Method of and apparatus for controlling reactive impedances of a matching network connected between an RF source and an RF plasma processor

• US 5,689,215 A
• Filed: 05/23/1996
• Issued: 11/18/1997
• Est. Priority Date: 05/23/1996
• Status: Expired due to Term

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Barnes, Michael S., Ngo, Tuan, Richardson, Brett
• Primary Examiner(s): GENSLER, PAUL L
• Application Number:
  US08/652,037
• Time in Patent Office: 544 Days
• Field of Search: 333/17.3, 364/482
• US Class Current: 333/17.3
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32174 Circuits specially adapted for controlling the RF discharge
• CPC Class Codes: H03H 7/40 Automatic matching of load impedance to source impedance

Abstract

An r.f. field is supplied by a reactive impedance element to a plasma in a vacuum plasma processing chamber. The element and source are connected via a matching network including first and second variable reactances that control loading of the source and tuning a load, including the reactive impedance element and the plasma, to the source. The values of the first and second variable reactances are changed to determine the amount the first variable reactance is to change for each unit change of the second variable reactance to attain the best match between the impedances seen looking into and out of output terminals of the r.f. source. Then the values of the first and second variable reactances are varied simultaneously based on the determination until the best impedance match between the impedances seen looking into and out of output terminals of the r.f. source is attained.

Claims

1. A method of supplying an r.f. field to a plasma in a vacuum plasma chamber processing a workpiece, the r.f. field being supplied to the plasma by a reactive impedance element connected via a matching network to an r.f. source, the r.f. field having a frequency and power level sufficient to ignite the gas into the plasma and to maintain the plasma, the matching network including first and second variable reactances that control loading of the source and tuning a load including the reactive impedance element and the plasma to the source, the method comprising (1) determining the amount the first variable reactance is to change for each unit change of the second variable reactance to attain the best match between the impedances seen looking into and out of output terminals of the r.f. source by changing the values of the first and second variable reactances, and (2) then varying the values of the first and second variable reactances based on the determination made in step (1) until the best impedance match between the impedances seen looking into and out of output terminals of the r.f. source is attained.

2. The method of claim 1 wherein the best match between the impedances seen looking into and out of output terminals of the r.f. source is determined as a function of the power coupled between the source and a load including the reactive impedance element and the plasma.

3. The method of claim 2 wherein the function is maximum r.f. current flowing to the reactive impedance element.

4. The method of claim 2 wherein the function is based on maximum power delivered to the load relative to source output power.

5. The method of claim 1 wherein the values of the first and second variable reactances are simultaneously changed during step (2).

6. The method of claim 5 wherein the values of the first and second variable reactances are sequentially changed during step (1) so the first variable reactance is changed while the second variable reactance is not changed and the second variable reactance is changed while the first variable reactance is not changed.

7. The method of claim 5 wherein the values of the first and second variable reactances are simultaneously changed during step (1).

8. The method of claim 1 wherein the values of the first and second variable reactances are sequentially changed during step (1) so the first variable reactance is changed while the second variable reactance is not changed and the second variable reactance is changed while the first variable reactance is not changed.

9. The method of claim 1 wherein the values of the first and second variable reactances are simultaneously changed during step (1).

10. A method of supplying an r.f. field to a plasma in a vacuum plasma chamber processing a workpiece, the r.f. field being supplied to the plasma by a reactive impedance element connected via a matching network to an r.f. source, the r.f. field having a frequency and power level sufficient to ignite the gas into the plasma and to maintain the plasma, the matching network including first and second variable reactances that control loading of the source and tuning a load including the reactive impedance element and the plasma to the source, the method comprising:

(1) changing the value of only the first of said variable reactances until the best impedance match between the impedances seen looking into and out of output terminals of the r.f. source is attained;

(2) then changing only the value of the second of said variable reactances until the best impedance match between the impedances seen looking into and out of output terminals of the r.f. source is attained;

(3) then changing the value of only the first of said variable reactances until the best impedance match between the impedances seen looking into and out of output terminals of the r.f. source is attained;

(4) from indications of the values of the first and second variable reactances at the completion of steps (1) and (3), determining the amount the first variable reactance is to change for each unit change in the value of the second variable reactance; and

(5) then varying the values of the first and second variable reactances based on the determination of step (4) and until the best possible impedance match between the impedances seen looking into and out of output terminals of the r.f. source is attained.

