Method and apparatus for profiling surfaces using diffracative optics

• US 5,671,050 A
• Filed: 12/28/1994
• Issued: 09/23/1997
• Est. Priority Date: 11/07/1994
• Status: Expired due to Term

• Current Assignee: Zygo Corporation (Ametek Incorporated)
• Original Assignee: Zygo Corporation (Ametek Incorporated)
• Inventors: de Groot, Peter
• Primary Examiner(s): Font, Frank G.
• Assistant Examiner(s): MERLINO, AMANDA H
• Application Number:
  US08/365,589
• Time in Patent Office: 1,000 Days
• Field of Search: 356/354, 356/355, 356/359, 356/356, 356/360
• US Class Current: 356/497
• CPC Class Codes: G01B 11/303 using photoelectric detection means

Abstract

Optical system for measuring surface topography, comprised of a light source (30), a diffractive optical assembly (70,72,73) comprised of two or more diffraction gratings, holograms or like diffractive optics (120, 130;122, 132;123, 133), electronic detection means and digital signal processing means (10, 110) for determining surface height from interference data. The diffractive optical assembly (70,72,73) divides the incident light into two beams (150,160;152,162;153,163), which subsequently impinge upon the object (20) at the same place on the object surface (70) but at two different angles of incidence. After reflection from the object surface, the beams pass separately back through the diffractive optical assembly (70,72,73), after which they combine once again and form an interference pattern representative of the surface topography. The equivalent wavelength of the resultant interference pattern is much greater than the illumination wavelength.

Claims

1. A method for profiling an object surface using desensitized interference fringes comprising the steps of

illuminating a diffractive optical assembly with a source of light,

dividing the source light illuminating said diffractive optical assembly into two beams which propagate in two different directions through said diffractive optical assembly, said beams exiting said diffractive optical assembly substantially overlapping adjacent said object surface with said beams impinging upon said object surface at substantially the same place at two different incident angles,

reflecting said impinging beams from said object surface back toward said diffractive optical assembly, said reflected beams passing back through said diffractive optical assembly in different directions, and

recombining said reflected beams passing back through said diffractive optical assembly to form an interference pattern representative of the surface profile of said object surface, said interference pattern having reduced sensitivity to surface deformation and surface roughness, said illuminating step comprising the step of illuminating said diffractive optical assembly with a broadband spatially incoherent light source.

2. A method in accordance with claim 1 wherein said broadband spatially incoherent light source comprises a white light source.

3. A method in accordance with claim 2 wherein said white light source comprises a diffuse white light source.

4. A method in accordance with claim 1 wherein said object surface comprises a surface of a partially transparent plane-parallel object.

5. A method in accordance with claim 4 wherein said object surface comprises a front surface of said partially transparent plane-parallel object, said object having front and back surfaces, said method further comprising the step of independently measuring the front and back surfaces of said partially transparent plane-parallel object.

6. A method in accordance with claim 5 wherein said diffractive optical assembly comprises a pair of diffraction gratings, the difference in optical path traversed by the two beams being represented by the expression ##EQU7## where θ

is the angle of incidence of the exit beam with respect to the object surface, φ

is the angle of incidence of one of said beams passing through said diffractive optical assembly with respect to said object surface, h is the distance from the object surface to the diffraction grating closest to said object surface, and h'"'"' is the distance between the diffraction gratings comprising said diffractive optical assembly, said working distance comprising the distance h less the thickness of the diffraction grating closest to said object surface.

7. A method in accordance with claim 6 further comprising the step of placing the object surface to be profiled at said distance h with respect to said diffractive optical assembly.

8. A method in accordance with claim 6 wherein said source light has an associated illumination wavelength and said interference pattern has an associated equivalent wavelength greater than said illumination wavelength, said effective wavelength being dependent on said incident angles on said object surface.

9. A method in accordance with claim 8 said effective wavelength is represented by the expression ##EQU8## where θ

is the angle of incidence of the exit beam with respect to the object surface and φ

is the angle of incidence of one of said beams passing through said diffractive optical assembly with respect to said object surface;

whereby any effective wavelength Λ

≧

λ

may be created by suitable choice of said angles θ

,φ

.

10. A method in accordance with claim 1 further comprising the step of generating controlled phase shifts in said interference pattern, the step of generating controlled phase shifts comprising the step of displacing at least a portion of said diffractive optical assembly with respect to said optical surface.

