Sensor using piezoelectric elements

• US 5,682,000 A
• Filed: 08/23/1996
• Issued: 10/28/1997
• Est. Priority Date: 07/29/1993
• Status: Expired due to Term

• Current Assignee: Kazuhiro Okada
• Original Assignee: Kazuhiro Okada
• Inventors: Okada, Kazuhiro
• Primary Examiner(s): Dougherty, Elizabeth L.
• Application Number:
  US08/701,964
• Time in Patent Office: 431 Days
• Field of Search: 73/862.041, 73/862.042, 73/862.043, 73/862.68, 73/DIG. 4
• US Class Current: 73/862.043
• CPC Class Codes: G01L 5/167 using piezoelectric means
• CPC Class Codes: G01P 2015/084 the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
• CPC Class Codes: Y10S 73/04 Piezoelectric

Abstract

The periphery of a disk having flexibility is fixed to a sensor casing, and a force applied to the central portion is detected. A doughnut disk-shaped piezoelectric element is positioned on the upper surface of the disk, and upper electrode layers indicated by patterns of D1 to D6 are formed on the upper surface of the piezoelectric element. Further, lower electrode layers similarly having pattern of D1 to D6 are formed on the lower surface of the piezoelectric element, and the lower surface of the lower electrode layer is fixed on the upper surface of the disk. Six detection elements D1 to D6 are formed each of which is constituted by a of upper and lower electrode layers and a portion of piezoelectric element put therebetween. Thus, force components exerted at an origin defined in the central portion of the disk in respective axes directions of X, Y, Z can be detected based on charges produced in detection elements D1, D2, detection elements D3, D4, and detection elements D5, D6, respectively.

Claims

1. A force sensor using piezoelectric elements comprising:

a substrate having flexibility wherein an origin is defined at a point within said substrate and an X-axis and a Y-axis extending in a direction in parallel to a principle surface of said substrate are defined, said X-axis and said Y-axis crossing perpendicular to each other at the origin to form an XY coordinate system;

four detection elements composed of a piezoelectric element in a plate form, an upper electrode formed on an upper surface of said piezoelectric element and a lower electrode formed on a lower surface of said piezoelectric element, respective one of said upper electrode and said lower electrode being fixed to said substrate;

a working body having a function for transmitting, to the origin, a force produced on the basis of a physical action exerted from an external source; and

a sensor casing to which an outside peripheral portion of the substrate is fixed;

wherein a first detection element, a second detection element, a third detection element and a fourth detection element are respectively arranged in a negative region on the X-axis, in a positive region on the X-axis, in a negative region on the Y-axis and in a positive region on the Y-axis, respectively;

wherein a force relating to the X-axis direction produced in the working body is detected on the basis of charges produced in the first detection element and the second detection element, and a force relating to the Y-axis direction produced in the working body is detected on the basis of charges produced in the third detection element and the fourth detection element; and

wherein either a group of plural lower electrodes or a group of plural upper electrodes is constituted by a single electrode layer.

2. A force sensor using piezoelectric elements as set forth in claim 1:

wherein an inside annular region to surround the origin from a periphery and an outside annular region to surround said inside annular region further from a periphery thereof are defined;

wherein a first detection element is arranged in a region extending over the second and third quadrants of the XY coordinate system within said outside annular region;

wherein a second detection element is arranged in a region extending over the first and fourth quadrants of the XY coordinate system within said outside annular region;

wherein a third detection element is arranged in a region extending over the third and fourth quadrants of the XY coordinate system within said inside annular region; and

wherein a fourth detection element is arranged in a region extending over the first and second quadrants of the XY coordinate system within said inside annular region.

15. A force sensor using piezoelectric elements as set forth in claim 1:

wherein predetermined polarization processing is implemented to piezoelectric elements of respective detection elements;

so that two detection elements for detecting a force relating to the X-axis direction, which are arranged on the opposite side each other with respect to the origin, have an opposite polarization characteristic each other; and

so that two detection elements for detecting a force relating to the Y-axis direction, which are arranged on the opposite side each other with respect to the origin, have an opposite polarization characteristic each other.