11. The method of claim 10 wherein the variations in values of step (5) result in a first straight line trajectory in a plot of the values of the first and second variable reactances, the method further including:

(a) determining if the best possible impedance match at the completion of step (5) meets a minimum criterion;

(b) in response to the determination at the end of step (5) meeting the minimum criterion, maintaining the values of the first and second variable reactances constant;

(c) in response to the determination at the end of step (5) not meeting the minimum criterion, changing the values of the first and second variable reactances so there is a second straight line trajectory at a right angle to the first trajectory until the best possible match between the impedances seen looking into and out of output terminals of the r.f. source is attained; and

(d) then simultaneously changing the values of the first and second variable reactances along a further straight line trajectory including a point on the first trajectory and a further point determined by the point on the second trajectory where the best possible match between the impedances seen looking into and out of output terminals of the r.f. source is attained.

12. The method of claim 11 wherein the point on the first and further trajectories is an intermediate point along the first trajectory.

13. The method of claim 12 wherein the further point on the further trajectory is the point on the second trajectory where the best possible match between the impedances seen looking into and out of output terminals of the r.f. source is attained.

14. The method of claim 11 wherein the further point on the further trajectory is the point on the second trajectory where the best possible match between the impedances seen looking into and out of output terminals of the r.f. source is attained.

15. The method of claim 11 wherein the best impedance match between the impedance seen looking into and out of output terminals of the r.f. source is determined as a function of the power coupled between the source and a load including the reactive impedance element and the plasma.

16. The method of claim 15 wherein the function is maximum r.f. current flowing to the reactive impedance element.

17. The method of claim 15 wherein the function is based on maximum power delivered to the load relative to source output power.

18. The method of claim 11 wherein the values of the first and second variable reactances are simultaneously changed during step (5).

19. The method of claim 10 wherein the values of the first and other variable reactances are simultaneously changed during step (5).

20. The method of claim 10 wherein the best possible match between the impedances seen looking into and out of output terminals of the r.f. source is determined as a function of the power coupled between the source and a load including the reactive impedance element and the plasma.

21. The method of claim 20 wherein the function is maximum r.f. current flowing to the reactive impedance element.

22. The method of claim 20 wherein the function is based on maximum power delivered to the load relative to source output power.

23. Apparatus for supplying an r.f. field to a plasma in a vacuum plasma chamber for processing a workpiece, comprising a reactive impedance element for supplying the r.f. field to the plasma, the reactive impedance element being connected via a matching network to an r.f. source, the r.f. field having a frequency and power level sufficient to ignite the gas into the plasma and to maintain the plasma, the matching network including first and second variable reactances for controlling loading of the source and tuning a load including the reactive impedance element and the plasma to the source, a controller for (1) determining the amount the first variable reactance is to change for each unit change of the second variable reactance to attain the best match between the impedances seen looking into and out of output terminals of the r.f. source by changing the values of the first and second variable reactances, and (2) then varying the values of the first and second variable reactances based on the determination of (1) until the best impedance match between the impedances seen looking into and out of output terminals of the r.f. source is attained.

24. The apparatus of claim 23 wherein the best match between the impedances seen looking into and out of output terminals of the r.f. source is determined as a function of the power coupled between the source and a load including the reactive impedance element and the plasma.

25. The apparatus of claim 24 wherein the function is maximum r.f. current flowing to the reactive impedance element.

26. The apparatus of claim 24 wherein the function is based on maximum power delivered to the load relative to source output power.

27. The apparatus of claim 23 wherein the values of the first and second variable reactances are simultaneously changed during (2).

