Microelectromechanical television scanning device and method for making the same
First Claim
Patent Images
1. A scanning device, comprising:
- a substrate made from a first material;
a flexible joint located above the substrate, the flexible joint being made from a second material;
a support attached to the flexible joint, the support being made from a third material;
an actuator formed on at least one of the substrate, the flexible joint and the support, the actuator being able to cause the support to move relative to the substrate; and
an optical element on the upper surface of the support.
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Abstract
An electrically actuated microelectromechanical television scanning device for television image scanning or related functions. The scanning device can be produced in forms having characteristic dimensions in the submillimeter range. The scanning device consists of an electrostatically actuated plate with two degrees of freedom. A photoemitter, photoreceptor or other suitable device may be located on the plate, facilitating operation of the device as a flying spot scanner, television image dissector or television display. The scanning device can be fabricated similarly to monolithic integrated circuits.
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Citations
18 Claims
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1. A scanning device, comprising:
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a substrate made from a first material; a flexible joint located above the substrate, the flexible joint being made from a second material; a support attached to the flexible joint, the support being made from a third material; an actuator formed on at least one of the substrate, the flexible joint and the support, the actuator being able to cause the support to move relative to the substrate; and an optical element on the upper surface of the support. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method for forming a scanning device, comprising the steps of:
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a) forming a substrate from a first material; b) forming a flexible joint over the substrate, the flexible joint being made from a second material; c) attaching a support to the flexible joint, the support being made from a third material; d) forming an actuator on at least one of the substrate, the flexible joint and the support, the actuator being able to cause the support to move relative to the substrate; and e) forming an optical element on the upper surface of the support.
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Specification