Vision inspection system and method
First Claim
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1. An optical system for inspecting characteristically different kinds of variations in a surface, said system comprising:
- first and second optical subsystems for multiplexed illumination of a predetermined sequence of selected common portions of a material surface region under optical inspection sequenced in alternating succession;
said first optical subsystem providing diffuse illumination;
said second optical subsystem providing fringe illumination taking into account phase information;
an inspection subsystem for viewing common portions of material surface regions in connection with illumination by said first and second optical subsystems; and
a data processing system for processing optical inspection data from both said first and second optical subsystems;
whereinsaid second optical subsystem comprises a module for performing ordered phase unwrapping, in which a raw phase map having many pixels is produced, and a quality metric is applied to each pixel in the raw phase map to rank pixels for an order in which they will be unwrapped.
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Abstract
An optical vision inspection system (4) and method for multiplexed illuminating, viewing, analyzing and recording a range of characteristically different kinds of defects, depressions, and ridges in a selected material surface (7) with first and second alternating optical subsystems (20, 21) illuminating and sensing successive frames of the same material surface patch. To detect the different kinds of surface features including abrupt as well as gradual surface variations, correspondingly different kinds of lighting are applied in time-multiplexed fashion to the common surface area patches under observation.
68 Citations
22 Claims
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1. An optical system for inspecting characteristically different kinds of variations in a surface, said system comprising:
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first and second optical subsystems for multiplexed illumination of a predetermined sequence of selected common portions of a material surface region under optical inspection sequenced in alternating succession; said first optical subsystem providing diffuse illumination; said second optical subsystem providing fringe illumination taking into account phase information; an inspection subsystem for viewing common portions of material surface regions in connection with illumination by said first and second optical subsystems; and a data processing system for processing optical inspection data from both said first and second optical subsystems;
whereinsaid second optical subsystem comprises a module for performing ordered phase unwrapping, in which a raw phase map having many pixels is produced, and a quality metric is applied to each pixel in the raw phase map to rank pixels for an order in which they will be unwrapped. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An optical system for inspecting characteristically different kinds of variations in a surface including both gradual and abrupt surface variations, said system comprising:
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first and second optical subsystems for multiplexed illumination and inspection of a predetermined sequence of selected common portions of a material surface region under optical inspection, said first optical subsystem illuminating a coincident area to highlight abrupt surface variations and said second optical subsystem including an illumination system which produces fringe lines taking into account phase information for highlighting gradual surface variations; and a data processing system for processing optical inspection data from both said first and second optical subsystems;
whereinsecond optical subsystem comprises a module for performing ordered phase unwrapping, in which a raw phase map having many pixels is produced, and a quality metric is applied to each pixel in the raw phase map to rank pixels for an order in which they will be unwrapped. - View Dependent Claims (14, 15, 16, 17, 18)
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19. A method of inspecting a surface having macrodamage and microdamage features with a multimode illumination system highlighting microdamage features during one mode of illumination and highlighting macrodamage features in another mode of illumination and including an optical detection system for image detection of illuminated macrodamage and microdamage features, said method including the steps of:
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projecting fringe illumination taking into account phase information onto a selected surface patch; image detecting macrodamage features within the selected surface patch; projecting diffuse illumination onto the selected surface patch; and image detecting microdamage features within the selected surface patch;
whereinsaid step of projecting fringe illumination is a single-set-of-fringe-lines process for measuring in three-dimensional coordinates the surface shape contours of the surface patch, said process comprising the substeps of; placing the surface patch into the field of view of a projector assembly; activating the projector assembly to project a single set of fringe lines on the surface patch to obtain a raw phase map giving a phase at each of a plurality of pixels corresponding to the surface patch; unwrapping the phases using ordered phase unwrapping; and converting the set of unwrapped phases onto a set of three-dimensional coordinates. - View Dependent Claims (20, 21, 22)
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Specification