11. A method in accordance with claim 1 wherein said light source comprises an incandescent bulb.

12. A method in accordance with claim 1 whereto said light source comprises a light emitting diode.

13. A method in accordance with claim 2 wherein said illuminating step comprises the step of illuminating said diffractive optical assembly with a broadband spatially coherent light source.

14. A method in accordance with claim 2 wherein said illuminating step comprises the step of illuminating said diffractive optical assembly with a narrowband spatially incoherent light source.

15. A method in accordance with claim 1 wherein said illuminating step comprises the step of illuminating said diffractive optical assembly with a narrowband spatially coherent light source.

16. A method in accordance with claim 15 wherein said narrowband and spatially coherent light source comprises a laser.

17. A method in accordance with claim 1 wherein said recombining step further comprises the step of photosensitive transducing said recombined beams for producing electronic images corresponding to said interference pattern.

18. A method in accordance with claim 17 further comprising the step of data processing said electronic images for providing an image of said object surface.

19. A method in accordance with claim 1, wherein said source light has an associated illumination wavelength and said interference pattern has an associated equivalent wavelength greater than said illumination wavelength, said effective wavelength being dependent on said incident angles on said object surface, said method further comprising the step of varying said incident angles in order to provide a desired optimum effective wavelength.

20. A method in accordance with claim 1, wherein said source light has an associated illumination wavelength and said interference pattern has an associated equivalent wavelength greater than said illumination wavelength, said effective wavelength being dependent on said incident angles on said object surface, said effective wavelength being represented by the expression ##EQU9## where Λ

is the effective wavelength, dφ

is a small change in the interference phase corresponding to a small variation dh in the distance h from the object to said diffractive optical assembly, and φ

is the interferometric phase difference between said two beams impinging on said object surface and being represented by the expression ##EQU10## where λ

is the mean illumination wavelength and OPD is the difference in optical path traversed by the two beams.

21. A method in accordance with claim 20 wherein said diffractive optical assembly comprises a pair of diffraction gratings, the difference in optical path traversed by the two beams being represented by the expression ##EQU11## where θ

is the angle of incidence of an exit beam with respect to the object surface, φ

is the angle of incidence of one of said beams passing through said diffractive optical assembly with respect to said object surface, h is the distance from the object surface to the diffraction grating closest to said object surface, and h'"'"' is the distance between the diffraction gratings comprising said diffractive optical assembly, said working distance comprising the distance h less the thickness of the diffraction grating closest to said object surface.

22. A method in accordance with claim 1 wherein said source light has an associated illumination wavelength and said interference pattern has an associated equivalent wavelength greater than said illumination wavelength, said effective wavelength being dependent on said incident angles on said object surface, said effective wavelength being represented by the expression ##EQU12## where θ

is the angle of incidence of the exit beam with respect to the object surface and φ

is the angle of incidence of one of said beams passing through said diffractive optical assembly with respect to said object surface;

whereby any effective wavelength Λ

≧

λ

may be created by suitable choice of said angles θ

,φ

.

23. An optical profiler in accordance with claim 1 further comprising means for generating controlled phase shifts in said interference pattern, said phase shift generating means comprising means for displacing said diffractive optical assembly with respect to said object surface.

24. An optical profiler in accordance with claim 23 wherein said diffractive optical assembly comprises at least two spaced apart diffraction gratings, said displacing means comprising means for displacing at least one of said diffraction gratings with respect to the others.

25. An optical surface profiler for profiling an object surface using desensitized interference fringes, said profiler comprising an illumination source;

a diffractive optical assembly optically aligned between said illumination source and said object surface, said illumination source illuminating said diffractive optical assembly, said diffractive optical assembly comprising means for dividing the source light illuminating said diffractive optical assembly into two beams which propagate in two different directions through said diffractive optical assembly, said beams exiting said diffractive optical assembly and impinging upon said object surface at substantially the same place at two different incident angles, said object surface reflecting said impinging beams from said object surface back toward said diffractive optical assembly, said reflected beams passing back through said diffractive optical assembly in different directions;

means for recombining said reflected beams to form an interference pattern representative of the surface profile of said object surface;

said illumination source comprising a broadband spatially incoherent light source.

26. An optical profiler in accordance with claim 25 wherein said spatially incoherent light source comprises a white light source.

27. An optical profiler in accordance with claim 26 wherein said white light source comprises a diffuse white light source.

28. An optical profiler in accordance with claim 25 wherein said object surface comprises a surface of a partially transparent plane-parallel object.

