Stiff actuator active vibration isolation system

• US 5,660,255 A
• Filed: 04/04/1994
• Issued: 08/26/1997
• Est. Priority Date: 04/04/1994
• Status: Expired due to Term

• Current Assignee: Technical Manufacturing Corporation (Ametek Incorporated)
• Original Assignee: Applied Power Incorporated (ICC-Nexergy, Inc)
• Inventors: Von Flotow, Andreas H., Earles, Marion Richard Jr., Beard, Andrew Michael, Schubert, Dale W., Shedd, Steven Frank
• Primary Examiner(s): Poon, Peter M.
• Application Number:
  US08/223,256
• Time in Patent Office: 1,240 Days
• Field of Search: 188/378-381, 267/136, 267/140.11, 52/167.1, 52/167.2, 52/167.3, 52/167.7, 52/167.8
• US Class Current: 188/378
• CPC Class Codes: B60G 2600/182 Active control means
• CPC Class Codes: E04H 9/0215 involving active or passive dynamic mass damping systems
• CPC Class Codes: F16F 15/005 using electro- or magnetostrictive actuation means generating of mechanical vibrations operating with electrostriction B06B1/06, with magnetostriction B06B1/08; vehicle suspension arrangements characterised by use of piezoelectric elements B60G17/01941; piezoelectric, electrostrictive and magnetostrictive devices per se H10N30/00
• CPC Class Codes: F16F 15/02 Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems F16F15/005 takes precedence ; layered products B32B; suppression of vibration in ships B63; relieving load on bearings, using magnetic means F16C39/06
• CPC Class Codes: G03F 7/70691 Handling of masks or workpieces
• CPC Class Codes: G03F 7/70833 Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation
• CPC Class Codes: G05B 2219/41191 Cancel vibration by positioning two slides, opposite acceleration

Abstract

An active vibration isolation system (10) includes a plurality of stiff actuators, such as piezoelectric motors (12a-c; 284, 350) which support a small mass (18) inside of a case (300). A passive isolator (20) is interposed between the small mass (18) and the payload mass (M_p). In the instance where the stiff actuators are piezoelectric motors, the sidewalls of the case (300) are used to provide compressive force along the variable length of each of the horizontal piezoelectric motor elements (284, 350) to prevent damage to same. Compensation circuitry (24) is connected between velocity sensors (17) and the stiff actuators to control the variable length thereof in this move-out-of-the-way system (10) and to compensate for resonating modes. Optionally, a payload mass velocity sensor (26) and associated circuitry may be used to provide additional control. Shear decouplers (282a-c; 352, 360) are used in conjunction with the piezoelectric motor elements (12a-c; 284, 350) to minimize the amount of shear force acting on the motor elements.

Claims

1. An active vibration isolation system for isolating a payload mass falling within a predetermined range of payload masses from a source of vibration, comprising:

a small mass which is at least one order of magnitude less than said predetermined range of payload masses;

at least one stiff actuator having first and second opposed surfaces and a variable length in between said surfaces which is in alignment with an axis, said first surface of said stiff actuator coupled to said small mass and said second surface of said stiff actuator coupled to the source of vibration;

a passive isolator interposed between said small mass and said payload mass, wherein said stiff actuator, said small mass and said passive isolator are interposed between said payload mass and the source of vibration;

a sensor coupled to said small mass and adaptable to generate a sensor signal which is a function of the movement of said small mass; and

circuitry coupling said sensor to said stiff actuator and adaptable to receive said sensor signal, said circuitry including compensation circuitry to alter said sensor signal such that said system will be stable over a predetermined range of vibration frequencies and payload masses, said circuitry further including control circuitry coupled to said stiff actuator for varying the length of said stiff actuator as a function of said altered sensor signal.

2. The active vibration system of claim 1, wherein said stiff actuator is a piezoelectric motor.

3. The active vibration isolation system of claim 1, wherein the ratio of said small mass to said payload mass is in the range of 1/50 to 1/200.

4. The active vibration isolation system of claim 1, wherein said passive isolator is formed of an elastomer.

5. The active vibration isolation system of claim 1, wherein said stiff actuator is one of at least first, second and third stiff actuators each having first and second opposed surfaces and respective variable lengths between said opposed surfaces, each of said first, second and third stiff actuators being in alignment with a respective axis which is at an angle to the axes associated with the remaining ones of said first, second and third stiff actuators, first surfaces of each of said stiff actuators coupled to said small mass and second surfaces of each of said stiff actuators coupled to said support wherein said stiff actuators are operable to isolate said payload mass from said source of vibration along each of said three axes.

6. The active vibration isolation system of claim 5, wherein said axes are orthogonal to each other.

7. The active vibration isolation system of claim 5, wherein said first surface of said first stiff actuator is coupled to said small mass by a shear decoupler interposed between the last said first surface and said small mass.

8. The active vibration isolation system of claim 5, wherein said sensor is one of first, second and third sensors each coupled to said small mass, each of said sensors sensing the movement of said small mass in a direction parallel to a respective one of said axes;

and

first, second and third compensation circuits coupling ones of said sensors to respective ones of said first, second and third stiff actuators.

9. The active vibration isolation system of claim 1, wherein said sensor signal is a velocity signal indicating velocity of said small mass, said circuitry including a velocity integrator for integrating said velocity signal to derive a displacement signal and having an output for said displacement signal, said compensation circuitry coupled to said output of said velocity integrator.

10. The active vibration isolation system of claim 1, wherein said compensation circuitry includes a DC blocking circuit for blocking DC voltage from said sensor.

11. The active vibration isolation system of claim 10, wherein said DC blocking circuit has the transfer function ##EQU11## where S is the LaPlace transform operator and W₁ is a frequency of about 0.3 hertz.

12. The active vibration isolation system of claim 11, wherein said DC blocking circuit is an analog stage.

13. The active vibration isolation system of claim 1, wherein said compensation circuitry includes a low-frequency compensation circuit with a transfer function ##EQU12## wherein S is the Laplace transform operator, T_c1 is a preselected first time constant and T_c2 is a preselected second time constant which is about twenty times shorter than said first time constant.

14. The active vibration isolation system of claim 13, wherein said sensor has a suspension frequency, T_c1 being approximately matched to said suspension frequency.

15. The active vibration isolation system of claim 1, wherein said predetermined range of masses is 500 to 2,000 pounds.

16. The system of claim 1, wherein said compensation circuitry includes a lead phase increase circuit which adds phase lead in the frequency region of resonance of said passive isolator.

17. The system of claim 16, wherein said lead phase increase circuit causes a phase shift of said sensor signal in said frequency region of at least forty degrees.

18. The system of claim 16, wherein said lead phase increase circuit comprises two series-connected analog lead lag stages having two poles and two zeroes.

19. The system of claim 1, wherein said compensation circuitry comprises a high frequency gain reduction circuit operating on said sensor signal to reduce the gain thereof to unity at a point in the frequency domain substantially less than the resonance frequency formed by spring constant of said stiff actuator and said small mass.

20. The system of claim 19, wherein said high frequency gain reduction circuit has a transfer function ##EQU13## where S is the LaPlace Transform Operator and 1/T_c3 is said unity gain point in the frequency domain.

21. The system of claim 19, wherein said high frequency gain reduction circuit is an analog circuit.

22. The system of claim 21, wherein said high frequency gain reduction circuit comprises two series-connected lag lead circuits each having a pole at a first frequency prior to said unit gain point and a zero at a second frequency after said unity gain point.

23. The system of claim 19, wherein said resonance frequency is about 1500 hertz, said unity gain point in the frequency domain preselected to be about 350 hertz.

24. The system of claim 1, wherein said compensation circuitry includes a notch filter circuit having a notch of low gain at a resonance frequency caused by the interaction of said small mass, said payload mass and said passive isolator.