17. A force sensor using piezoelectric elements as set forth in claim 1:

wherein the substrate having flexibility is constituted by a conductive material and said substrate itself is used as the single electrode layer.

19. A force sensor using piezoelectric elements as set forth in claim 1:

wherein there are further provided four expanding/contracting elements, each of which comprises a piezoelectric element in a plate form, an upper electrode formed on an upper surface of said piezoelectric element and a lower electrode formed on a lower surface of said piezoelectric element, and said expanding/contracting elements expand or contract in a layer direction of the electrodes when a predetermined voltage is applied between said upper electrode and said lower electrode, respective one of said upper electrode and said lower electrode of the respective expanding/contracting elements being fixed to the substrate; and

,

wherein the first expanding/contracting element, the second expanding/contracting element, the third expanding/contracting element and the fourth expanding/contracting element are respectively arranged in a negative region on the X-axis, in a positive region on the X-axis, in a negative region on the Y-axis, and in a positive region on the Y-axis;

so as to conduct test for the sensor by applying predetermined voltages across electrodes of the respective expanding/contracting elements to induce a displacement equivalent to the case where a force in a predetermined direction is applied to the working body.

23. A force sensor using piezoelectric elements as set forth in claim 1:

wherein the working body has an enough weight to produce a force on the basis of an acceleration applied from an external source, thereby making it possible to detect acceleration.

3. A force sensor using piezoelectric elements comprising:

a substrate having flexibility wherein an origin is defined at a point within said substrate, an X-axis and a Y-axis extending in a direction in parallel to a principle surface of said substrate are defined, said X-axis and said Y-axis crossing perpendicular to each other at the origin to form an XY coordinate system, a Z-axis passing through the origin and perpendicular to an XY-plane passing through the origin is defined, and a fourth axis passing through the origin and extending along the XY-plane is defined;

six detection elements composed of a piezoelectric element in a plate form, an upper electrode formed on an upper surface of said piezoelectric element and a lower electrode formed on a lower surface of said piezoelectric element, respective one of said upper electrode and said lower electrode being fixed to said substrate;

a working body having a function for transmitting, to the origin, a force produced on the basis of a physical action exerted from an external source; and

a sensor casing to which an outside peripheral portion of the substrate is fixed;

wherein a first detection element, a second detection element, a third detection element, a fourth detection element, a fifth detection element and a sixth detection element are respectively arranged in a negative region on the X-axis, in a positive region on the X-axis, in a negative region on the Y-axis, in a positive region on the Y-axis, in a negative region on the fourth axis and in a positive region on the fourth axis, respectively;

wherein a force relating to the X-axis direction produced in the working body is detected on the basis of charges produced in the first detection element and the second detection element, a force relating to the Y-axis direction produced in the working body is detected on the basis of charges produced in the third detection element and the fourth detection element and a force relating to the Z-axis direction produced in the working body is detected on the basis of charges produced in the fifth detection element and sixth detection element; and

wherein either a group of plural lower electrodes or a group of plural upper electrodes is constituted by a single electrode layer.

4. A force sensor using piezoelectric elements as set forth in claim 3, wherein the X-axis is used as the fourth axis.

5. A force sensor using piezoelectric elements as set forth in claim 4:

wherein an inside annular region to surround the origin from a periphery and an outside annular region to surround said inside annular region further from a periphery thereof are defined on the XY-plane;

wherein the first detection element is arranged in a region extending over the second and third quadrants of the XY coordinate system within said outside annular region;

wherein the second detection element is arranged in the region extending over the first and fourth quadrants of the XY coordinate system within the outside annular region;

wherein the third detection element is arranged in a region extending over the third and fourth quadrants of the XY coordinate system within said inside annular region;

wherein the fourth detection element is arranged in a region extending over the first and second quadrants of the XY coordinate system within said inside annular region;

wherein the fifth detection element is arranged in a negative region on the X-axis within said inside annular region so that it is positioned between the third and the fourth detection elements; and

wherein sixth detection element is arranged in a positive region on the X-axis within said inside annular region so that it is positioned between the third and the fourth detection elements.