29. An optical profiler in accordance with claim 28 wherein said object surface comprises a front surface of said partially transparent plane-parallel object, said object having front and back surfaces, said profiler further comprising means for translating said object selectively to dispose either said back surface or said front surface at a common plane at which said beams impinge upon said selectively disposed object surface at the same place at two different incident angles while said other object surface is displaced from said common plane;

whereby said front and back surfaces of said partially transparent plane-parallel object can be independently measured.

30. An optical profiler in accordance with claim 29 wherein said diffractive optical assembly compresses a pair of diffraction gratings, the difference in optical path traversed by the two beams being represented by the expression ##EQU13## where θ

is the angle of incidence of the exit beam with respect to the object surface, φ

is the angle of incidence of one of said beams passing through said diffractive optical assembly with respect to said object surface, h is the distance from the object surface, to the diffraction grating closest to said object surface, and h'"'"' is the distance between the diffraction gratings comprising said diffractive optical assembly, said working distance comprising the distance h less the thickness of the diffraction grating closest to said object surface.

31. An optical profiler in accordance with claim 30 wherein said translating means comprises means for placing said object surface to be profiled at said distance h with respect to said diffractive optical assembly, said distance h being located in said common plane.

32. An optical profiler in accordance with claim 30 wherein said source light has an associated illumination wavelength and said interference pattern has an associated equivalent wavelength greater than said illumination wavelength, said effective wavelength being dependent on said incident angles on said object surface.

33. An optical profiler in accordance with claim 32 wherein said effective wavelength is represented by the expression ##EQU14## where θ

is the angle of incidence of the exit beam with respect to the object surface and φ

is the angle of incidence of one of said beams passing through said diffractive optical assembly with respect to said object surface;

whereby any effective wavelength Λ

≧

λ

may be created by suitable choice of said angles θ

,φ

.

34. An optical profiler in accordance with claim 25 wherein said illumination source comprises an incandescent bulb.

35. An optical profiler in accordance with claim 25 wherein said illumination source comprises a broadband spatially coherent light source.

36. An optical profiler in accordance with claim 25 wherein said illumination source comprises a narrowband spatially incoherent light source.

37. An optical profiler in accordance with claim 25 wherein said illumination source comprises a narrowband spatially coherent light source.

38. An optical profiler in accordance with claim 37 wherein said narrowband spatially coherent light source comprises a laser.

39. An optical profiler in accordance with claim 25 wherein said illumination source comprises a light emitting diode.

40. An optical profiler in accordance with claim 25 wherein said source light has an associated illumination wavelength and said interference pattern has an associated equivalent wavelength greater than said illumination wavelength, said effective wavelength being dependent on said incident angles on said object surface, said effective wavelength being represented by the expression ##EQU15## where Λ

is the effective wavelength, dφ

is a small change in the interference phase corresponding to a small variation dh in the distance h from the object to said diffractive optical assembly, and φ

is the interferometric phase difference between said two beams impinging on said object surface and being represented by the expression φ

=2 π

OPD, where λ

is the mean illumination wavelength and OPD is the difference in optical path traversed by the two beams.

41. An optical profiler in accordance with claim 40 said diffractive optical assembly compresses a pair of diffraction gratings, the difference in optical path traversed by the two beams being represented by the expression ##EQU16## where θ

is the angle of incidence of the exit beam with respect to the object surface, φ

is the angle of incidence of one of said beams passing through said diffractive optical assembly with respect to said object surface, h is the distance from the object surface to the diffraction grating closest to said object surface, and h'"'"' is the distance between the diffraction gratings comprising said diffractive optical assembly, said working distance comprising the distance h less the thickness of the diffraction grating closest to said object surface.

42. An optical profiler in accordance with claim 40 wherein said effective wavelength is represented by the expression ##EQU17## where θ

is the angle of incidence of the exit beam with respect to the object surface and φ

is the angle of incidence of one of said beams passing through said diffractive optical assembly with respect to said object surface;

whereby any effective wavelength Λ

≧

λ

may be created by suitable choice of said angles θ

,φ

.

43. An optical profiler in accordance with claim 40 further comprising means for varying said incident angles in order to provide a desired optimum effective wavelength.

44. An optical profiler in accordance with claim 25 wherein said recombining means further comprises photosensitive transducer means for producing electronic images corresponding to said interference pattern from said recombined beams.

45. An optical profiler in accordance with claim 44 further comprising data processing means for data processing said electronic images for providing an image of said object surface.