Acceleration and angular velocity detector

• US 5,691,471 A
• Filed: 11/13/1995
• Issued: 11/25/1997
• Est. Priority Date: 11/16/1994
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Iwasaki, Jun, Okazaki, Mitsuhiro
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US08/557,422
• Time in Patent Office: 743 Days
• Field of Search: 73/504.04, 73/504.12, 73/504.14, 73/504.15, 73/504.02, 73/510, 73/504.11
• US Class Current: 73/504.04
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/084 the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass

Abstract

An acceleration and angular velocity detector comprises a body mass, a flexible portion, which is connected to the body mass, that deforms in consonance with a displacement of the body mass, and a peripheral support for supporting the flexible portion. A vibration device causes the body mass to vibrate circularly in two dimensions. A displacement detection device independently detects displacements of the body mass in three axes directions and outputs a signal and a signal processor calculates acceleration in the three axes directions and angular velocities around three axes by employing the signal that is output by the displacement detection device.

Claims

1. An acceleration and angular velocity detector comprising:

a body mass;

a flexible portion, which is connected to said body mass, that deforms in consonance with displacement of said body mass;

a peripheral support member for supporting said flexible portion;

vibration means for vibrating said body mass circularly;

displacement detection means for independently detecting displacements of said body mass in directions of three axes and for outputting a signal; and

calculation means for detecting accelerations in said three directions and angular velocities around said three axes by employing said signal output by said displacement detection means.

2. An acceleration and angular velocity detector according to claim 1, wherein said vibration means causes said body mass to vibrate circularly in a plane parallel to a plane of said flexible portion.

3. An acceleration and angular velocity detector according to claim 2, wherein said calculation means includes a signal dividing section, which divides said signal into a signal having a low frequency component and a signal having a high frequency component and outputs said signal having a low frequency component as an acceleration signal, and a synchronous detecting section, which outputs an angular velocity signal based on said signal having a high frequency component and a vibration frequency with which said vibration means vibrates said body mass.

4. An acceleration and angular velocity detector according to claim 3, wherein said displacement detection means includes first, second, and third bridge circuits, said first bridge circuit having, in said flexible portion, a first resistor element group, which includes four resistor elements that are formed along one axis of two intersecting axes, and having a first voltage meter;

said second bridge circuit having, in said flexible portion, a second resistor element group, which includes four resistor elements that are formed along the other axis of said two intersecting axes, and having a second voltage meter; and

said third bridge circuit having, in said flexible portion, a third resistor element group, which includes four resistor elements that are formed along said other axis of said two intersecting axes, and having a third voltage meter.

5. An acceleration and angular velocity detector according to claim 3, wherein said displacement detection means includes at least four electrodes having equal areas and disposed orthogonally and symmetrically to each other on one of a bottom surface of said body mass and a surface that is positioned opposite to said bottom surface;

one electrode, which is formed on the other of said surfaces; and

electric capacity detection means for detecting an electric capacity between each of said at least four electrodes and said one electrode.

6. An acceleration and angular velocity detector according to claim 3, wherein said vibration means includes piezoelectric elements that are formed on said flexible portion, and a vibration signal generator for applying an alternating current voltage to said piezoelectric elements.

7. An acceleration and angular velocity detector according to claim 6, wherein said piezoelectric elements are composed of PZT.

8. An acceleration and angular velocity detector according to claim 7, wherein said flexible portion, said body mass, and said peripheral support member are made of silicon.

9. An acceleration and angular velocity detector according to claim 1, wherein said vibration means causes said body mass to vibrate circularly in a plane perpendicular to a plane of said flexible portion.

10. An acceleration and angular velocity detector according to claim 9, wherein said calculation means includes a signal dividing section, which divides said signal into a signal having a low frequency component and a signal having a high frequency component and outputs said signal having a low frequency component as an acceleration signal, and a synchronous detecting section, which outputs an angular velocity signal based on said signal having a high frequency component and a vibration frequency with which said vibration means vibrates said body mass.

11. An acceleration and angular velocity detector according to claim 10, wherein said displacement detection means includes first, second, and third bridge circuits, said first bridge circuit having, in said flexible portion, a first resistor element group, which includes four resistor elements that are formed along one axis of two intersecting axes, and having a first voltage meter;

said second bridge circuit having, in said flexible portion, a second resistor element group, which includes four resistor elements that are formed along the other axis of said two intersecting axes, and having a second voltage meter; and

said third bridge circuit having, in said flexible portion, a third resistor element group, which includes four resistor elements that are formed along said other axis of said two intersecting axes, and having a third voltage meter.

12. An acceleration and angular velocity detector according to claim 10, wherein said displacement detection means includes at least four electrodes having equal areas and disposed orthogonally and symmetrically to each other on one of a bottom surface of said body mass and a surface that is positioned opposite to said bottom surface;

one electrode, which is formed on the other of said surfaces; and

electric capacity detection means for detecting an electric capacity between each of said at least four electrodes and said one electrode.

