Vacuum plasma processing wherein workpiece position is detected prior to chuck being activated

• US 5,670,066 A
• Filed: 03/17/1995
• Issued: 09/23/1997
• Est. Priority Date: 03/17/1995
• Status: Expired due to Term

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Laizhong, Luo, Barnes, Michael S.
• Primary Examiner(s): Paschall, Mark H.
• Application Number:
  US08/405,676
• Time in Patent Office: 921 Days
• Field of Search: 219/121.43, 219/121.4, 219/121.58, 361/234, 361/230, 361/233, 361/236, 269/8, 269/903, 279/126, 279/128, 156/345
• US Class Current: 219/121.58
• CPC Class Codes: H01L 21/6833 Details of electrostatic chucks
• CPC Class Codes: H03K 17/955 using a capacitive detector
• CPC Class Codes: Y10S 269/903 Work holder for electrical circuit assemblages or wiring systems
• CPC Class Codes: Y10T 279/23 with magnetic or electrostatic means

Abstract

A determination of whether a workpiece is properly positioned on an electrostatic chuck in a vacuum plasma processing chamber is made by measuring the capacitance across a pair of electrodes of the chuck. If the chuck is properly positioned, the workpiece is held in situ on the chuck by applying a DC voltage to the chuck. The workpiece is then processed by the plasma.

Claims

1. A method of treating a workpiece with a plasma in an evacuated chamber including a source of the plasma and a chuck for selectively holding the workpiece, the chuck being an electrostatic chuck having first and second electrically insulated electrodes, comprising the steps of:

placing the workpiece on the chuck in the evacuated chamber,

then automatically detecting whether the workpiece is properly positioned on the chuck,

activating the chuck to hold the workpiece in situ in response to the automatic detecting step indicating the workpiece is properly positioned on the chuck, the chuck being activated to hold the workpiece in situ by applying attractive electrostatic force to the workpiece via the electrodes,

the automatic detecting step being performed by measuring the capacitance across the electrodes prior to application of the electrostatic force to the workpiece via the electrodes and by determining a measure of the capacitance difference across the electrodes prior to and after the workpiece being placed on the chuck, and

then treating the workpiece held in situ on the chuck with the plasma.

2. The method of claim 1 wherein the automatic detecting step is performed by measuring the capacitance across the electrodes immediately prior to the workpiece being placed on the chuck, measuring the capacitance across the electrodes after the workpiece being placed on the chuck and before the force is applied to the workpiece, and determining the difference in the measured capacitances.

3. The method of claim 2 wherein the electrostatic force is applied by connecting a DC voltage to the electrodes after the capacitance has been measured across the electrodes.

4. The method of claim 1 wherein the capacitance across the electrodes is stable and has a predetermined value so that it is not necessary to measure the capacitance across the electrodes immediately prior to the workpiece being placed on the chuck, measuring the capacitance across the electrodes after the workpiece has been placed on the chuck and before the force is applied to the workpiece, and determining the difference between the predetermined value and the measured capacitance.

5. Apparatus for treating a workpiece comprising a vacuum chamber,

means for generating a plasma in the chamber,

a chuck in the chamber for selectively holding the workpiece, the chuck including a pair of mutually insulated electrodes for selectively applying DC electrostatic force to the workpiece, the plasma generating means including an r.f. source connected to one of said electrodes via a network including a series blocking capacitor for preventing the flow of DC current to the r.f source,

apparatus for positioning the workpiece on the chuck in the chamber,

means for detecting whether the workpiece is correctly positioned on the chuck, the means for detecting including a capacitance measuring structure connected to the electrodes,

and means for activating the chuck to hold the workpiece in situ on the chuck in response to the detecting means detecting that the workpiece is correctly on the chuck, the plasma treating the workpiece held in situ on the chuck.

6. The apparatus of claim 5 wherein the DC electrostatic force is derived from a DC voltage source, a pair of terminals through which current from the DC voltage source flows to the electrodes to cause the force to be applied, the capacitance measuring structure being connected to said terminals.