Method for forming a metal oxide semiconductor field effect transistor (MOSFET) having improved hot carrier immunity

• US 5,686,329 A
• Filed: 12/29/1995
• Issued: 11/11/1997
• Est. Priority Date: 12/29/1995
• Status: Expired due to Term

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Wang, J. W., Chang, Ming-Hsung
• Primary Examiner(s): DANG, TRUNG Q
• Application Number:
  US08/581,144
• Time in Patent Office: 683 Days
• Field of Search: 437/29, 437/40 SW, 437/41 RLD, 437/44, 437/41 SW, 437/919
• US Class Current: 438/253
• CPC Class Codes: H01L 21/28061 the conductor comprising a metal or metal silicide formed by deposition, e.g. sputter deposition, i.e. without a silicidation reaction H01L21/28052 takes precedence
• CPC Class Codes: H01L 29/4941 with a barrier layer between the silicon and the metal or metal silicide upper layer, e.g. Silicide/TiN/Polysilicon
• CPC Class Codes: H01L 29/66545 using a dummy, i.e. replacement gate in a process wherein at least a part of the final gate is self aligned to the dummy gate
• CPC Class Codes: H01L 29/6656 using multiple spacer layers, e.g. multiple sidewall spacers
• CPC Class Codes: H01L 29/6659 with both lightly doped source and drain extensions and source and drain self-aligned to the sides of the gate, e.g. lightly doped drain [LDD] MOSFET, double diffused drain [DDD] MOSFET
• CPC Class Codes: H01L 29/7836 with a significant overlap between the lightly doped extension and the gate electrode H01L29/7834, H01L29/7835 take precedence

Abstract

A Metal Oxide Semiconductor Field Effect Transistor (MOSFET) exhibiting enhanced immunity to Hot Carrier Effects (HCEs), and a method by which the MOSFET may be formed. To form the MOSFET there is first provided a semiconductor substrate having a gate dielectric layer formed thereupon. The gate dielectric layer has a gate electrode formed thereupon, where the gate dielectric layer extends beyond a pair of opposite edges of the gate electrode. Formed into the semiconductor substrate adjoining the pair of opposite edges of the gate electrode is a pair of low dose ion implants. Formed upon the gate dielectric layer and contacting the pair of opposite edges of the gate electrode is a pair of conductive spacers. The pair of conductive spacers partially overlaps the pair of low dose ion implants. Finally, there is formed into the semiconductor substrate adjoining the pair of opposite edges of the gate electrode and further removed from the pair of conductive spacers a pair of source/drain electrodes. The pair of source/drain electrodes partially overlaps the pair of low dose ion implants. Optionally, a pair of insulator spacers may be formed upon the pair of conductive spacers to adjust the partial overlap of the pair of source/drain electrodes and the pair of low dose ion implants.

Claims

1. A method for fabricating a Metal Oxide Semiconductor Field Effect Transistor (MOSFET) comprising:

forming upon a semiconductor substrate a gate dielectric layer, the gate dielectric layer having a gate electrode formed thereupon, the gate dielectric layer extending beyond a pair of opposite edges of the gate electrode, the gate electrode layer being formed at least in part from a first doped polysilicon layer;

forming into the semiconductor substrate directly adjoining the pair of opposite edges of the gate electrode a pair of low dose ion implants;

forming upon the gate dielectric layer and contacting the pair of opposite edges of the gate electrode a pair of conductive spacers, the pair of conductive spacers partially overlapping the pair of low dose ion implants, the pair of conductive spacers being formed from a second doped polysilicon layer; and

forming into the semiconductor substrate adjoining the pair of opposite edges of the gate electrode and further removed from the pair of conductive spacers a pair of source/drain electrodes, the pair of source/drain electrodes partially overlapping the pair of low dose ion implants, where at least either;

the first doped polysilicon layer is employed in forming over the semiconductor substrate, simultaneously with the gate electrode, a first polysilicon capacitor electrode within a double layer polysilicon capacitor;

or

the second doped polysilicon layer is employed in forming over the semiconductor substrate, simultaneously with the pair of conductive spacers, a second polysilicon capacitor electrode within the double layer polysilicon capacitor.

2. The method of claim 1 wherein the thickness of the gate electrode is from about 2400 to about 3100 angstroms.

3. The method of claim 1 wherein the gate electrode is formed from a polycide.

4. The method of claim 1 wherein the first doped polysilicon layer which has a resistivity of no greater than about 45 ohms per square.

5. The method of claim 1 wherein the pair of low dose ion implants is formed at an ion implant dose of from about 1.0E13 to about 4.0E13 ions per square centimeter and an ion implantation energy of from about 40 to about 60 keV.

6. The method of claim 1 wherein the second doped polysilicon layer has a resistivity of no greater than about 30 ohms per square.

7. The method of claim 1 wherein each conductive spacer within the pair of conductive spacers overlaps a low dose ion implant within the pair of low dose ion implants by a width of about 1300 to about 1700 angstroms upon the semiconductor substrate.

8. The method of claim 1 wherein the pair of source/drain electrodes is formed at an ion implant dose of from about 3.0E15 to about 5.0E15 ions per square centimeter and an ion implantation energy of from about 40 to about 60 keV.

9. The method of claim 1 further comprising forming a pair of insulator spacers upon the pair of conductive spacers, each insulator spacer within the pair of insulator spacers further overlapping a low dose ion implant within the pair of low dose ion implants by a thickness of from about 1300 to about 1500 angstroms upon the semiconductor substrate.