Chemically inert flow meter within caustic fluids having non-contaminating body

• US 5,672,832 A
• Filed: 02/15/1996
• Issued: 09/30/1997
• Est. Priority Date: 02/15/1996
• Status: Expired due to Fees

• Current Assignee: NT International, Inc. (Entegris Incorporated)
• Original Assignee: NT International, Inc. (Entegris Incorporated)
• Inventors: Cucci, Gerald R., Englund, Diane L.
• Primary Examiner(s): Chilcot, Richard
• Assistant Examiner(s): PATEL, HARSHAD R
• Application Number:
  US08/601,786
• Time in Patent Office: 593 Days
• Field of Search: 73/861.42, 73/861.47, 73/861.52, 73/861.63, 73/706, 73/756
• US Class Current: 73/861.52
• CPC Class Codes: G01F 1/363 with electrical or electro-mechanical indication G01F1/37 and G01F1/38 take precedence
• CPC Class Codes: G01F 1/44 Venturi tubes

Abstract

A non-contaminating flow meter having an isolation member is disclosed. The flow meter includes two pressure sensor transducers, located on opposite sides of a restriction in a conduit. Each of pressure transducers is isolated by an isolation member from exposure to fluids flowing through the conduit. The flow meter may be positioned in-line within a fluid flow circuit carrying corrosive materials, wherein the square root of the difference in pressure between the two pressure sensors is calculated to thereby determine the rate of flow within the fluid flow conduit. The flow meter compensates for changes in temperature within the fluid flow circuit and further activates an alarm if the pressure or flow rate within the fluid flow conduit exceeds or falls below a threshold level. The flow meter of the present invention also avoids the introduction of particulate, unwanted ions, or vapors into the flow circuit.

Claims

1. A chemically inert fluid flow meter adapted to be connected in-line with a fluid flow circuit, comprising:

(a) a chemically inert housing having a longitudinal bore of a first predetermined cross-sectional area extending through said housing forming a fluid flow conduit, wherein an inlet end and an outlet end of the conduit are adapted for connection, in-line, to the fluid flow circuit, said housing further having first and second spaced apart cavities each extending transversely from an external surface of said housing into the longitudinal bore of said housing, the longitudinal bore having a constriction disposed between said first and second cavities, the constriction having a second bore being of a second cross-sectional area that is less than the first predetermined cross-sectional area;

(b) first means for sensing a first pressure within the flow circuit, said first means for sensing being contained within said first cavity;

(c) second means for sensing a second pressure within the flow circuit, said second means for sensing being contained within said second cavity;

(d) means for constraining the first and second means for sensing in a fixed position within the cavities of the housing; and

(e) an electronic circuit contained within the housing and coupled to the first and second means for sensing, whereby the electronic circuit receives signals proportional to the sensed first and second pressures within the bore.

2. The fluid flow meter as recited in claim 1, wherein the electronic circuit further produces a signal proportional to a rate of fluid flow within the bore.

3. The fluid flow meter as recited in claim 2, wherein the electronic circuit further includes a means for adjusting the control signal to compensate for a pressure differential present when the rate of flow is zero.

4. The fluid flow meter as recited in claim 1, wherein the constriction of the longitudinal bore comprises a removable insert.

5. The fluid flow meter as recited in claim 4, wherein said removable insert is manufactured from sapphire.

6. The fluid flow meter as recited in claim 1, further comprising a chemically inert flexible membrane contained within each of said first and second cavities, proximate the longitudinal bore of said housing, each membrane having first and second opposed major surfaces, said first major surface being exposed to fluid flowing in the fluid flow conduit.

7. The fluid flow meter as recited in claim 1, wherein a drain extends transversely from the external surface of said housing into at least one of said first and second spaced apart cavities.

8. The fluid flow meter as recited in claim 7, wherein said drain further comprises a sensor positioned within said drain for sensing the presence of fluids within said drain.

9. The fluid flow meter as recited in claim 1, wherein the first and second means for sensing each comprise a sapphire sensor.

10. The fluid flow meter as recited in claim 1, wherein the electronic circuit includes a means for adjusting the control signal to compensate for fluctuations in temperature within the flow circuit.

11. A chemically inert fluid flow meter adapted to be connected in-line with a fluid flow circuit, comprising:

(a) a chemically inert housing having a longitudinal bore of a first predetermined cross-sectional area extending through said housing forming a fluid flow conduit, wherein an inlet end and an outlet end of the conduit are adapted for connection, in-line, to the fluid flow circuit, said housing further having first and second spaced apart cavities each extending transversely from an external surface of said housing into the longitudinal bore of said housing, the longitudinal bore having a constriction disposed between said first and second cavities, the constriction having a second bore being of a second cross-sectional area that is less than the first predetermined cross-sectional area;

(b) first means for sensing a first pressure within the flow circuit, said first means for sensing being contained within said first cavity;

(c) second means for sensing a second pressure within the flow circuit, said second means for sensing being contained within said second cavity;

(d) means for constraining the first and second means for sensing in a fixed position within the cavities of the housing; and

(e) an electronic circuit contained within the housing and coupled to the first and second means for sensing, whereby the electronic circuit receives signals proportional to the sensed first and second pressures within the bore and thereafter produces an electrical signal proportional to a rate of fluid flow within the bore determined from the sensed first and second pressures.

