Compact low-noise dynodes incorporating semiconductor secondary electron emitting materials
First Claim
1. A dynode device comprising a secondary electron emitting material wherein said material is a semiconducting film having a negative electron affinity selected from the group consisting of diamond, AlN, BN, Ga1-y Aly N and (AlN)x (SiC)1-x, where 0≦
- y≦
1 and 0.2≦
x ≦
1 and the film is doped with one or more elements selected from the group consisting of Be, Mq, Zn, C, Si, S, Se, Cd, Hg, Ge, Li, Na, Sc, B, Al, N, P, Ga and As in a concentration from 1014 to 1021 atoms/cm3.
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Abstract
This invention relates to electron emitting semiconductor materials for use in dynodes, dynode devices incorporating such materials, and methods of making the dynode devices. In particular, the invention relates to emissive materials having an electron affinity that is negative and which have low resistivity. The invention also relates to electronic devices such as electron multipliers, ion detectors, and photomultiplier tubes incorporating the dynodes comprising the materials, and to methods for fabricating the electronic devices. The secondary electron emitters of the present invention comprise wide bandgap semiconductor films selected from diamond, AlN, BN, Ga1-y Aly N where 0≦y≦1 and (AlN)x (SiC)1-x where 0.2≦x≦1. The films are preferably single crystal or polycrystalline. The films may be continuous or patterned.
47 Citations
33 Claims
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1. A dynode device comprising a secondary electron emitting material wherein said material is a semiconducting film having a negative electron affinity selected from the group consisting of diamond, AlN, BN, Ga1-y Aly N and (AlN)x (SiC)1-x, where 0≦
- y≦
1 and 0.2≦
x ≦
1 and the film is doped with one or more elements selected from the group consisting of Be, Mq, Zn, C, Si, S, Se, Cd, Hg, Ge, Li, Na, Sc, B, Al, N, P, Ga and As in a concentration from 1014 to 1021 atoms/cm3. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 24, 25)
- y≦
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23. A dynode device comprising a secondary electron emitting material wherein said material is a semiconducting diamond film having a negative electron affinity, the film being doped with one or more elements selected from the group consisting of B, Li, Na, Sc, Al, N, P and As in a concentration from 1014 to 1021 atoms/cm3.
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26. A dynode device comprising a secondary electron emitting material wherein said material is a semiconducting BN film having a negative electron affinity, the film being doped with one or more elements selected from the group consisting of Li, Na, Be, Mg, Zn, C, Si, P, As, S and Se in a concentration from 1014 to 1021 atoms cm3.
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27. A dynode device comprising a secondary electron emitting material wherein said material is a semiconducting film having a negative electron affinity selected from the group consisting of AlN and Ga1-y Aly N, where 0≧
- y≧
1, the film being doped with one or more elements selected from the group consisting of Li, Na, Be, Mg, Zn, Cd, Hg, C, Si, Ge, P, As, S, and Se in a concentration from 1014 to 1021 atoms/cm3.
- y≧
-
28. A dynode device comprising a secondary electron emitting material wherein said material is a semiconducting (AlN)x (SiC)1-x film having a negative electron affinity and wherein 0.2≧
- x≧
1, the film being doped with at least one or more elements selected from the group consisting of Li, Na, Be, Mg, Zn, Cd, Hg, Ga, Ge, P, As, S, and Se. - View Dependent Claims (29)
- x≧
-
30. A dynode device comprising a secondary electron emitting material wherein said material is a semiconducting diamond film having a negative electron affinity, the film being doped with one or more elements selected from the group consisting of B, Li, Na, Sc, Al, N, P and As, the diamond film having a secondary electron emitting surface and wherein at least 75% of the surface has a (111), (110) or (100) orientation.
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31. A dynode device comprising a secondary electron emitting material wherein said material is a semiconducting diamond film having a negative electron affinity, the film being doped with one or more elements selected from the group consisting of B, Li, Na, Sc, Al, N, P and As, the diamond film having a secondary electron emitting surface and wherein at least about 25% of the surface has a (100) 1×
- 1 structure or a (111) 1×
1 structure.
- 1 structure or a (111) 1×
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32. A dynode device comprising a secondary electron emitting material wherein said material is a semiconducting diamond film having a negative electron affinity, the film being doped with one or more elements selected from the group consisting of B, Li, Na, Sc, Al, N, P and As, the diamond film having a secondary electron emitting surface and at least about 50% of the surface being hydrogen-terminated.
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33. A dynode device comprising a secondary electron-emitting material wherein said material is a semiconducting film having a negative electron affinity selected from the group consisting of diamond, AlN, BN, Ga1-y Aly N and (AlN)x (SiC)1-x, where 0≦
- y≦
1 and 0.2≦
x≦
1, wherein the film is free-standing.
- y≦
Specification