Capacitor and method of manufacturing the same
First Claim
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1. A method of manufacturing a capacitor, comprising the steps of:
- forming an interlevel dielectric film on a first metal interconnection layer;
removing said interlevel dielectric film at a position where said capacitor is to be formed;
forming a dielectric film for forming said capacitor by bias-ECR plasma CVD;
forming a through-hole; and
forming a second metal interconnection layer.
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Abstract
A structure of a capacitor includes a first metal interconnection layer, a dielectric film, and a second metal interconnection layer. The dielectric film is formed on the first metal interconnection layer. The second metal interconnection layer is formed on the dielectric film. The dielectric film is a dielectric film formed by bias-ECR plasma CVD.
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Citations
3 Claims
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1. A method of manufacturing a capacitor, comprising the steps of:
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forming an interlevel dielectric film on a first metal interconnection layer; removing said interlevel dielectric film at a position where said capacitor is to be formed; forming a dielectric film for forming said capacitor by bias-ECR plasma CVD; forming a through-hole; and forming a second metal interconnection layer. - View Dependent Claims (2)
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3. A method of manufacturing a capacitor, comprising the steps of:
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forming an interlevel dielectric film on a first metal interconnection layer; removing said interlevel dielectric film in a tapered shape at a position where said capacitor is to be formed; forming a dielectric film for forming said capacitor by bias-ECR plasma CVD; forming a through-hole; and forming a second metal interconnection layer.
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Specification
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Current AssigneeNippon Telegraph and Telephone Corporation
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Original AssigneeNippon Telegraph and Telephone Corporation
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InventorsYoshino, Hideo, Miura, Kenji, Machida, Katsuyuki, Imai, Kazuo, Ozaki, Yoshiharu
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Primary Examiner(s)Bowers, Jr., Charles L.
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Assistant Examiner(s)WHIPPLE, MATTHEW LAVERNE
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Application NumberUS08/034,906Time in Patent Office1,660 DaysField of Search437/919, 437/228, 437/60, 437/238, 437/241US Class Current438/396CPC Class CodesH01L 28/40 Capacitors
