Technique for achieving preferred optical alignment in a scanning interferometer

• US 5,657,122 A
• Filed: 06/06/1995
• Issued: 08/12/1997
• Est. Priority Date: 06/06/1995
• Status: Expired due to Term

• Current Assignee: Agilent Technologies Australia (M) Pty., Ltd. (Agilent Technologies, Inc.)
• Original Assignee: Bio-Rad Laboratories Incorporated
• Inventors: Johnson, David B., Curbelo, Raul
• Primary Examiner(s): Epps, Georgia Y.
• Assistant Examiner(s): KIM, ROBERT H
• Application Number:
  US08/481,227
• Time in Patent Office: 798 Days
• Field of Search: 356/345, 356/346, 356/358
• US Class Current: 356/452
• CPC Class Codes: G01J 2003/2866 Markers; Calibrating of scan
• CPC Class Codes: G01J 3/453 by correlation of the amplitudes

Abstract

Alignment circuity and calibration method for a scanning interferometer. Phase shifts are introduced into the alignment servo to maximize overall modulation efficiency.

Claims

1. A method for controlling the alignment of an optical instrument having an adjustable element, the method comprising the steps of:

in a first stage,

providing a servo that generates an alignment error signal representing an orientation of the adjustable element, monitors the alignment error signal, and moves the adjustable element in response to the alignment error signal in a manner tending to null the alignment error signal and thus providing an orientation of the adjustment element that maximizes a first performance criterion of the optical instrument,

providing a mechanism to modify at least one electrical signal in the servo by modifying a value of an adjustable input parameter so that when the servo operates in a manner tending to null the alignment error signal, a modified orientation of the adjustable element results, which modified orientation no longer maximizes the first performance criterion,

with the servo operating, measuring a second performance criterion of the optical instrument for a plurality of values of the input parameter, the second performance criterion being different from the first performance criterion,

determining a value of the input parameter that maximizes the second performance criterion, and

setting the input parameter to the value, so determined; and

in a second, subsequent stage,

operating the optical instrument using the servo whereby the servo operates to maintain the adjustable element in an orientation that maximizes the second performance criterion.

2. The method of claim 1 wherein:

the optical instrument is an interferometer having a set of calibration beams illuminating a relatively small portion of the adjustable element and an analytical beam illuminating a relatively large portion of the adjustable element;

the first performance criterion is a parameter representing modulation efficiency with respect to the set of calibration beams; and

the second performance criterion is a parameter representing modulation efficiency with respect to the analytical beam.

3. The method of claim 1 wherein:

the alignment error signal is generated to represent a phase difference between two input signals;

the mechanism modifies the phase of one of the input signals; and

the adjustable input parameter is a phase shift.

4. The method of claim 1 wherein:

the servo includes a phase comparator having an output signal representing a phase difference between two input signals;

the mechanism modifies the output signal of the phase shift comparator; and

the adjustable input parameter is a voltage offset applied to the output signal of the comparator.

5. In an interferometer having

a plurality of optical elements including a controllable element coupled to an actuator, and

a servo that generates an alignment error signal representing a relative orientation of the optical elements and provides a tilt signal to the actuator in order to change the relative orientation of the optical elements so as to null the alignment error signal and thus provide a relative orientation of the optical elements that maximizes a particular performance criterion of the interferometer, a method of controlling the alignment of the interferometer, the method comprising the steps of:

providing a mechanism to modify at least one electrical signal in the servo in response to modifying a value of an adjustable input parameter so that when the servo operates in a manner tending to null the alignment error signal, a modified relative orientation of the adjustable element results, which modified relative orientation no longer maximizes the particular performance criterion;

determining a value of the input parameter that maximizes a modulation efficiency parameter for the interferometer, the modulation efficiency parameter being different from the particular performance criterion; and

setting the input parameter to the value, so determined, so that during subsequent operation, the tilt signal maintains a relative orientation of the optical elements that maximizes the modulation efficiency parameter.

6. The method of claim 5 wherein said step of determining a value of the input parameter comprises the substeps of:

with the servo operating, measuring the modulation efficiency parameter of the interferometer for a plurality of values of the input parameter; and

determining a value of the input parameter that maximizes the modulation efficiency parameter.

7. The method of claim 5 wherein said step of determining a value of the input parameter comprises the substeps of:

operating the optical instrument while preventing the servo from providing the tilt signal to the actuator, and determining a specific relative orientation of the optical elements that maximizes the modulation efficiency parameter of the optical instrument;

setting the optical elements to the specific relative orientation;

operating the optical instrument while preventing the servo from providing the tilt signal to the actuator, and monitoring the alignment error signal; and

operating the optical instrument while preventing the servo from providing the tilt signal to the actuator, and adjusting the input parameter so as to null the alignment error signal during such operation.

