Method for controlling semiconductor wafer processing
First Claim
1. A method for run-to-run control of a processing unit, comprising:
- generating process parameters using a model which provides a transfer function from said process parameters to an expected quality characteristic provided by a user;
adjusting selected inputs of the processing unit to process a device under manufacture using said generated process parameters;
measuring a quality characteristic of said process in real-time during said process using an in-situ sensor comprising an optical device operable on a single wavelength to generate a signal proportional to the concentration of a predetermined chemical species present during processing of the device;
comparing said measured quality characteristic with said quality characteristic; and
adjusting said model if said measured quality characteristic varies from said expected quality characteristic by more than a predetermined statistic amount.
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Abstract
A system (10) for run-to-run control of semiconductor wafer processing is provided. An input/output device (12) receives a desired quality characteristic for a particular semiconductor fabrication process. A generating circuit (22) uses a model to generate appropriate process parameters for a processing unit (20) and an expected quality characteristic. An adjusting circuit (16) functions to adjust process parameter inputs of the processing unit (20). In-situ sensor (18) functions to measure a quality characteristic of the process in the processing unit (20) on a real-time basis. A comparing circuit (24) functions to compare the measured quality characteristic with the expected quality characteristic. A model adjusting circuit (26) may adjust the model of the generating circuit (22) if the measured quality characteristic varies from the expected quality characteristic by more than a predetermined statistical amount.
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Citations
33 Claims
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1. A method for run-to-run control of a processing unit, comprising:
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generating process parameters using a model which provides a transfer function from said process parameters to an expected quality characteristic provided by a user; adjusting selected inputs of the processing unit to process a device under manufacture using said generated process parameters; measuring a quality characteristic of said process in real-time during said process using an in-situ sensor comprising an optical device operable on a single wavelength to generate a signal proportional to the concentration of a predetermined chemical species present during processing of the device; comparing said measured quality characteristic with said quality characteristic; and adjusting said model if said measured quality characteristic varies from said expected quality characteristic by more than a predetermined statistic amount. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method for run-to-run control of a processing unit, comprising:
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generating process parameters using a plurality of models each of which provides a transfer function from said process parameters to at least one of a plurality of quality characteristics at least one of said characteristics being unmeasurable after said process is complete; adjusting selected inputs of the processing unit to process a device under manufacture using said generated process parameters; measuring a quality characteristic of said process in real-time during said process with an in-situ sensor; comparing the measured quality characteristics with expected quality characteristics; and adjusting the model if the measured quality characteristics vary from the expected quality characteristics by more than a predetermined statistical amount. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A method for run-to-run control of a processing unit, comprising:
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generating process parameters and a plurality of expected quality characteristics using a plurality of models and desired quality characteristics; adjusting selected inputs of the processing unit to process the device under manufacture using said generated process parameters; measuring a quality characteristic of said process utilizing a real-time, in-situ sensor comprising a monochromator operable to generate a signal proportional to the concentration of a predetermined chemical species present during processing of the device; storing a value of a signal generated by said monochromator at predetermined intervals during the processing to generate data representative of an optical emission trace; and converting a slope at an end-point of said optical emission trace to a quality characteristic for the process; comparing the measured quality characteristics with the expected quality characteristics; adjusting the model if the measured quality characteristics varies from the expected quality characteristics by more than a predetermined statistical amount. - View Dependent Claims (16, 17, 18, 19, 20)
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21. A method for run-to-run control of a processing unit, comprising:
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generating process parameters and an expected quality characteristic using a model and a desired quality characteristic provided by a user; adjusting selected inputs of the processing unit to process a device under manufacture using said generated process parameters; measuring a signal correlated to a quality characteristic of said process which is not measurable after the process is complete utilizing a real-time, in-situ sensor; comparing said measured quality characteristic with said expected quality characteristic; adjusting said model if said measured quality characteristic varies from said expected quality characteristic by more than a predetermined statistical amount. - View Dependent Claims (22, 23, 24, 25, 26, 27)
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28. A method for run-to-run control of a processing unit, comprising:
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generating process parameters and an expected quality characteristic using a model and a desired quality characteristic provided by a user; adjusting selected inputs of the processing unit to process a device under manufacture using said generated process parameters; measuring a quality characteristic of said process utilizing a real-time, in-situ monochromator for measuring a signal correlated to a non-directly observable quality characteristic of said process and generating a signal proportional to the concentration of a predetermined chemical species present during processing of the device; storing a value of signal at predetermined intervals during the processing to generate data representative of an optical emission trace; and converting a slope at an end-point of said optical emission trace to a quality characteristic for the process; comparing said measured quality characteristic with said expected quality characteristic; adjusting said model if said measured quality characteristic varies from said expected quality characteristic by more than a predetermined statistical amount. - View Dependent Claims (29, 30, 31, 32, 33)
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Specification