6. A force sensor using piezoelectric element as set forth in claim 4:

wherein an inside annular region to surround the origin from a periphery and an outside annular region to surround said inside annular region further from a periphery thereof are defined on the XY-plane;

wherein a first detection element is arranged in a region extending over the first and second quadrants of the XY coordinate system within said outside annular region;

wherein a second detection element is arranged in a region extending over the third and fourth quadrants of the XY coordinate system within said outside annular region;

wherein a third detection element is arranged in a region extending over the second and third quadrants of the XY coordinate system within said inside annular region;

wherein a fourth detection element is arranged in a region extending over the first and fourth quadrants of the XY coordinate system within said inside annular region;

wherein a fifth detection element is arranged in a negative region on the X-axis within said outside annular region so that it is positioned between the first and the second detection elements; and

wherein a sixth detection element is arranged in a positive region on the X-axis within said outside annular region so that it is positioned between the first and the second detection elements.

7. A force sensor using piezoelectric element as set forth in claim 5:

wherein a seventh detection element and an eighth detection element are further provided in addition;

wherein the seventh detection element is arranged in the negative region on the Y-axis within the outside annular region so that it is positioned between the first and the second detection elements;

wherein the eighth detection element is arranged in the positive region on the Y-axis within the outside annular region so that it is positioned between the first and the second detection elements; and

wherein a force relating to the Z-axis direction produced in the working body is detected on the basis of charges produced in the fifth to the eighth detection elements.

8. A force sensor using piezoelectric elements comprising:

a substrate having flexibility wherein an origin is defined at a point within said substrate and an X-axis and a Y-axis extending in a direction in parallel to a principle surface of said substrate are defined, said X-axis and said Y-axis crossing perpendicular to each other at the origin to form an XY coordinate system;

four detection elements composed of a piezoelectric element in a plate form, an upper electrode formed on an upper surface of said piezoelectric element and a lower electrode formed on a lower surface of said piezoelectric element, respective one of said upper electrode and said lower electrode being fixed to said substrate;

a working body having a function for transmitting, to an outside peripheral portion of the substrate, a force produced on the basis of a physical action exerted from an external source; and

a sensor casing to which said origin is fixed;

wherein a first detection element, a second detection element, a third detection element and a fourth detection element are respectively arranged in a negative region on the X-axis, in a positive region on the X-axis, in a negative region on the Y-axis and in a positive region on the Y-axis, respectively;

wherein a force relating to the X-axis direction produced in the working body is detected on the basis of charges produced in the first detection element and the second detection element, and a force relating to the Y-axis direction produced in the working body is detected on the basis of charges produced in the third detection element and the fourth detection element; and

wherein either a group of plural lower electrodes or a group of plural upper electrodes is constituted by a single electrode layer.

9. A force sensor using piezoelectric elements as set forth in claim 8:

wherein an inside annular region to surround the origin from a periphery and an outside annular region to surround said inside annular region further from a periphery thereof are defined;

wherein a first detection element is arranged in a region extending over the second and third quadrants of the XY coordinate system within said outside annular region;

wherein a second detection element is arranged in a region extending over the first and fourth quadrants of the XY coordinate system within said outside annular region;

wherein a third detection element is arranged in a region extending over the third and fourth quadrants of the XY coordinate system within said inside annular region; and

wherein a fourth detection element is arranged in a region extending over the first and second quadrants of the XY coordinate system within said inside annular region.

16. A force sensor using piezoelectric elements as set forth in claim 8:

wherein predetermined polarization processing is implemented to piezoelectric elements of respective detection elements;

so that two detection elements for detecting a force relating to the X-axis direction, which are arranged on the opposite side each other with respect to the origin, have an opposite polarization characteristic each other; and

so that two detection elements for detecting a force relating to the Y-axis direction, which are arranged on the opposite side each other with respect to the origin, have an opposite polarization characteristic each other.