25. The system of claim 24, wherein said notch filter circuit has a notch at about 300 hertz.

26. The system of claim 24, wherein said notch filter has a DC gain of near unity.

27. An active vibration isolation system for isolating a payload mass falling within a predetermined range of payload masses from a vibrating base on which the payload mass is supported, comprising:

a small mass which is at least one order of magnitude less than said predetermined range;

at least one stiff actuator having first and second faces and a variable length between said first and second faces, said stiff actuator changing said variable length responsive to receiving an actuator control signal, said first face of said stiff actuator coupled to said small mass and disposed in parallel to an axis passing through said small mass and said second face of said stiff actuator coupled to the base;

a passive isolator interposed between said small mass and said payload mass and disposed in axial opposition to said stiff actuator, wherein said stiff actuator, said small mass and said passive isolator are interposed between said payload mass and the source of vibration; and

a geophone mounted on said small mass for measuring the absolute velocity thereof and generating a velocity signal, circuitry coupled to said geophone and said stiff actuator for receiving said velocity signal, integrating said velocity signal to obtain a displacement signal, and generating said actuator control signal as a function of said displacement signal, wherein said active vibration system is interposed between said payload mass and a vibration source.

28. The active vibration isolation system of claim 27, wherein said stiff actuator is interposed between said small mass and said vibration source.

29. The active vibration isolation system of claim 28, wherein the ratio of said small mass to said payload mass is in the range of 1/50 to 1/200.

30. An active vibration isolation system, comprising:

a passive isolator mount adaptable to support a payload having a payload mass falling within a predetermined range of masses, said payload exerting a force on said passive isolator mount along a first axis;

at least one payload velocity sensor coupled to said payload for sensing an absolute velocity of said payload in a direction parallel to said first axis;

a small mass supporting said passive isolator mount and disposed in opposition to said payload mass, said small mass preselected to be at least one order of magnitude less than said predetermined range of masses;

at least one small mass velocity sensor coupled to said small mass for sensing an absolute velocity of said small mass in a direction parallel to said first axis;

at least a first stiff actuator disposed adjacent said small mass and in opposition to said passive isolator mount, a length of said first stiff actuator aligned with said first axis and variable as a function of a control signal applied thereto; and

a controller having inputs coupled to said sensors and at least one output which is coupled to said first stiff actuator, said controller operable to control said first stiff actuator to compensate for vibration of said payload with said control signal, said control signal generated by said controller as a function of input signals appearing on said inputs from said sensors.

31. The active vibration isolation system of claim 30, wherein said controller includes an integrator for integrating said small mass velocity signal to obtain a small mass displacement signal, said controller generating said control signal as a function of said small mass displacement signal.

32. The active vibration isolation system of claim 30, wherein said stiff actuator is a piezoelectric motor.

33. The active vibration isolation system of claim 30, wherein the ratio of said small mass to said payload mass is in the range of 1/50 to 1/200.

34. The system of claim 30, and further comprising at least one radial stiff actuator physically in communication with said small mass along a second axis disposed at an angle to said first axis, a length of said radial stiff actuator along said second axis variable as a function of a second control signal applied thereto;

a second payload sensor coupled to said payload mass for sensing a second absolute velocity of said payload in a direction parallel to said second axis and generating a second payload velocity signal;

a second small mass velocity sensor coupled to said small mass for sensing a second velocity of said small mass in a direction parallel to said second axis and generating a second small mass velocity signal; and

said controller operable to receive said second payload and small mass velocity signals and to transmit said second control signal as a function thereof, said radial stiff actuator controlled by said second control signal to compensate for vibration occurring in a direction parallel to said second axis.

35. The system of claim 34, wherein said axes are normal to each other.

36. The system of claim 34, and further comprising a radial shear decoupler disposed adjacent said radial stiff actuator and a first shear decoupler disposed adjacent said first stiff actuator, said radial shear decoupler acting to reduce shear forces experienced by said radial stiff actuator in directions normal to the second axis;

and said first shear decoupler acting to reduce shear forces experienced by said first stiff actuators in directions normal to the first axis.

