Stage device and pattern transfer system using the same
First Claim
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1. A stage device, comprising:
- first, fine-motion driving means, comprising a linear motor, for moving a movable stage through a first range in a predetermined direction; and
second, relatively rough-motion driving means for moving the movable stage through a second range in the predetermined direction, which is substantially of the same extent as the first range.
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Abstract
A stage device includes a first, fine-motion driving system for moving a movable stage through a first range; and a second, relatively rough-motion driving system for moving the movable stage through a second range which is substantially of the same extent as the first range.
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Citations
16 Claims
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1. A stage device, comprising:
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first, fine-motion driving means, comprising a linear motor, for moving a movable stage through a first range in a predetermined direction; and second, relatively rough-motion driving means for moving the movable stage through a second range in the predetermined direction, which is substantially of the same extent as the first range. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 14, 15, 16)
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12. An exposure system including a stage device, comprising:
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first, fine-motion driving means, comprising a linear motor, for moving a movable stage through a first range in a predetermined direction; second, relatively rough-motion driving means for moving the movable stage through a second range in the predetermined direction, which is substantially of the same extent as the first range; and means for exposing a substrate placed on the movable stage with radiation energy generated by one of an X-ray source and an excimer laser source. - View Dependent Claims (13)
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Specification