Color charge-coupled device and method of manufacturing the same
First Claim
1. A method of manufacturing a color charge-coupled device, comprising the steps of:
- forming a plurality of light detectors corresponding to first, second and third colors and a plurality of charge transmission regions in alternate locations on a semiconductor substrate;
forming a pad on one side of said substrate where no said light detectors and no said charge transmission regions are formed;
forming a planarizing film on said substrate, said light detectors, said charge transmission regions, and said pad;
removing said planarizing film from said pad;
coating a microlens material on said planarizing film and patterning said microlens material so as to be left only on said planarizing film above said light detectors;
thermally flowing said microlens material to thereby form microlenses on said planarizing film above said light detectors; and
performing a hard-baking process to thereby form said first, second and third color filter layers directly on said microlenses corresponding to said light detectors of said first to third colors.
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Accused Products
Abstract
A method of manufacturing a color charge-coupled device is disclosed including the steps of alternately forming a plurality of light detectors corresponding to first to third colors and a plurality of charge transmission regions on a semiconductor substrate; forming a pad on one side of the substrate excluding a portion where the light detectors and charge transmission regions are formed; forming a planarizing film on the substrate excluding the pad; coating a microlens material on the planarizing film and patterning the microlens material so as to be left only on the planarizing film above the light detectors; thermally flowing the microlens material, to thereby form microlenses on the planarizing film above the light detectors; and hard-baking first to third dyeing layer, to thereby form first to third color filter layers on each microlens excluding the edge portion.
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Citations
14 Claims
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1. A method of manufacturing a color charge-coupled device, comprising the steps of:
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forming a plurality of light detectors corresponding to first, second and third colors and a plurality of charge transmission regions in alternate locations on a semiconductor substrate; forming a pad on one side of said substrate where no said light detectors and no said charge transmission regions are formed; forming a planarizing film on said substrate, said light detectors, said charge transmission regions, and said pad; removing said planarizing film from said pad; coating a microlens material on said planarizing film and patterning said microlens material so as to be left only on said planarizing film above said light detectors; thermally flowing said microlens material to thereby form microlenses on said planarizing film above said light detectors; and performing a hard-baking process to thereby form said first, second and third color filter layers directly on said microlenses corresponding to said light detectors of said first to third colors. - View Dependent Claims (2, 3, 4)
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5. A method of manufacturing a color charge-coupled device, comprising the steps of:
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forming a plurality of light detectors corresponding to first, second and third colors and a plurality of charge transmission regions in alternate locations on a semiconductor substrate; forming a pad on one side of said substrate where no said light detectors and no said charge transmission regions are formed; forming a planarizing film on said substrate excluding said pad; and performing a thermal-flow process to thereby form said microlenses on said planarizing film; performing a hard-baking process to thereby form said first, second and third color filter layers on said microlenses, respectively. - View Dependent Claims (6, 7, 8)
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9. A method of forming a charge-coupled device comprising the steps of:
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providing a substrate having light detectors interspersed with charge transmission regions; forming a planarizing film on said substrate; forming microlenses on said planarizing film over said light detectors; and forming a color filter, corresponding to one of three colors, on each of said microlenses. - View Dependent Claims (10, 11, 12, 13, 14)
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Specification