Induction plasma torch

• US 5,676,863 A
• Filed: 07/12/1995
• Issued: 10/14/1997
• Est. Priority Date: 07/22/1994
• Status: Expired due to Term

• Current Assignee: Draka-Comteq USA Incorporated (Draka-Comteq)
• Original Assignee: Alcatel Fibres Optiques
• Inventors: Jouvenel, Bernard, Ripoche, Pierre
• Primary Examiner(s): Paschall, Mark H.
• Application Number:
  US08/501,295
• Time in Patent Office: 825 Days
• Field of Search: 219/121.43, 219/121.44, 219/121.48, 219/121.52, 156/345, 156/643, 156/646, 118/723, 315/111.51, 315/111.21
• US Class Current: 219/121.52
• CPC Class Codes: C03B 37/01291 by progressive melting, e.g. melting glass powder during delivery to and adhering the so-formed melt to a target or preform, e.g. the Plasma Oxidation Deposition [POD] process
• CPC Class Codes: C03B 37/01426 Plasma deposition burners or torches
• CPC Class Codes: H01J 37/32495 Means for protecting the vessel against plasma
• CPC Class Codes: H05H 1/26 Plasma torches
• CPC Class Codes: H05H 1/30 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/28 takes precedence

Abstract

The present invention relates to an induction plasma torch of the type used in plasma deposition methods for depositing pure or doped silica when manufacturing preforms for optical fibers, the plasma torch comprising:

a "reaction" tube inside which a plasma production zone is located;

means for injecting reagents for forming the pure or doped silica to be deposited into the tube towards the plasma production zone;

feed means for feeding plasma-generating gases into the tube towards the plasma production zone; and

an induction coil surrounding the tube for supplying the energy required to form the plasma;

wherein the tube is protected against the thermal cycles due to variations in the temperature inside the tube by means of a protective lining deposited on the inside wall of the reaction tube at the plasma production zone so as to surround the zone, the lining being made of a material based on silica, and having a thickness of less than 2 mm.

Claims

1. An induction plasma torch of the type used in plasma deposition methods for depositing pure or doped silica when manufacturing preforms for optical fibers, said plasma torch comprising:

a reaction tube inside of which a plasma production zone is located;

a protective lining deposited on an inside wall of said reaction tube at said plasma production zone so as to surround said zone and protect said tube against thermal cycles caused by variations in temperature inside said tube, said lining being made of a material based on silica, and having a thickness of less than 2 mm;

means for injecting reagents for forming the pure or doped silica to be deposited into said tube towards the plasma production zone;

feed means for feeding plasma-generating gases into said tube towards said plasma production zone; and

an induction coil surrounding said tube for supplying the energy required to form said plasma.

2. A plasma torch according to claim 1, wherein said protective lining is made of a material based on opaque silica that has not undergone any fusion, and that is porous.

3. A plasma torch according to claim 1, wherein the thickness of said protective lining is about 0.5 mm.

4. A plasma torch according to claim 1, wherein said protective lining is made of silica that is at least 95% pure, the remaining 5% corresponding in particular to impurities and to binders.

5. A plasma torch according to claim 1, wherein said protective lining is made of a mixture of silica and of alumina Al₂ O₃, in respective proportions by weight of 70% and of 30%.

6. A method of making a protective lining for a plasma torch according to claim 1, including the following steps:

cleaning the inside surface of the reaction tube;

coating the inside wall of said tube with the material making up said protective lining, containing silica in one of aqueous, colloidal, or gelling solution so as to obtain a thin film;

drying said film in ambient air; and

drying said film in an oven at a temperature that is lower than the melting point of the material making up the film.

7. A method according to claim 6, wherein said solution is a liquid slip of silica, and wherein, prior to the coating step, a first end of said tube is closed off, and said slip is fed into said tube through a second end, said first end of the tube being opened up again after the coating step.

8. A method according to claim 6, wherein, during said coating step, said tube is rotated about its own axis.

9. A method according to claim 6, wherein, during said drying steps, said tube is rotated about its own axis.