37. The system of claim 34, and further comprising a second radial stiff actuator in physical communication with said small mass and disposed along a third axis disposed at an angle to said first and second axes, a length of said second radial stiff actuator aligned with said third axis and variable as a function of a third control signal applied thereto;

a third payload mass velocity sensor coupled to said payload mass for sensing a third velocity of said payload mass in a direction parallel to said third axis;

a third small mass velocity sensor coupled to said small mass for sensing a third velocity of said small mass in a direction parallel to said third axis; and

said controller operable to receive third velocity signal from said third small mass and payload mass sensors and, said controller generating said third control signal as a function of said third velocity signals, said second radial stiff actuator compensating for vibration in parallel with said third axis in response to receiving said third control signal.

38. The system of claim 37, wherein said third axis is normal to at least one of said first and second axes.

39. The system of claim 37, wherein said second radial stiff actuator is a piezoelectric motor, said system further comprising means for placing said second radial stiff actuator in compression in a direction parallel to said third axis.

40. The system of claim 34, wherein said radial stiff actuator is a piezoelectric motor, said system further comprising means for placing said radial stiff actuator in compression in a direction parallel to said second axis.

41. The system of claim 30, and further comprising a shear decoupler interposed between said first stiff actuator and a selected one of said small mass and a source of vibration, said shear decoupler acting to reduce shear force applied to said first stiff actuator in a direction normal to said first axis.

42. The system of claim 41, wherein said shear decoupler includes a thin disk of elastomeric material having a radial stiffness at least one order of magnitude less than a vertical stiffness thereof.

43. The system of claim 42, wherein said decoupler further includes two rigid disks disposed adjacent opposite faces of said thin disk of elastomeric material.

44. The system of claim 30, wherein said velocity sensors are geophones.

45. In an active vibration isolation system which uses a plurality of stiff actuators, each responsive to an electrical control signal, to isolate a payload mass from a vibrating base on at least two axes formed at an angle to each other, each stiff actuator having opposed first and second faces and a variable length between said faces, said length having a value which is a function of at least one of said electrical control signals, the improvement comprising:

for each one of the stiff actuators, a shear decoupler disposed adjacent said first face thereof, said shear decoupler comprising a first rigid disk disposed adjacent said first face, a second rigid disk disposed remotely from said first face, and an elastomeric disk interposed between said first and second rigid disks, said shear decoupler acting to reduce force on said one of the stiff actuators in any direction normal to said length.

46. The system of claim 45, wherein said shear decoupler has a shape factor of at least 8.

47. The system of claim 45, wherein said first and second rigid disks comprise metal.

48. The system of claim 45, wherein the ratio of stiffness of at least one stiff actuator to a respective shear decoupler in a respective axial direction is about ten times the ratio of stiffness of said stiff actuator to said decoupler in a radial direction orthogonal to said axial direction.

49. An active vibration isolation system for isolating a payload from vibrations in a support, comprising:

an external case having sidewalls defining a cavity;

a small mass dimensioned to be at least partially received in said cavity such that said case is spaced from said small mass on all sides, said small mass being preselected to be at least one order of magnitude smaller than a preselected range of payload masses, said small mass adaptable to be coupled to a payload mass;

passive isolator coupling said small mass with said payload mass;

at least first and second axes disposed at an angle to each other and intersecting said sidewalls and a load axis;

for each of said first axis, said second axis and said load axis, at least one stiff actuator having a variable length which varies according to a control signal applied thereto, said stiff actuator disposed such that said variable length thereof is parallel to a respective axis, said stiff actuator used in spacing said mass from said case;

for each axis, a sensor joined to said small mass and operable to produce a velocity signal; and

compensation circuitry for receiving said velocity signals from said sensors and generating a respective plurality of control signals in response thereto, said compensation circuitry applying said control signals to respective ones of said stiff actuators to change the variable lengths thereof.

50. The system of claim 49, wherein a plurality of said stiff actuators have lengths which are parallel to each other, said plurality of stiff actuators actuating in parallel in response to one of said control signals.

51. The system of claim 49, wherein three of said axes are orthogonal to each other.

52. The system of claim 49, and further comprising:

for each stiff actuator, a shear decoupler interposed between (a) a selected one of said mass and said case and (b) the last said stiff actuator, a stiffness of said shear decoupler in a direction parallel to the axis of the last said stiff actuator being at least two orders of magnitude greater than a stiffness of said shear decoupler in a direction orthogonal to the last said axis.

53. The system of claim 52, wherein each said shear decoupler comprises a wafer of elastomer sandwiched between first and second components made of a relatively inflexible material in comparison with said elastomer, said first component disposed adjacent said stiff actuator.

54. The system of claim 53, wherein a first of said stiff actuators has its variable length disposed along said first axis, a compressive force applied to said first of said stiff actuators along said first axis, a respective one of said shear decoupler disposed between said first of said stiff actuators and said small mass;

at least one of the remaining two axes being resident in a plane orthogonal to said first axis, said system adaptable to receive said payload mass on one side of said plane, the location of the elastomer of said respective one of said shear decoupler being substantially in said plane or on the other side of said plane in opposition to said payload mass.

55. The system of claim 52, further comprising, for at least one of said stiff actuators, a spring disposed on the axis of said at least one of said stiff actuators so as to exert compressive force between said case and the last said stiff actuator;

another shear decoupler interposed on the last said axis between said spring and said small mass, a modulus of elasticity of said decoupler in a direction parallel to said axis being at least two orders of magnitude stiffer than a modulus of elasticity of said second decoupler in a direction orthogonal to the last said axis.

56. The system of claim 49, wherein said stiff actuators are piezoelectric motors, said system including means for exerting a compressive force on said piezoelectric motors in directions parallel to their respective axes at all times.

57. The system of claim 56, wherein said payload weight exerts compressive force on at least one of said piezoelectric motors through said small mass.

58. The system of claim 56, wherein said payload mass is disposed above said small mass, said payload mass exerting compressive force on said at least one of said piezoelectric motors through the force of gravity.

59. The system of claim 49, and further comprising, for at least one of said stiff actuators, a spring disposed on the axis of said at least one of said stiff actuators so as to exert compressive force between said case and the last said stiff actuator.

60. The system of claim 59, wherein the axis for the last said stiff actuator extends through one sidewall, through said small mass, and through an opposed sidewall, said spring disposed around the last said axis to be adjacent said small mass and to be opposite the last said stiff actuator.

61. The system of claim 59, and further comprising a bore in said external case formed around said axis in said opposed sidewall, a retainer plate attached to said opposed sidewall, said spring exerting compressive force between said small mass and said retainer plate.

62. The system of claim 59, wherein said spring includes at least one belleville washer.

63. The system of claim 62, wherein said spring comprises at least first and second belleville washers, an external rim of said first of said washers mating an external rim of the second of said washers.

64. The system of claim 49, wherein said axes intersect.

65. A method of actively isolating a payload from vibration, comprising the steps of:

resting the payload on a passive isolator;

coupling the passive isolator to a small mass which is at least one order of magnitude smaller than a predetermined range of payload masses;

supporting the small mass from a base susceptible to vibration by at least one stiff actuator;

sensing the movement of the small mass;

generating a small mass sensor signal which is a function of the movement of the small mass;

generating a control signal which is a function of the small mass sensor signal;

applying the control signal to the stiff actuator; and

responsive to said step of applying, varying a length of the stiff actuator, thereby reducing the vibration experienced by the payload.

66. The method of claim 65, wherein the sensor signal is a function of the velocity of the small mass.

67. The method of claim 66, and further comprising the steps of:

integrating the sensor signal to obtain a small mass displacement signal; and

deriving the control signal as a function of the small mass displacement signal.

68. The method of claim 65, and further comprising the steps of:

modifying the sensor signal to compensate for at least one resonant frequency of the active vibration isolation apparatus; and

generating the control signal as a function of the modified sensor signal.

69. The method of claim 65, and further comprising the steps of:

sensing the movement of the payload;

generating a payload sensor signal as a function of movement of the payload; and

generating the control signal as a function of the sensor signal and the payload sensor signal.

