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Capacitive pressure transducer with an integrally formed front housing and flexible diaphragm

  • US 5,656,780 A
  • Filed: 03/28/1996
  • Issued: 08/12/1997
  • Est. Priority Date: 03/28/1996
  • Status: Expired due to Fees
First Claim
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1. A simplified capacitive pressure transducer comprising:

  • a front housing including a conductive surface and a flexible diaphragm, a portion of the conductive surface comprising the flexible diaphragm;

    a rear housing fitted to said front housing forming a transducer chamber;

    a semiconductor circuit for providing an output signal variable in accordance with changes in input capacitance, said circuit being secured within said transducer chamber;

    an insulating substrate including a reference capacitor electrode, a variable capacitor electrode and a plurality of vias, the insulating substrate being mechanically coupled to said front housing such that the conductive surface and the reference capacitor electrode form a reference capacitor and the conductive surface and the variable capacitor electrode form a variable capacitor, the reference capacitor electrode and the variable capacitor electrode being electrically connected to said semiconductor circuit through the vias; and

    said front housing being formed as a single homogenous high pressure metal fitting housing with a constant diameter bore extending through said front housing to form the flexible diaphragm, the bore having a diameter less than 0.25 inches;

    said semiconductor circuit including signal processing circuitry and an isolating capacitor which electrically connects the conductive surface of the front housing to the signal processing circuitry.

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