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Sensor arrangement

  • US 5,685,969 A
  • Filed: 09/28/1994
  • Issued: 11/11/1997
  • Est. Priority Date: 09/28/1993
  • Status: Expired due to Fees
First Claim
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1. A method for manufacturing a sensor arrangement for sensing a material, comprising the steps of:

  • providing a substrate of n-doped silicon having a principal face;

    forming channels in said principal face by electrochemically etching said principal face in a fluoride-containing, acidic electrolyte in contact with said principal face while applying a voltage between said electrolyte and said substrate with said substrate connected as an anode, to set a current density influencing erosion of said principal face by said etching, said channels respectively having channel surfaces;

    depositing a catalytic layer on said channel surfaces, without filling said channels, which reacts exothermally with the material to be sensed; and

    providing a temperature sensor in temperature-sensing relationship to said catalytic layer to sense a temperature produced by the exothermal reaction of said catalytic layer and said material.

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