12. The fluid flow meter as recited in claim 11, wherein the constriction of the longitudinal bore comprises a removable insert.

13. The fluid flow meter as recited in claim 12, wherein said removable insert is manufactured from sapphire.

14. The fluid flow meter as recited in claim 11, wherein the housing comprises first and second housing halves each including a longitudinal bore and a counter bore for receiving a restriction member therein when the first and second housing halves are juxtaposed with the longitudinal bore of each housing half being aligned.

15. The fluid flow meter as recited in claim 11, wherein said means for constraining comprises two spacers and two hold down rings, wherein each hold down ring has threads formed on an external surface which mate with threads formed on an internal surface of each cavity, said spacers being positioned between said first and second means for sensing and said hold down rings, whereby when each hold down ring is screwed relative to the internal surface of each cavity, each hold down ring presses the associated spacer against the respective means for sensing.

16. The fluid flow meter as recited in claim 11, and further including a cover adapted to be attached to the housing in covering relation to the cavities, the cover including a chemically inert electrical connector electrically coupled to the electronic circuit.

17. The fluid flow meter as recited in claim 16, wherein a gasket is positioned in sealing relation between said cover and said housing.

18. The fluid flow meter as recited in claim 11, wherein the first and second means for sensing each comprise an alumina ceramic diaphragm sensor.

19. The fluid flow meter as recited in claim 11, wherein the first and second means for sensing each comprise a sapphire sensor.

20. The fluid flow meter as recited in claim 11, wherein the electronic circuit includes a means for adjusting the control signal to compensate for fluctuations in temperature within the flow circuit.

21. The fluid flow meter as recited in claim 11, wherein the electronic circuit further includes a means for adjusting the control signal to compensate for a pressure differential present when the rate of flow is zero.

22. The fluid flow meter as recited in claim 11, further comprising a chemically inert flexible membrane contained within each of said first and second cavities, proximate the longitudinal bore of said housing, each membrane having first and second opposed major surfaces, said first major surface being exposed to fluid flowing in the fluid flow conduit.

23. The fluid flow meter as recited in claim 11, wherein a conduit extends transversely from the external surface of said housing into at least one of said first and second spaced apart cavities.

24. The fluid flow meter as recited in claim 23, wherein said conduit further comprises a conductive sensor positioned within said conduit for sensing the presence of fluids within said conduit.

25. A chemically inert fluid flow meter adapted to be connected in-line with a fluid flow circuit, comprising:

(a) a chemically inert housing having a longitudinal bore of a first predetermined cross-sectional area extending through said housing forming a fluid flow conduit, wherein an inlet end and an outlet end of the conduit are adapted for connection to the fluid flow circuit, said housing further having first and second spaced apart cavities each extending transversely from an external surface of said housing into the longitudinal bore of said housing, the longitudinal bore having a constriction disposed between said first and second cavities, the constriction having a second bore being of a second cross-sectional area that is less than the first predetermined cross-sectional area;

(b) a chemically inert flexible membrane contained within each of said first and second cavities, proximate the longitudinal bore of said housing, thereby isolating an interior of said first and second cavities from fluid flowing in the fluid flow conduit, each membrane having first and second opposed major surfaces, said first major surface being exposed to fluid flowing in the fluid flow conduit;

(c) first means for sensing a first pressure within the flow circuit, said first means for sensing being contained within said first cavity;

(d) second means for sensing a second pressure within the flow circuit, said second means for sensing being contained within said second cavity;

(e) means for constraining the first and second means for sensing in a fixed position within the cavities of the housing; and

(f) an electronic circuit contained within the housing and coupled to the first and second means for sensing, whereby the electronic circuit receives signals proportional to the sensed first and second pressures within the bore and thereafter produces an electrical signal proportional to a rate of fluid flow within the bore determined from the sensed first and second pressures.

26. The flow meter as recited in claim 25, wherein the first cavity further comprises a first seal member positioned to sealably engage said flexible membrane to said housing and a second seal member aligned to sealably engage said first means for sensing to said housing, wherein said housing further has a drain channel extending from the first cavity of said housing to the outer surface of said housing between said first and second seal members.

27. The flow meter as recited in claim 25, wherein the second cavity further comprises a first seal member positioned to sealably engage said flexible membrane to said housing and a second seal member aligned to sealably engage said second means for sensing to said housing, wherein said housing further has a drain channel extending from the second cavity of said housing to the outer surface of said housing between said first and second seal members.

28. The fluid flow meter as recited in claim 25, wherein said means for constraining comprises two spacers and two hold down rings, wherein each hold down ring has threads formed on an external surface which mate with threads formed on an internal surface of each first and second cavity, said spacers being positioned between said first and second means for sensing and said hold down rings, whereby when each hold down ring is screwed relative to the internal surface of each cavity, each hold down ring presses the associated spacer against the respective means for sensing.

29. The pressure transducer module as recited in claim 25, wherein said housing further has a vent extending from the outer surface of said housing into each cavity of said housing.