Dynamic dilution system
First Claim
Patent Images
1. An apparatus for generating a low concentration calibration gas mixture for high purity gas analysis and chemical emissions monitoring equipment, comprising:
- a) a first vessel to contain a high concentration non-corrosive gas with a first outlet conduit controlled by a first mass flow controller;
b) a second vessel to contain a high concentration corrosive gas with a second outlet conduit controlled by a second mass flow controller;
c) a third vessel to contain a low volatility high concentration chemical or gas with a third outlet conduit controlled by a third mass flow controller;
d) a source of high purity diluent gas;
e) a first diluent conduit to communicate the source of high purity diluent gas with each of said first, second and third outlet conduits through a mass flow controller to dilute said high concentration non-corrosive gas, said high concentration corrosive gas or such low volatility high concentration chemical or gas to produce said low concentration calibration gas mixture;
f) a second diluent conduit to communicate said source of high purity diluent gas with said first outlet conduit to purge said first outlet conduit through vent means in said first outlet conduit;
g) a third diluent conduit to communicate said source of high purity diluent gas with said second outlet conduit to purge said second outlet conduit through vent means in said second outlet conduit;
h) a fourth diluent conduit to communicate said source of high purity diluent gas with said third vessel to entrain said low volatility high concentration gas or to purge said third outlet conduit through vent means in said third outlet conduit;
i) means to control the pressure of said low concentration calibration gas;
j) a gas tight enclosure containing said first vessel, said first outlet conduit and said first mass flow controller, said second vessel, said second outlet conduit and said second mass flow controller, and said third vessel, said third outlet conduit and said third mass flow controller; and
k) means to introduce purge gas into said enclosure and means to vent said purge gas from said enclosure.
1 Assignment
0 Petitions
Accused Products
Abstract
An apparatus for generating a low concentration calibration gas mixture containing percent, ppm, ppb or ppt amounts of a desired analyte from a high concentration gas mixture and a high purity diluent using a series of source gas containing vessels and a series of parallel gas or chemical conduits controlled by mass flow controllers in a purged enclosure with conduits to purge gas conduits of residual gases or corrosive gases.
-
Citations
10 Claims
-
1. An apparatus for generating a low concentration calibration gas mixture for high purity gas analysis and chemical emissions monitoring equipment, comprising:
-
a) a first vessel to contain a high concentration non-corrosive gas with a first outlet conduit controlled by a first mass flow controller; b) a second vessel to contain a high concentration corrosive gas with a second outlet conduit controlled by a second mass flow controller; c) a third vessel to contain a low volatility high concentration chemical or gas with a third outlet conduit controlled by a third mass flow controller; d) a source of high purity diluent gas; e) a first diluent conduit to communicate the source of high purity diluent gas with each of said first, second and third outlet conduits through a mass flow controller to dilute said high concentration non-corrosive gas, said high concentration corrosive gas or such low volatility high concentration chemical or gas to produce said low concentration calibration gas mixture; f) a second diluent conduit to communicate said source of high purity diluent gas with said first outlet conduit to purge said first outlet conduit through vent means in said first outlet conduit; g) a third diluent conduit to communicate said source of high purity diluent gas with said second outlet conduit to purge said second outlet conduit through vent means in said second outlet conduit; h) a fourth diluent conduit to communicate said source of high purity diluent gas with said third vessel to entrain said low volatility high concentration gas or to purge said third outlet conduit through vent means in said third outlet conduit; i) means to control the pressure of said low concentration calibration gas; j) a gas tight enclosure containing said first vessel, said first outlet conduit and said first mass flow controller, said second vessel, said second outlet conduit and said second mass flow controller, and said third vessel, said third outlet conduit and said third mass flow controller; and k) means to introduce purge gas into said enclosure and means to vent said purge gas from said enclosure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
Specification