Optical switch having an analog beam for steering light
First Claim
1. A spatial light modulator, comprising:
- (a) at least one address electrode on a substrate;
(b) a hexagon-shaped light-reflective pixel positioned over said address electrode which is deflectable out of a first, normal position into a plurality of second positions, light incident on the pixel being selectively modulated by being reflected from the pixel in selected directions depending on the position of the pixel, the position of the pixel being dependent on a selected characteristic of an electrical signal provided to said underlying address electrode;
(c) a first torsion member connected between the pixel and a first stationary post and defining a torsion axis, deflection of the pixel effecting its rotation about the torsional axis of the first member; and
(d) a second flexure member connected between the pixel and a second stationary post, deflection of the pixel effecting flexure of the second member.
1 Assignment
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Accused Products
Abstract
A spatial light modulator (40,70,80,90,130) operable in the analog mode for light beam steering or scanning applications. A deflectable mirror (42, 72) and which may be hexagonal (92, 132) is supported by a torsion hinge (44,86,94) ends along a torsion axis. A plurality of flexure hinges (48,82,106) are provided to support the ends of the mirror (42,72,92,132) and provide a restoration force. The combination of the torsion hinges and the flexure hinges realizes a deflectable pixel that is operable in the linear range for a large range of address voltages. The flexure hinges also maintain a flat undeflected state when no address voltage is applied, and prevent the pixel from collapsing. The pixel may be reinforced, such as about its perimeter (74) to ensure mirror flatness and prevent warping, even during extreme deflections of the mirror. The pixel is electrostatically deflected by applying an address voltage to an underlying address electrode (60,96,98). The hexagonal mirrors (92,132) allow a tightly packed mirror array, and have a closely circular surface area so as to efficiently reflect a light beam of circular cross section, such as a light beam from fiber optics.
274 Citations
16 Claims
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1. A spatial light modulator, comprising:
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(a) at least one address electrode on a substrate; (b) a hexagon-shaped light-reflective pixel positioned over said address electrode which is deflectable out of a first, normal position into a plurality of second positions, light incident on the pixel being selectively modulated by being reflected from the pixel in selected directions depending on the position of the pixel, the position of the pixel being dependent on a selected characteristic of an electrical signal provided to said underlying address electrode; (c) a first torsion member connected between the pixel and a first stationary post and defining a torsion axis, deflection of the pixel effecting its rotation about the torsional axis of the first member; and (d) a second flexure member connected between the pixel and a second stationary post, deflection of the pixel effecting flexure of the second member. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification