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Micromachined fluid handling apparatus with filter

  • US 5,660,728 A
  • Filed: 05/19/1995
  • Issued: 08/26/1997
  • Est. Priority Date: 10/04/1993
  • Status: Expired due to Term
First Claim
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1. A micromachined fluid handling apparatus comprising a micromachined filter, and a micromachined fluid handling device;

  • said fluid handling apparatus further comprising a substrate and a membrane mounted on said substrate;

    said substrate and said membrane comprising respective mounting portions secured together;

    wherein said micromachined filter and said micromachined fluid handling device comprise respective integral sections of said substrate and said membrane;

    wherein said micromachined filter further comprises a filter element means for removing particles of at least a predetermined size from an unfiltered fluid from an unfiltered fluid source, a first inlet port means for receiving said unfiltered fluid from said unfiltered fluid source and for conveying said unfiltered fluid to said filter element means, and a first outlet port means for conveying a filtered fluid from said filter element means and for permitting said filtered fluid to exit from said micromachined filter; and

    wherein said micromachined fluid handling device comprises an inlet port means for receiving said filtered fluid from said first outlet port means, and an outlet port means for permitting said filtered fluid to exit from said micromachined fluid handling device.

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