18. A force sensor using piezoelectric elements as set forth in claim 8:

wherein the substrate having flexibility is constituted by a conductive material and said substrate itself is used as the single electrode layer.

20. A force sensor using piezoelectric elements as set forth in claim 8:

wherein there are further provided four expanding/contracting elements, each of which comprises a piezoelectric element in a plate form, an upper electrode formed on an upper surface of said piezoelectric element and a lower electrode formed on a lower surface of said piezoelectric element, and safe expanding/contracting elements expand or contract in a layer direction of the electrodes when a predetermined voltage is applied between said upper electrode and said lower electrode, respective one of said upper electrode and said lower electrode of the respective expanding/contracting elements being fixed to the substrate; and

,

wherein the first expanding/contracting element, the second expanding/contracting element, the third expanding/contracting element and the fourth expanding/contracting element are respectively arranged in a negative region on the X-axis, in a positive region on the X-axis, in a negative region on the Y-axis, and in a positive region on the Y-axis;

so as to conduct test for the sensor by applying predetermined voltages across electrodes of the respective expanding/contracting elements to induce a displacement equivalent to the case where a force in a predetermined direction is applied to the working body.

24. A force sensor using piezoelectric elements as set forth in claim 8:

wherein the working body has an enough weight to produce a force on the basis of an acceleration applied from an external source, thereby making it possible to detect acceleration.

10. A force sensor using piezoelectric elements comprising:

a substrate having flexibility wherein an origin is defined at a point within said substrate, an X-axis and a Y-axis extending in a direction in parallel to a principle surface of said substrate are defined, said X-axis and said Y-axis crossing perpendicular to each other at the origin to form an XY coordinate system, a Z-axis passing through the origin and perpendicular to an XY-plane passing through the origin is defined, and a fourth axis passing through the origin and extending along the XY-plane is defined;

six detection elements composed of a piezoelectric element in a plate form, an upper electrode formed on an upper surface of said piezoelectric element and a lower electrode formed on a lower surface of said piezoelectric element, respective one of said upper electrode and said lower electrode being fixed to said substrate;

a working body having a function for transmitting, to an outside peripheral portion of the substrate, a force produced on the basis of a physical action exerted from an external source; and

a sensor casing to which said origin is fixed;

wherein a first detection element, a second detection element, a third detection element, a fourth detection element, a fifth detection element and a sixth detection element are respectively arranged in a negative region on the X-axis, in a positive region on the X-axis, in a negative region on the Y-axis, in a positive region on the Y-axis, in a negative region on the fourth axis and in a positive region on the fourth axis, respectively;

wherein a force relating to the X-axis direction produced in the working body is detected on the basis of charges produced in the first detection element and the second detection element, a force relating to the Y-axis direction produced in the working body is detected on the basis of charges produced in the third detection element and the fourth detection element and a force relating to the Z-axis direction produced in the working body is detected on the basis of charges produced in the fifth detection element and sixth detection element; and

wherein either a group of plural lower electrodes or a group of plural upper electrodes is constituted by a single electrode layer.

11. A force sensor using piezoelectric elements as set forth in claim 10, wherein the X-axis is used as the fourth axis.

12. A force sensor using piezoelectric elements as set forth in claim 11:

wherein an inside annular region to surround the origin from a periphery and an outside annular region to surround said inside annular region further from a periphery thereof are defined on the XY-plane;

wherein the first detection element is arranged in a region extending over the second and third quadrants of the XY coordinate system within said outside annular region;

wherein the second detection element is arranged in the region extending over the first and fourth quadrants of the XY coordinate system within the outside annular region;

wherein the third, detection element is arranged in a region extending over the third and fourth quadrants of the XY coordinate system within said inside annular region;

wherein the fourth detection element is arranged in a region extending over the first and second quadrants of the XY coordinate system within said inside annular region;

wherein the fifth detection element is arranged in a negative region on the X-axis within said inside annular region so that it is positioned between the third and the fourth detection elements; and

wherein sixth detection element is arranged in a positive region on the X-axis within said inside annular region so that it is positioned between the third and the fourth detection elements.

13. A force sensor using piezoelectric element as set forth in claim 11:

wherein an inside annular region to surround the origin from a periphery and an outside annular region to surround said inside annular region further from a periphery thereof are defined on the XY-plane;

wherein a first detection element is arranged in a region extending over the first and second quadrants of the XY coordinate system within said outside annular region;

wherein a second detection element is arranged in a region extending over the third and fourth quadrants of the XY coordinate system within said outside annular region;

wherein a third detection element is arranged in a region extending over the second and third quadrants of the XY coordinate system within said inside annular region;

wherein a fourth detection element is arranged in a region extending over the first and fourth quadrants of the XY coordinate system within said inside annular region;

wherein a fifth detection element is arranged in a negative region on the X-axis within said outside annular region so that it is positioned between the first and the second detection elements; and

wherein a sixth detection element is arranged in a positive region on the X-axis within said outside annular region so that it is positioned between the first and the second detection elements.

14. A force sensor using piezoelectric element as set forth in claim 12:

wherein a seventh detection element and an eighth detection element are further provided in addition;

wherein the seventh detection element is arranged in the negative region on the Y-axis within the outside annular region so that it is positioned between the first and the second detection elements;

wherein the eighth detection element is arranged in the positive region on the Y-axis within the outside annular region so that it is positioned between the first and the second detection elements; and

wherein a force relating to the Z-axis direction produced in the working body is detected on the basis of charges produced in the fifth to the eighth detection elements.

21. A force sensor using piezoelectric elements comprising:

a substrate constituted by a conductive material and having a thickness enough to have flexibility wherein an origin is defined at a point within said substrate and an X-axis and a Y-axis extending in a direction in parallel to a principle surface of said substrate are defined, said X-axis and said Y-axis crossing perpendicular to each other at the origin to form an XY coordinate system;

four detection elements composed of a piezoelectric element in a plate form and an upper electrode formed on an upper surface of said piezoelectric element, a lower surface of said piezoelectric element being fixed to said substrate;

a working body having a function for transmitting, to the origin, a force produced on the basis of a physical action exerted from an external source; and

a sensor casing to which an outside peripheral portion of the substrate is fixed;

wherein a first detection element, a second detection element, a third detection element and a fourth detection element are respectively arranged in a negative region on the, X-axis, in a positive region on the X-axis, in a negative region on the Y-axis and in a positive region on the Y-axis, respectively; and

wherein a force relating to the X-axis direction produced in the working body is detected on the basis of charges produced in the first detection element and the second detection element, and a force relating to the Y-axis direction produced in the working body is detected on the basis of charges produced in the third detection element and the fourth detection element.

22. A force sensor using, piezoelectric elements comprising:

a substrate constituted by a conductive material and having a thickness enough to have flexibility wherein an origin is defined at a point within said substrate and an X-axis and a Y-axis extending in a direction in parallel to a principle surface of said substrate are defined, said X-axis and said Y-axis crossing perpendicular to each other at the origin to form an XY coordinate system;

four detection elements composed of a piezoelectric element in a plate form and an upper electrode formed on an upper surface of said piezoelectric element, a lower surface of said piezoelectric element being fixed to said substrate;

a working body having a function for transmitting, to an outside peripheral portion of the substrate, a force produced on the basis of a physical action exerted from an external source; and

a sensor casing to which said origin is fixed;

wherein a first detection element, a second detection element, a third detection element and a fourth detection element are respectively arranged in a negative region on the X-axis, in a positive region on the X-axis, in a negative region on the Y-axis and in a positive region on the Y-axis, respectively; and

wherein a force relating to the X-axis direction produced in the working body is detected on the basis of charges produced in the first detection element and the second detection element, and a force relating to the Y-axis direction produced in the working body is detected on the basis of charges produced in the third detection element and the fourth detection element.