Structure for membrane damping in a micromechanical modulator

• US 5,659,418 A
• Filed: 02/05/1996
• Issued: 08/19/1997
• Est. Priority Date: 02/05/1996
• Status: Expired due to Term

• Current Assignee: Avago Technologies General IP PTE Limited (Broadcom, Inc.)
• Original Assignee: Lucent Technologies, Inc. (Nokia Corporation)
• Inventors: Yurke, Bernard
• Primary Examiner(s): Ben, Loha
• Application Number:
  US08/597,003
• Time in Patent Office: 561 Days
• Field of Search: 359/290, 359/291, 359/294, 359/295, 359/298, 250/227.23, 250/227.27
• US Class Current: 359/290
• CPC Class Codes: G02B 26/0825 the reflecting element being a flexible sheet or membrane, e.g. for varying the focus flexible mirrors for cosmetic use A45D42/24
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B

Abstract

An improved micromechanical modulator that incorporates a mechanical transmission line for damping membrane vibration is disclosed. The modulator comprises a transmission line mechanically communicating with a vertically-movable membrane for receiving an optical signal. The membrane is supported over a substrate. Under the action of bias, the membrane moves toward the substrate, which causes a change in an optical property of the modulator. The transmission line receives and dissipates a sufficient amount of the energy developed in the membrane as it moves to prevent the membrane from vibrating. In one configuration, the modulator incorporates two strip-line transmission lines. In another configuration, the modulator incorporates two clamped-plate transmission lines.

Claims

1. A micromechanical modulator operable at an operating frequency to modulate an optical signal, the modulator having two spaced layers, one of the layers being movable, wherein the movable layer has a first position relative to the other layer in the absence of a bias signal and a second position in the presence of a bias signal, wherein the change in position of the movable layer in response to the bias signal remits in a change in a measurable characteristic of the optical signal returned from the modulator, the modulator further comprising at least one transmission line mechanically communicating with the movable layer, wherein the transmission line is physically adapted to receive and dissipate an amount of energy from the movable layer sufficient to prevent the movable layer from vibrating after moving from the first position to the second position or from the second position to the first position.

2. The modulator of claim 1 comprising a second transmission line mechanically communicating with the movable layer.

3. The modulator of claim 1 wherein a quality factor of the modulator is in the range of about 0.5 to about 1.0.

4. The modulator of claim 1 wherein a quality factor of the modulator is in the range of about 0.7 to about 0.8.

5. The modulator of claim 1 wherein ninety-five percent of the amount of energy received by the transmission line from the movable layer is dissipated.

6. The modulator of claim 1 wherein ninety-nine percent of the amount of energy received by the transmission line from the movable layer is dissipated.

7. The modulator of claim 1 wherein the amount of energy received and dissipated by the transmission line is removed in one-quarter cycle or less at the modulator'"'"'s operating frequency.

8. The modulator of claim 1 wherein the movable layer is characterized by a width and a length, and wherein the transmission line is a strip-line transmission line characterized by a width and a length.

9. The modulator of claim 8 further comprising support arms for supporting the transmission line.

10. The modulator of claim 8 wherein the width of the transmission line is equal to the width of the moveable layer.

11. The modulator of claim 8 wherein the length of the transmission line is at least three times the length of the movable layer.

12. The modulator of claim 1 wherein the transmission line is a clamped-plate transmission line characterized by a width.

13. The modulator of claim 12 further comprising structural adaptations for allowing gas contained in cavities formed beneath the transmission line and movable layer to escape.

14. The modulator of claim 13 wherein the structural adaptations comprise a plurality of spaced holes formed in the transmission line.

15. The modulator of claim 14 wherein the spacing, d, of the holes is determined according to the expression d=2[(Pg²)/(12 π

μ

_eff f)]⁰.5, where P is the pressure of the gas contained in the cavities, g is the distance between the transmission line and the other layer, f is the natural resonant frequency of the transmission line and μ

_eff is effective gas viscosity, which is determined according to the expression μ

_eff =μ

/{1+[6(2-σ

)λ

/(σ

g)]}, where σ

is the accommodation coefficient and λ

is the mean-free-path of the gas.

16. The modulator of claim 12 further comprising a central region in which the movable layer is situated, the central region having a mass per unit area that is no more than about one-half of the mass per unit area of the transmission line.

17. The modulator of claim 16 wherein the movable layer is further characterized by a width and a length, and wherein the width of the movable layer is no more than about one-fifth of the length of the movable layer.

18. The modulator of claim 16 wherein the central region is further characterized by a width, and wherein the width of the central region is at least about 32 percent, and no more than about 48 percent, of the length of the movable layer.

19. The modulator of claim 16 wherein the width of the transmission line is at least twice the length of the movable layer.

20. A micromechanical modulator for modulating an optical signal, comprising:

a substrate;

a vertically-movable membrane that receives an optical signal, wherein the membrane is supported in a spaced and superposed relation to the substrate defining an air gap;

a transmission line in mechanical communication with the membrane; and

a device for supplying a bias signal to the membrane and substrate;

wherein,

in the absence of the bias signal, the membrane has a first vertical position relative to the substrate and in the presence of the bias signal the membrane has a second vertical position relative to the substrate, wherein, there is a difference in an optical property of the modulator when the membrane is in its first vertical position as compared to its second vertical position, and further wherein the transmission line receives and dissipates a sufficient amount of the energy developed in the membrane as the membrane changes vertical position so that there is substantially no vibration in the membrane.

21. The modulator of claim 20 further comprising a second transmission line, and further wherein both transmission lines are strip-line transmission lines.

22. The modulator of claim 20 further comprising a second transmission line, and further wherein both transmission lines are clamped-plate transmission lines.