Method of manufacturing a thin film transistor in which the gate insulator comprises two oxide films

• US 5,663,077 A
• Filed: 07/26/1994
• Issued: 09/02/1997
• Est. Priority Date: 07/27/1993
• Status: Expired due to Term

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Takemura, Yasuhiko, Adachi, Hiroki, Uehara, Hiroshi, Fukada, Takeshi, Takenouchi, Akira
• Primary Examiner(s): WILCZEWSKI, MARY A
• Application Number:
  US08/280,461
• Time in Patent Office: 1,134 Days
• Field of Search: 437/40 TFT, 437/41 TFT, 437/21, 437/101, 437/239, 437/238, 437/235, 437/233, 437/42
• US Class Current: 438/151
• CPC Class Codes: H01L 21/28158 Making the insulator
• CPC Class Codes: H01L 27/1214 comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
• CPC Class Codes: H01L 27/1277 using a crystallisation promoting species, e.g. local introduction of Ni catalyst
• CPC Class Codes: H01L 29/458 for thin film silicon, e.g. source or drain electrode
• CPC Class Codes: H01L 29/4908 for thin film semiconductor, e.g. gate of TFT
• CPC Class Codes: H01L 29/66757 Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate

Abstract

A method for manufacturing a semiconductor device comprises the steps of forming a semiconductor film on a substrate, oxidizing a surface of said semiconductor film in an oxidizing atmosphere with said semiconductor film heated or irradiated with light, and further depositing an oxide film on the oxidized surface of the semiconductor film by PVD or CVD. The first oxide film has a good interface condition with the semiconductor film and a characteristics of an insulated gate field effect transistor can be improved if the first oxide film and the second oxide film are used as a gate insulating film.

Claims

1. A method for manufacturing a semiconductor device comprising the steps of:

forming a semiconductor film on a substrate having an insulating surface;

oxidizing a surface of said semiconductor film to form an oxide film by irradiating said surface with light having a wavelength of 0.5 μ

m to 4 μ

m in an oxidizing atmosphere;

depositing an insulating film on the oxidized surface of said semiconductor film to form a gate insulating film of said semiconductor device; and

forming a gate electrode on said insulating film.

2. The method of claim 1 wherein said light is a laser light.

3. The method of claim 1 wherein said light is a non-coherent light.

4. The method of claim 1 wherein said insulating film is deposited through a vapor phase deposition.

5. The method of claim 1 wherein said insulating film is deposited through sputtering.

6. The method of claim 1 wherein said insulating film is deposited by a CVD method using a starting gas comprising TEOS and an oxidizing gas selected from the group consisting of oxygen, ozone and nitrogen oxide.

7. The method of claim 6 wherein a concentration of P, C or N contained in said insulating film is higher than a concentration of P, C or N in an oxide layer formed by said oxidizing step.

8. The method of claim 1 wherein said semiconductor film comprises silicon.

9. The method of claim 1 wherein said oxide film has a thickness from 20 Å

to 200 Å

.

10. The method of claim 1 further comprising the step of crystallizing said semiconductor film prior to said step of oxidizing.

11. A method for manufacturing a semiconductor device comprising the steps of:

forming an amorphous semiconductor film on a substrate having an insulating surface;

disposing a catalyst in contact with said amorphous semiconductor film, said catalyst being capable of promoting crystallization of said amorphous semiconductor film;

crystallizing said semiconductor film with the aid of said catalyst;

oxidizing a surface of said semiconductor film after the crystallization to form an oxide film by irradiating said surface with light in an oxidizing atmosphere;

depositing an insulating film on the oxidized surface of said semiconductor film by deposition to form a gate insulating film of said semiconductor device; and

forming a gate electrode on said insulating film.

12. The method of claim 11 wherein said light has a wavelength of 0.5 μ

m to 4 μ

m.

13. A method for manufacturing a semiconductor device comprising the steps of:

forming a semiconductor film on a substrate having an insulating surface;

oxidizing a surface of said semiconductor film to form an oxide film by irradiating said surface with light in an oxidizing atmosphere;

depositing a silicon oxide film by CVD using a reactive gas containing at least an oxidizing gas and an organic silane;

annealing said silicon oxide film in an atmosphere comprising a material selected from the group consisting of NH₃, N₂ H₄, and N₂ O; and

forming a gate electrode on said annealed oxide film.

14. The method of claim 13 wherein said light has a wavelength of 0.5 μ

m to 4 μ

m.