Catadioptric optical system and exposure apparatus having the same
First Claim
1. A catadioptric optical system comprising:
- a first imaging optical system forming an intermediate image of a pattern provided on a first surface, said first imaging optical system including a first lens group with a positive refracting power and a second lens group which includes a concave mirror having a concave surface facing said first surface, said second lens group having a negative lens component;
a second imaging optical system forming an image of said intermediate image upon a second surface, a composite magnification of said first and second imaging optical systems being a reduction magnification; and
a first optical path deflecting member disposed in an optical path from said first imaging optical system to said second imaging optical system so as to guide light from said first imaging optical system to said second imaging optical system,wherein a part of the first lens group of said first imaging optical system is positioned between said first optical path deflecting member and said second lens group, in a space through which both light directed from said first surface to said second lens group and light directed from said second lens group to said first optical path deflecting member pass, andwherein the first lens group includes, in the following order from said first surface toward said second lens group, a front lens group having a positive refracting power, an intermediate lens group having a negative refracting power, and a rear lens group having a positive refracting power.
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Accused Products
Abstract
A catadioptric optical system includes a first imaging optical system forming an intermediate image of a pattern provided on a first surface with a reduced magnification, including a first lens group with a positive refracting power and a second lens group which includes a concave mirror having a negative lens component. The system also includes a second image optical system forming an image of the intermediate image upon a second surface, a combined magnification of the first and second imaging optical systems being a reduction magnification. The system further includes a deflecting member disposed in an optical path from the first imaging system to the second imaging system so as to guide light from the first imaging system to the second imaging system.
253 Citations
32 Claims
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1. A catadioptric optical system comprising:
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a first imaging optical system forming an intermediate image of a pattern provided on a first surface, said first imaging optical system including a first lens group with a positive refracting power and a second lens group which includes a concave mirror having a concave surface facing said first surface, said second lens group having a negative lens component; a second imaging optical system forming an image of said intermediate image upon a second surface, a composite magnification of said first and second imaging optical systems being a reduction magnification; and a first optical path deflecting member disposed in an optical path from said first imaging optical system to said second imaging optical system so as to guide light from said first imaging optical system to said second imaging optical system, wherein a part of the first lens group of said first imaging optical system is positioned between said first optical path deflecting member and said second lens group, in a space through which both light directed from said first surface to said second lens group and light directed from said second lens group to said first optical path deflecting member pass, and wherein the first lens group includes, in the following order from said first surface toward said second lens group, a front lens group having a positive refracting power, an intermediate lens group having a negative refracting power, and a rear lens group having a positive refracting power. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. An exposure apparatus comprising:
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a first stage capable of holding a photosensitive substrate on a main surface thereof; a second stage for holding a mask with a predetermined an illumination optical system for irradiating said mask with exposure light having a predetermined wavelength so as to transfer an image of the predetermined pattern on said mask onto said substrate; and a catadioptric optical system provided between said first stage and said second stage so as to project the pattern on said mask onto said substrate, said catadioptric optical system comprising; a first imaging optical system forming an intermediate image of the pattern provided on said mask, said first imaging optical system including a first lens group with a positive refracting power and a second lens group which includes a concave mirror having a concave surface facing said mask, said second lens group having a negative lens component; a second imaging optical system forming an image of said intermediate image upon said substrate, a composite magnification of said first and second imaging optical systems being a reduction magnification; and a first optical path deflecting member disposed in an optical path from said first imaging optical system to said second imaging optical system so as to guide light from said first imaging optical system to said second imaging optical system, wherein a part of the first lens group of said first imaging optical system is positioned between said first optical path deflecting member and said second lens group, in a space through which both light directed from said mask to said second lens group and light directed from said second lens group to said first optical path deflecting member pass, and wherein the first lens group includes, in the following order from said mask toward said second lens group, a front lens group having a positive refracting power, an intermediate lens group having a negative refracting power, and a rear lens group having a positive refracting power. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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Specification