8. In an optical instrument having a plurality of optical elements including a controllable element coupled to an actuator, and

a servo that generates an alignment error signal representing a relative orientation of the optical elements and provides a tilt signal to the actuator in order to change the relative orientation of the optical elements so as to null the alignment error signal and thus provide relative orientation of the optical elements that maximizes a first performance criterion of the optical instrument, a method of controlling the alignment of the optical instrument, the method comprising the steps of:

providing a mechanism to modify at least one electrical signal in the servo by modifying a value of an adjustable input parameter so that when the servo operates in a manner tending to null the alignment error signal, a modified relative orientation of the optical elements results, which modified relative orientation no longer maximizes the first performance criterion;

while preventing the servo from providing the tilt signal to the actuator, performing the following steps, designated (a), (b), (c), and (d), of

(a) operating the optical instrument and determining a specific relative orientation of the optical elements that miximizes a second performance criterion of the optical instrument, the second performance criterion being different from the first performance criterion,

(b) setting the optical elements to the specific relative orientation,

(c) operating the optical instrument and monitoring the alignment error signal, and

(d) operating the optical instrument and adjusting the input parameter so as to null the alignment error signal during such operation; and

thereafter, allowing the servo to provide the tilt signal to the actuator, whereupon during operation of the optical instrument the servo operates to maintain the specific relative orientation.

9. A method of controlling the orientation of a mirror in a scanning Michelson interferometer, the method comprising the steps of:

directing a plurality of monochromatic beams so as to impinge on a relatively small area of the interferometer;

detecting a corresponding plurality of monochromatic detector signals;

directing an analytic beam so as to impinge on a relatively large area of the interferometer;

detecting an analytic detector signal that is characterized by a modulation parameter;

providing a servo that tilts the mirror in response to the monochromatic detector signals so as to establish a phase relationship among the monochromatic detector signals, the phase relationship being characterized by adjustable phase offsets;

determining a set of values for the adjustable phase offsets that causes the servo to tilt the mirror to an orientation that results in a desired level for said modulation parameter; and

setting the servo to operate using the set of values, so determined.

10. A control mechanism for a scanning interferometer having a set of optical elements and a monochromatic reference system that provides a reference signal, the control mechanism comprising:

first and second actuators for controllably adjusting the relative orientation of at least one optical element in the scanning interferometer;

first and second alignment sensing detectors providing first and second alignment sensing signals;

first and second phase comparators, each having respective first and second inputs and a respective output;

said first and second inputs of said first phase comparator coupled to receive signals representing said first alignment sensing signal and said reference signal, respectively;

said first and second inputs of said second phase comparator coupled to receive signals representing said second alignment sensing signal and said reference signal, respectively;

a first adjustable phase shifting element coupled to a selected one of said first and second inputs of said first phase comparator so as to introduce a first adjustable phase shift between said first alignment sensing signal and said reference signal as received at said first and second inputs of said first phase comparator;

a second adjustable phase shifting element coupled to a selected one of said first and second inputs of said second phase comparator so as to introduce a second adjustable phase shift between said second alignment sensing signal and said reference signal as received at said first and second inputs of said second phase comparator;

a first servo loop compensation element coupled between the output of said first phase comparator and said first actuator; and

a second servo loop compensation element coupled between the output of said second phase comparator and said second actuator.

11. The control mechanism of claim 10 wherein:

said reference system includes a reference detector; and

said reference signal is derived from said reference detector.

12. The control mechanism of claim 10 wherein:

said reference system includes a reference clock generator; and

said reference signal is derived from said reference clock generator.

13. The control mechanism of claim 10 wherein:

said first adjustable phase shifting element is coupled between said first alignment sensing detector and said first input of said first phase comparator; and

said second adjustable phase shifting element is coupled between said second alignment sensing detector and said first input of said second phase comparator.

14. The control mechanism of claim 10 wherein:

said first adjustable phase shifting element is coupled between said monochromatic reference system and said second input of said first phase comparator; and

said second adjustable phase shifting element is coupled between said monochromatic reference system and said second input of said second phase comparator.

15. A scanning interferometer comprising:

a set optical elements including a beamsplitter disposed to direct a first portion of input light along a first path and a second portion of the input light along a second path, and first and second mirrors in said first and second paths, respectively, oriented to direct light back to said beamsplitter for recombination;

means for moving one of said optical elements over a range so as to introduce a varying phase shift for light travelling along said first path relative to light travelling along said second path;

a monochromatic reference system providing a reference signal and first and second alignment sensing signals, said first and second alignment sensing signals being characterized by respective phases relative to said reference signal;

means for directing a beam of analytical radiation onto an extended region of said beamsplitter, whereupon said beam of analytical radiation produces at least one recombined beam of analytical radiation including a component that encountered said first mirror and a component that encountered said second mirror;

a detector, disposed to intercept one of said recombined beams of analytical radiation and provide an analytical detector signal, said analytical detector signal being characterized by a modulation parameter;

first and second actuators coupled to at least one of said optical elements, said actuators being responsive to respective first and second tilt signals and operating to change a relative orientation of said optical elements in dependence on said tilt signals; and

a servo system, responsive to said alignment sensing signals, for generating said first and second tilt signals to cause said optical elements to assume a relative orientation that depends on said phases of said alignment sensing signals relative to said reference signal;

said servo system including first and second adjustable phase shifting elements that cause said tilt signals to control said first and second actuators so that said alignment sensing signals differ in phase from said reference signal by respective first and second phase shifts;

said first and second phase shifts being adjusted to result in a first value of the modulation parameter, which first value is greater than a second value of the modulation parameter that results when the phase shifts are zero.