Uncooled ybacuo thin film infrared detector

• US 5,672,903 A
• Filed: 02/26/1996
• Issued: 09/30/1997
• Est. Priority Date: 02/01/1995
• Status: Expired due to Fees

• Current Assignee: Research Corporation Technologies
• Original Assignee: Southern Methodist University
• Inventors: Shan, Pao-Chuan, Celik-Butler, Zeynep, Butler, Donald P.
• Primary Examiner(s): NGO, NGAN V
• Application Number:
  US08/607,356
• Time in Patent Office: 582 Days
• Field of Search: 257/43, 257/444, 257/446, 257/448, 257/459, 257/467, 257/613
• US Class Current: 257/467
• CPC Class Codes: G01J 5/20 using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
• CPC Class Codes: G01J 5/34 using capacitors, e.g. pyroelectric capacitors
• CPC Class Codes: H01L 31/032 including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
• CPC Class Codes: H01L 31/095 comprising amorphous semiconductors
• CPC Class Codes: H10N 19/00 Integrated devices, or assemblies of multiple devices, comprising at least one thermoelectric or thermomagnetic element covered by groups H10N10/00 - H10N15/00

Abstract

A thermal detector includes a transducer layer of semiconducting yttrium barium copper oxide which is sensitive at room temperature to radiation and provides detection of infrared radiation. In a gate-insulated transistor embodiment, a layer of ferroelectric semiconducting yttrium barium copper oxide forms a gate insulator layer and increases capacitance of the transistor or latches the transistor according to the polarization direction of the ferroelectric layer.

Claims

1. A pyroelectric detector, comprising:

an integral transducer structure for absorbing infrared radiation, comprising

(1) an electrically conducting supporting layer having a supporting layer lower surface and a supporting layer upper surface,

(2) a semiconducting transducing layer of crystalline or polycrystalline oxide formed from (1) at least one member selected from the group consisting of barium, strontium, and calcium, (2) at least one member selected from the group consisting of yttrium, lanthanum, and rare earths, (3) copper, and (4) oxygen, having a transducing layer lower surface, a transducing layer upper surface, a resistance of greater than 0.1 Ω

-cm at twenty degrees centigrade, a change in dielectric constant with change in temperature of at least 0.2 per degree centigrade at 20 degrees centigrade, and the transducing layer lower surface opposing said supporting layer upper surface, and

(3) a first electrode layer having a first electrode layer lower surface, a first electrode layer upper surface, and the first electrode layer lower surface opposing a first region of the supporting layer upper surface across the transducing layer;

means, electrically coupled via said first electrode layer, for measuring pyroelectric current generated by changes in temperature of said transducing layer.

2. The pyroelectric detector according to claim 1, wherein:

a thickness of said integral transducer structure between said supporting layer lower surface and said first electrode layer upper surface is equal to or less than ten microns.

3. The pyroelectric detector according to claim 1, further comprising:

a substrate having a substrate lower surface and a substrate upper surface;

means for suspending said integral transducer structure above said substrate upper surface to provide thermal isolation of said integral transducer structure from said substrate; and

wherein said means for suspending said integral transducer structure suspends said integral transducer structure so that said supporting layer lower surface opposes said substrate upper surface, said supporting layer lower surface is not in contact with said substrate upper surface, and said supporting layer lower surface is spaced from said substrate upper surface by an air gap.

4. The pyroelectric detector according to claim 1, further comprising:

a substrate having a substrate lower surface and a substrate upper surface;

means for suspending said integral transducer structure above said substrate upper surface to provide thermal isolation of said integral transducer structure from said substrate;

wherein said means for suspending said integral transducer structure suspends said integral transducer structure so that said supporting layer lower surface opposes said substrate upper surface, said supporting layer lower surface is not in contact with said substrate upper surface, and said supporting layer lower surface is spaced from said substrate upper surface by an air gap; and

wherein said means for suspending said integral transducer comprises a pillar having a pillar upper surface, said pillar projecting up from said substrate upper surface so that said pillar upper surface is above said substrate upper surface.

5. The pyroelectric detector according to claim 1, further comprising chopper means positioned opposing said transducing layer upper surface for alternately blocking said transducing layer upper surface from said infrared radiation.

6. The pyroelectric detector according to claim 1, wherein said resistivity of said transducing layer is at least one Ω

-cm at twenty degrees centigrade.

7. The pyroelectric detector according to claim 1, wherein said change in dielectric constant with change in temperature of said transducing layer is about 0.27 per degree centigrade at twenty degrees centigrade.

8. The pyroelectric detector according to claim 1, wherein said resistivity of said transducing layer is between 1.4 and 15 Ω

-cm at twenty degrees centigrade.

9. The pyroelectric detector according to claim 1, wherein said transducing layer has a stoichiometry of yttrium and lanthanum and rare earths to barium and strontium and calcium to copper of substantially 1 to 2 to 3.

10. The pyroelectric detector according to claim 1, wherein said transducing layer essentially consists of quaternary semiconducting crystalline phases of (1) at least one member selected from the group consisting of yttrium, lanthanum, and rare earths, (2) at least one member selected from the group consisting of barium, strontium, and calcium, (3) copper, and (4) oxygen.

11. The pyroelectric detector according to claim 1, wherein at least 80 percent of the volume of said transducing layer consists of semiconducting crystalline quaternary oxide phases of (1) at least one member selected from the group consisting of yttrium, lanthanum, and rare earths, (2) at least one member selected from the group consisting of barium, strontium, and calcium, (3) copper, and (4) oxygen.