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Method and apparatus for producing plasma uniformity in a magnetic field-enhanced plasma reactor

  • US 5,674,321 A
  • Filed: 04/28/1995
  • Issued: 10/07/1997
  • Est. Priority Date: 04/28/1995
  • Status: Expired due to Fees
First Claim
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1. A magnetic field-enhanced plasma reactor comprising:

  • a reaction chamber for containing a plasma proximate a substrate support;

    a plurality of substantially annular electromagnets circumscribing a reaction region within the reaction chamber for forming a radially-directed magnetic field within the reaction chamber wherein at least one of said plurality of electromagnets is below the substrate support and a remaining number of electromagnets are above the substrate support, coaxially aligned, and stacked one on top of the other; and

    a current generator, connected to said plurality of electromagnets, for applying a current to each electromagnet in said plurality of electromagnets, where each of the currents flow in opposite directions through adjacent electromagnets.

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