so that metal silicide layers are formed on upper portions of the gate electrodes and the impurity diffusion regions. In an alternative embodiment, the gate further comprises an intervening metal nitride layer.

Claims

1. A method for manufacturing a semiconductor device comprising the steps of:

forming a gate insulating layer on a monocrystalline silicon substrate;

forming a polycrystalline silicon gate electrode layer on said gate insulating layer;

forming a sidewall insulating layer on a sidewall of said polycrystalline silicon gate electrode layer;

introducing first impurities into said monocrystalline silicon substrate with a mask of said sidewall insulating layer and said polycrystalline silicon gate electrode layer to form impurity diffusion regions in said monocrystalline silicon substrate;

selectively removing an upper portion of said polycrystalline silicon gate electrode layer after said impurity diffusion regions are formed;

forming a metal layer on said etched polycrystalline silicon gate electrode layer and said impurity diffusion regions;

performing a heating operation upon said metal layer so that said metal layer is reacted with said etched polycrystalline silicon gate layer and said impurity diffusion regions to form metal silicide layers; and

removing a portion of said metal layer which is unreacted.

2. The method as set forth in claim 1, wherein said selectively removing step etches said polycrystalline silicon layer by a vapor phase etching process using chlorine gas.

3. The method as set forth in claim 2, wherein said vapor phase etching process is carried out at a substrate temperature of about 740°

C. to 800°

C.

4. The method as set forth in claim 1, further comprising a step of introducing second impurities into said polycrystalline silicon gate electrode and said impurity diffusion regions of said monocrystalline silicon substrate so that a part of said polycrystalline silicon gate electrode and a part of said impurity diffusion regions become amorphous, after the upper portion of said polycrystalline silicon gate electrode is selectively removed.

5. The method as set forth in claim 4, wherein said second impurities are at least arsenic ions, BF₂ ions and silicon ions.

6. The method as set forth in claim 1, further comprising a step of forming a silicon layer including second impurities on said polycrystalline silicon gate electrode and said impurity diffusion regions, after the upper portion of said polycrystalline silicon gate is selectively removed.

7. The method as set forth in claim 6, wherein said silicon layer forming step forms said silicon layer by a vapor phase process using one of silane and disilane.

8. The method as set forth in claim 6, wherein a density of said second impurities in said silicon layer is less than approximately 10¹⁹ /cubic cm.

9. The method as set forth in claim 6, further comprising a step of introducing second impurities into said polycrystalline silicon gate electrode and said impurity diffusion regions of said monocrystalline silicon substrate so that a part of said polycrystalline silicon gate electrode and a part of said impurity diffusion regions become amorphous, after said silicon layer is formed.

10. The method as set forth in claim 9, wherein said second impurities are at least arsenic ions, BF₂ ions and silicon ions.

11. The method as set forth in claim 1, wherein said metal layer is made of refractory metal.

12. The method as set forth in claim 1, further comprising a step of forming second impurities into said monocrystalline silicon substrate with a mask of said polycrystalline silicon gate electrode layer to form impurity diffusion regions in said monocrystalline silicon substrate, after said polycrystalline silicon gate electrode is formed.

13. A method for manufacturing a semiconductor device comprising the steps of:

forming a gate insulating layer on a monocrystalline silicon substrate;

forming a first polycrystalline silicon layer on said gate insulating layer;

forming a metal nitride layer on said first polycrystalline silicon layer;

forming a second polycrystalline silicon layer on said metal nitride layer;

forming a sidewall insulating layer on a sidewall of said second polycrystalline silicon layer said metal nitride layer and said first polycrystalline silicon layer;

introducing first impurities into said monocrystalline silicon substrate with a mask of said sidewall insulating layer and said second polycrystalline silicon layer to form impurity diffusion regions in said monocrystalline silicon substrate;

removing said second polycrystalline silicon layer after said impurity diffusion regions are formed;

forming a metal layer on said metal nitride layer and said impurity diffusion regions;

performing a heating operation upon said metal layer so that said metal layer is reacted with said impurity diffusion regions to form metal silicide layers; and

removing a portion of said metal layer which is unreacted.

14. The method as set for the in claim 13, further comprising a step of forming a metal layer on said metal nitride layer.

15. The method as set forth in claim 13, wherein said metal nitride layer is made of tungsten nitride, and said metal layer is made of tungsten.

16. The method as set forth in claim 13, wherein said selectively removing step etches said second polycrystalline silicon layer by a vapor phase etching process using chlorine gas, said metal nitride layer serving as an etching stopper of said vapor etching process.

17. The method as set forth in claim 16, wherein said vapor phase etching process is carried out at a substrate temperature of about 740°

C. to 800°

C.

18. The method as set forth in claim 13, further comprising a step of introducing second impurities into said impurity diffusion regions of said monocrystalline silicon substrate so that a part of said impurity diffusion regions become amorphous, after said second polycrystalline silicon layer is removed.

19. The method as set forth in claim 18, wherein said second impurities are at least arsenic ions, BF₂ ions and silicon ions.

20. The method as set forth in claim 13, wherein said metal layer is made of refractory metal.

21. The method as set forth in claim 13, further comprising forming second impurities into said monocrystalline silicon substrate with a mask of said second polycrystalline silicon layer, said metal nitride layer and said first polycrystalline silicon layer to form impurity diffusion regions in said monocrystalline silicon substrate, after said second polycrystalline silicon layer is formed.