70. A method of actively isolating a payload from vibration, comprising the steps of:

coupling a payload to at least first and second stiff actuators, each stiff actuator having a variable length aligned with a respective axis, the axes disposed at an angle to each other;

sensing a movement of the payload in each of first and second directions respectively parallel to ones of the axes;

generating a first control signal as a function of the movement in the first direction;

generating a second control signal as a function of the movement in the second direction;

applying the first and second control signals, respectively, to the first and second stiff actuators;

responsive to said step of applying, varying the lengths of said first and second stiff actuators by amounts equivalent to the amounts of movement sensed in the first and second directions, respectively;

decoupling the shear force on the first stiff actuator caused by varying the length of the second stiff actuator; and

decoupling the shear force on the second stiff actuator caused by varying the length of the first stiff actuator.

71. The method of claim 70, and further comprising the step of coupling the payload to the stiff actuators via a small mass which is at least one order of magnitude smaller than a predetermined range of payload masses.

72. The method of claim 71, and further comprising the step of coupling the small mass to the payload with a passive isolator.

73. The method of claim 70, and further comprising the step of coupling the payload mass to the stiff actuators via a passive isolator.

74. The method of claim 70, wherein said stiff actuators are piezoelectric motors.

75. The method of claim 70, and further comprising the steps of:

coupling a third stiff actuator to the payload, the third stiff actuator having a variable length aligned with a third axis disposed at an angle to said first and second axes;

sensing a movement related to said payload in a third direction which is parallel to the third axis;

generating a third control signal as a function of said movement in the third direction;

applying the third control signal to the third stiff actuator;

responsive to the last said step of applying, varying the length of the third stiff actuator by an amount equivalent to the movement sensed in the third direction;

decoupling the shear forces caused by varying the lengths of the first and second stiff actuators from the third stiff actuator; and

decoupling the shear forces on the first and second stiff actuators caused by varying the length of the third stiff actuator.

76. An active vibration isolation system for isolating a payload, comprising:

at least first and second stiff actuators having variable lengths aligned with respective first and second axes, said first and second axes disposed at an angle to each other, first ends of said first and second stiff actuators coupled to said payload, second ends of said first and second stiff actuators coupled to a base susceptible to vibration;

first and second sensors coupled to said payload mass and operable to sense movement related to said payload mass in first and second directions, respectively, said first direction parallel with said first axis, said second direction parallel to said second axis, said first and second sensors respectively generating first and second sensor signals; and

circuitry coupled to said first and second sensors for generating a first control signal as a function of said first sensor signal and for generating a second control signal as a function of said second sensor signal.

77. A method of isolating a payload from vibration of a base which supports the payload, the method comprising the steps of:

coupling a passive isolator between the payload and a small mass;

coupling at least one stiff actuator between the small mass and the base wherein said stiff actuator, said small mass and said passive isolator are interposed between said payload mass and the base, the stiff actuator having a variable length aligned with an axis;

using a geophone to sense a velocity related to the payload in a direction parallel to the axis;

responsive to said step of using the geophone, generating a velocity signal;

integrating the velocity signal to obtain a displacement signal;

generating a control signal as a function of the displacement signal;

applying the control signal to the stiff actuator; and

responsive to said step of applying, varying the length of the stiff actuator in order to decrease the vibration experienced by the payload.

78. The method of claim 77, and further comprising the step of

using the geophone to sense the velocity of the small mass.

79. An active vibration isolation system, comprising:

a passive isolator adapted for supporting a payload;

a small mass which is at least one order of magnitude smaller than a predetermined range of payload masses, said small mass coupled to said passive isolator and disposed in opposition to said payload;

a sensor coupled to said small mass and generating a small mass sensor signal as a function of the movement of the small mass;

circuitry coupled to said sensor and adaptable to generate a control signal as a function of the small mass sensor signal; and

at least one stiff actuator interposed between a source of vibration and said small mass, said circuitry coupled to said stiff actuator for applying said control signal thereto, a length of said stiff actuator varying as a function of said control signal to thereby lessen the vibration experienced by said payload.