High sensitivity real-time NVR monitor
First Claim
1. An apparatus for detecting contamination, comprising:
- a heat sink having opposing sides;
a detection SAW resonator in thermal contact with one side of said heat sink;
SAW control electronics, at least a portion of said SAW control electronics being in proximity to the other side of said heat sink, said portion of said electronics being electrically connected to said SAW resonator along an electrical path through said heat sink; and
wherein there is no thermoelectric element in direct physical contact with said SAW resonator.
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Accused Products
Abstract
A real time non-volatile residue (NVR) monitor, which utilizes surface acoustic wave (SAW) resonators to detect molecular contamination in a given environment. The SAW resonators operate at a resonant frequency of approximately 200 MHz-2,000 MHz which enables the NVR monitor to detect molecular contamination on the order of 10-11 g-cm-2 to 10-13 g-cm2. The NVR monitor utilizes active temperature control of (SAW) resonators to achieve a stable resonant frequency. The temperature control system of the NVR monitor is able to directly heat and cool the SAW resonators utilizing a thermoelectric element to maintain the resonators at a present temperature independent of the environmental conditions. In order to enable the direct heating and cooling of the SAW resonators, the SAW resonators are operatively mounted to a heat sink. In one embodiment, the heat sink is located in between the SAW resonators and an electronic circuit board which contains at least a portion of the SAW control electronics. The electrical leads of the SAW resonators are connected through the heat sink to the circuit board via an electronic path which prevents inaccurate frequency measurement.
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Citations
14 Claims
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1. An apparatus for detecting contamination, comprising:
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a heat sink having opposing sides; a detection SAW resonator in thermal contact with one side of said heat sink; SAW control electronics, at least a portion of said SAW control electronics being in proximity to the other side of said heat sink, said portion of said electronics being electrically connected to said SAW resonator along an electrical path through said heat sink; and wherein there is no thermoelectric element in direct physical contact with said SAW resonator. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification