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X-ray source

  • US 5,682,412 A
  • Filed: 09/20/1996
  • Issued: 10/28/1997
  • Est. Priority Date: 04/05/1993
  • Status: Expired due to Term
First Claim
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1. An x-ray source comprising a charged particle beam generator and a vacuum envelope assembly;

  • said charged particle beam generator comprising an outer casing, a high-voltage terminal and an electron gun;

    said high-voltage terminal comprising electronic components to power said electron gun;

    said vacuum envelope assembly comprising an outer casing, charged particle beam focussing means for focussing an electron beam generated by said charged particle beam generator, a target, and charged particle beam deflection means for deflecting said electron beam in a step pattern at said target;

    said target operated at ground potential;

    said charged particle beam deflection means comprising a beam controller, a fast deflection yoke and a slow deflection yoke, said beam controller having current outputs comprising an x-deflection current and an x-step current;

    said x-deflection current having a triangular waveform with a non-zero substantially constant slope during the period of time it takes said electron beam to travel across the face of said target;

    said x-step current comprising a waveform having a plurality of substantially sawtoothed shapes during the period of time it takes said electron beam to travel across the face of said target;

    said slow deflection yoke comprising x-deflection coils and y-deflection coils, said x-deflection coils operably coupled to said beam controller and having an input electrically coupled to said x-deflection current;

    said fast deflection yoke comprising x-step deflection coils operably coupled to said beam controller, said x-step deflection coils having lower inductance than said x-deflection coils and said y-deflection coils, said x-step deflection coils having an input electrically coupled to said x-step current.

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