13. An acceleration and angular velocity detector according to claim 10, wherein said vibration means includes piezoelectric elements that are formed on said flexible portion, and a vibration signal generator for applying an alternating current voltage to said piezoelectric elements.

14. An acceleration and angular velocity detector according to claim 13, wherein said piezoelectric elements are composed of PZT.

15. An acceleration and angular velocity detector according to claim 14, wherein said flexible portion, said body mass, and said peripheral support member are made of silicon.

16. An acceleration and angular velocity detector comprising:

a body mass;

a flexible portion, which is connected to said body mass, that deforms in consonance with displacement of said body mass;

a peripheral support member for supporting said flexible portion;

a vibration device that vibrates said body mass such that a portion of said body mass moves in a substantially circular motion;

a displacement detection device that independently detects displacements of said body mass in directions of three axes and that outputs a signal; and

a calculation device that detects accelerations in said three directions and angular velocities around said three axes by employing said signal output by said displacement detection device.

17. An acceleration and angular velocity detector according to claim 16, wherein said vibration device causes said portion of said body mass to vibrate in a substantially circular motion in a plane parallel to a plane of said flexible portion.

18. An acceleration and angular velocity detector according to claim 17, wherein said calculation device includes a signal dividing section, which divides said signal into a signal having a low frequency component and a signal having a high frequency component and outputs said signal having a low frequency component as an acceleration signal, and a synchronous detecting section, which outputs an angular velocity signal based on said signal having a high frequency component and a vibration frequency with which said vibration device vibrates said body mass.

19. An acceleration and angular velocity detector according to claim 18, wherein said displacement detection device includes first, second, and third bridge circuits, said first bridge circuit having, in said flexible portion, a first resistor element group, which includes four resistor elements that are formed along one axis of two intersecting axes, and having a first voltage meter;

said second bridge circuit having, in said flexible portion, a second resistor element group, which includes four resistor elements that are formed along the other axis of said two intersecting axes, and having a second voltage meter; and

said third bridge circuit having, in said flexible portion, a third resistor element group, which includes four resistor elements that are formed along said other axis of said two intersecting axes, and having a third voltage meter.

20. An acceleration and angular velocity detector according to claim 18, wherein said displacement detection device includes at least four electrodes having equal areas and disposed orthogonally and symmetrically to each other on one of a bottom surface of said body mass and a surface that is positioned opposite to said bottom surface;

one electrode, which is formed on the other of said surfaces; and

an electric capacity detection device that detects an electric capacity between each of said at least four electrodes and said one electrode.

21. An acceleration and angular velocity detector according to claim 18, wherein said vibration device includes piezoelectric elements that are formed on said flexible portion, and a vibration signal generator for applying an alternating current voltage to said piezoelectric elements.

22. An acceleration and angular velocity detector according to claim 21, wherein said piezoelectric elements are composed of PZT.

23. An acceleration and angular velocity detector according to claim 22, wherein said flexible portion, said body mass, and said peripheral support member are made of silicon.

24. An acceleration and angular velocity detector according to claim 16, wherein said vibration device causes said portion of said body mass to vibrate in a substantially circular motion in a plane perpendicular to a plane of said flexible portion.

25. An acceleration and angular velocity detector according to claim 24, wherein said calculation device includes a signal dividing section, which divides said signal into a signal having a low frequency component and a signal having a high frequency component and outputs said signal having a low frequency component as an acceleration signal, and a synchronous detecting section, which outputs an angular velocity signal based on said signal having a high frequency component and a vibration frequency with which said vibration device vibrates said body mass.

26. An acceleration and angular velocity detector according to claims 25, wherein said displacement detection device includes first, second, and third bridge circuits, said first bridge circuit having, in said flexible portion, a first resistor element group, which includes four resistor elements that are formed along one axis of two intersecting axes, and having a first voltage meter;

said second bridge circuit having, in said flexible portion, a second resistor element group, which includes four resistor elements that are formed along the other axis of said two intersecting axes, and having a second voltage meter; and

said third bridge circuit having, in said flexible portion, a third resistor element group, which includes four resistor elements that are formed along said other axis of said two intersecting axes, and having a third voltage meter.

27. An acceleration and angular velocity detector according to claim 25, wherein said displacement detection device includes at least four electrodes having equal areas and disposed orthogonally and symmetrically to each other on one of a bottom surface of said body mass and a surface that is positioned opposite to said bottom surface;

one electrode, which is formed on the other of said surfaces; and

an electric capacity detection device that detects an electric capacity between each of said at least four electrodes and said one electrode.

28. An acceleration and angular velocity detector according to claim 25, wherein said vibration device includes piezoelectric elements that are formed on said flexible portion, and a vibration signal generator for applying an alternating current voltage to said piezoelectric elements.

29. An acceleration and angular velocity detector according to claim 28, wherein said piezoelectric elements are composed of PZT.

30. An acceleration and angular velocity detector according to claim 29, wherein said flexible portion, said body mass, and said peripheral support member are made of silicon.