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Microvalve

  • US 5,681,024 A
  • Filed: 11/20/1995
  • Issued: 10/28/1997
  • Est. Priority Date: 05/27/1993
  • Status: Expired due to Term
First Claim
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1. A microvalve, comprising:

  • first and second housing sections made of microstructurable material and sealingly connected to each other along marginal portions, at least one of said housing sections defining at least one recess in a surface facing the other of said housing sections to define a substantially enclosed fluid chamber, one of said housing sections being provided with an opening leading into said fluid chamber and surrounded by a annular protrusion extending into said fluid chamber and defining valve seat means, the other of said housing sections comprising flexible diaphragm means movable by selective heat energization into and out of engagement with said valve seat means, said diaphragm means being made of a material having a first coefficient of thermal expansion and being coated with a material having a coefficient of thermal expansion different from said first coefficient, said other housing section being further provided with selectively energizable heating means disposed in said fluid chamber for assisting in the movement of said diaphragm means by heating and expanding fluid in said chamber.

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