Light absorptive antireflector
First Claim
1. A light absorptive antireflector consisting essentially of a substrate, a light absorbing film formed on the substrate and a silica film formed on the light absorbing film, to reduce reflection of incident light from the silica film side, wherein the geometrical film thickness of the light absorbing film is from 5 to 25 nm, and the geometrical film thickness of the silica film is from 70 to 110 nm, and wherein an oxidation barrier layer of geometrical film thickness of from 1 to 20 nm is present and consists essentially of a metal or a metal nitride with oxidation barrier properties and formed between and next to the light absorbing film and the silica film.
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Accused Products
Abstract
A light absorptive antireflector comprising a substrate, a light absorbing film formed on the substrate and a silica film formed on the light absorbing film, to reduce reflection of incident light from the silica film side, wherein the geometrical film thickness of the light absorbing film is from 5 to 25 nm, and the geometrical film thickness of the silica film is from 70 to 110 nm.
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Citations
26 Claims
- 1. A light absorptive antireflector consisting essentially of a substrate, a light absorbing film formed on the substrate and a silica film formed on the light absorbing film, to reduce reflection of incident light from the silica film side, wherein the geometrical film thickness of the light absorbing film is from 5 to 25 nm, and the geometrical film thickness of the silica film is from 70 to 110 nm, and wherein an oxidation barrier layer of geometrical film thickness of from 1 to 20 nm is present and consists essentially of a metal or a metal nitride with oxidation barrier properties and formed between and next to the light absorbing film and the silica film.
- 14. A light absorptive antireflector consisting essentially of a substrate, a light absorbing film formed on the substrate, a transparent film having a high refractive index formed on the light absorbing film and a silica film formed on the transparent film, to reduce reflection of incident light from the silica film side, wherein the geometrical film thickness of the light absorbing film is from 15 to 30 nm, the geometrical film thickness of the transparent film having a high refractive index is from 10 to 40 nm, and the geometrical film thickness of the silica film is form 50 to 90 nm, and wherein an oxidation barrier layer of geometrical film thickness of from 1 to 20 nm is present and consists essentially of a metal or a metal nitride with oxidation barrier properties and is formed between and next to the light absorbing film and the transparent film, or between and next to the transparent film and the silica film.
Specification