28. The apparatus of claim 27 wherein the values of the first and second variable reactances are sequentially changed during (1) so the first variable reactance is changed while the second variable reactance is not changed and the second variable reactance is changed while the first variable reactance is not changed.

29. The apparatus of claim 27 wherein the values of the first and second variable reactances are simultaneously changed during (1).

30. The apparatus of claim 23 wherein the values of the first and second variable reactances are sequentially changed during (1) so the first variable reactance is changed while the second variable reactance is not changed and the second variable reactance is changed while the first variable reactance is not changed.

31. The apparatus of claim 23 wherein the values of the first and second variable reactances are simultaneously changed during (1).

32. A memory for use with a computer for controlling an r.f. field supplied to a plasma in a vacuum plasma chamber for processing a workpiece, the r.f. field being supplied to the plasma by a reactive impedance element connected via a matching network to an r.f. source, the r.f. field having a frequency and power level sufficient to ignite the gas into the plasma and to maintain the plasma, the matching network including first and second variable reactances that control loading of the source and resonating a load including the reactive impedance element and the plasma to the source, the memory storing signals to cause the computer to:

(1) determine the amount the first of the variable reactances is to change for each unit change of the second of the variable reactances to attain the best match between the impedances seen looking into and out of output terminals of the r.f. source by commanding the computer to change the values of the first and second variable reactances; and

(2) then vary the values of the first and second variable reactances based on the determination (1) until the computer determines the best impedance match between the impedances seen looking into and out of output terminals of the r.f. source is attained.

33. A method of supplying an r.f. field to a plasma in a vacuum plasma chamber processing a workpiece, the r.f. field being supplied to the plasma by a reactive impedance element connected via a matching network to an r.f. source, the r.f. field having a frequency and power level sufficient to ignite the gas into the plasma and to maintain the plasma, the matching network including first and second variable reactances that control loading of the source and tuning a load including the reactive impedance element and the plasma to the source, the method comprising (1) determining the amount the first variable reactance is to change for each unit change of the second variable reactance by changing the values of the first and second variable reactances until an initial best match is attained between the impedances seen looking into and out of output terminals of the r.f. source, and (2) then varying the values of the first and second variable reactances based on the determination made in step (1) until the best impedance match between the impedances seen looking into and out of output terminals of the r.f. source is attained.

34. Apparatus for supplying an r.f. field to a plasma in a vacuum plasma chamber for processing a workpiece, comprising a reactive impedance element for supplying the r.f. field to the plasma, the reactive impedance element being connected via a matching network to an r.f. source, the r.f. field having a frequency and power level sufficient to ignite the gas into the plasma and to maintain the plasma, the matching network including first and second variable reactances for controlling loading of the source and tuning a load including the reactive impedance element and the plasma to the source, a controller for (1) determining the amount the first variable reactance is to change for each unit change of the second variable reactance by changing the values of the first and second variable reactances until the best initial match between the impedances as seen looking into and out of output terminals of the r.f. source is attained, and (2) then varying the values of the first and second variable reactances based on the determination of (1) until the best impedance match between the impedances seen looking into and out of output terminals of the r.f. source is attained.

35. A memory for use with a computer for controlling an r.f. field supplied to a plasma in a vacuum plasma chamber for processing a workpiece, the r.f. field being supplied to the plasma by a reactive impedance element connected via a matching network to an r.f. source, the r.f. field having a frequency and power level sufficient to ignite the gas into the plasma and to maintain the plasma, the matching network including first and second variable reactances that control loading of the source and resonating a load including the reactive impedance element and the plasma to the source, the memory storing signals to cause the computer to:

(1) determine the amount the first of the variable reactances is to change for each unit change of the second of the variable reactances by commanding the computer to change the values of the first and second variable reactances until the best initial match between the impedances seen looking into and out of output terminals of the r.f. source is attained; and

(2) then vary the values of the first and second variable reactances based on the determination (1) until the computer determines the best impedance match between the impedances seen looking into and out of output terminals of the r.f. source is attained.