Method and apparatus for measuring sheet resistance and thickness of thin films and substrates

• US 5,691,648 A
• Filed: 11/16/1995
• Issued: 11/25/1997
• Est. Priority Date: 11/10/1992
• Status: Expired due to Fees

• Current Assignee: David Cheng
• Original Assignee: David Cheng
• Inventors: Cheng, David
• Primary Examiner(s): Karlsen, Ernest F.
• Assistant Examiner(s): Solis, Jose M.
• Application Number:
  US08/558,434
• Time in Patent Office: 740 Days
• Field of Search: 324/718, 324/719, 324/709, 324/715, 324/716, 437/8
• US Class Current: 324/716
• CPC Class Codes: G01B 7/06 for measuring thickness measuring during the manufacture of coatings C23C14/54
• CPC Class Codes: G01R 27/02 Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant by measuring phase angle only G01R25/00
• CPC Class Codes: G01R 31/2648 Characterising semiconductor materials testing of materials or semi-finished products G01R31/2831; testing during manufacture H01L22/00

Abstract

A method and apparatus for measuring sheet resistance and thickness of thin films and substrates. A four-point probe assembly engages the surface of a film on a substrate, and the thickness of the substrate is determined from the point of contact between the probes and film. A measuring apparatus then outputs a voltage waveform which applies a voltage to probes of the probe assembly. An inverter inverts the voltage and provides the inverted voltage on another probe of the probe assembly, thus inducing a current in these probes of the four point probe and through the surface of the film. Two other probes measure a voltage in the film created by the current. The voltages on the current probes provide a voltage close to zero at the other probes, thus allowing these other probes to measure voltages with greater precision. The current created by the voltage waveform and the voltage created across the inner probes are measured for each voltage level of the waveform. A sheet resistance of the film is determined by calculating the slope of a least square fit line of the measured current and voltage. The sheet resistance is proportional to the slope of the least square line. The thickness of the film is calculated by dividing the film resistivity by the calculated sheet resistance.

Claims

1. A method for measuring sheet resistance of a film surface comprising:

engaging a probe assembly including a plurality of probes with a surface of a film;

creating a variable voltage using a voltage source on said probe assembly to create a variable voltage in said film, thereby creating a variable current through a portion of said film;

measuring said variable current flowing through said portion of said film at a plurality of points in time;

measuring a film voltage between two of said probes of said probe assembly at a corresponding plurality of points in time to when said variable current is measured, said film voltage being influenced by said variable current; and

calculating a sheet resistance of said film from a plurality of ratios of said measured film voltages to corresponding measured currents.

2. A method as recited in claim 1 wherein said variable voltage is created on a first one of said probes of said probe assembly, and further comprising a step of creating a dependent variable voltage on a second one of said probes of said probe assembly such that said current in said film flows from said first probe to said second probe, wherein said dependent variable voltage is based on said variable voltage.

3. A method as recited in claim 2 wherein said first and second probes are outer probes of said probe assembly and wherein said step of measuring said film voltage between said probes includes measuring said film voltage between third and fourth ones of said probes.

4. A method as recited in claim 2 wherein said step of creating a dependent variable voltage on said second probe includes inverting said variable voltage and providing said inverted variable voltage as said dependent variable voltage at said second probe, thereby creating approximately zero voltage at said third and fourth probes of said probe assembly.

5. A method as recited in claim 4 wherein said step of creating a dependent variable voltage on said second probe includes coupling an inverting amplifier between said first and second probes and coupling a buffer amplifier between said first and second probes, said buffer amplifier having a high input impedance.

6. A method as recited in claim 4 wherein said step of measuring said current flowing through said film includes coupling a sense resistor between said waveform generator and said first probe, and measuring a voltage across said sense resistor.

7. A method as recited in claim 6 wherein said step of creating a dependent variable voltage on said second probe includes creating a dependent current on said second probe by coupling an inverting amplifier to said output of said voltage source and coupling an output of said inverting amplifier to said second probe by a second resistor.

8. A method as recited in claim 7 wherein said second resistor has a same resistance value as said sense resistor such that a voltage on said surface of said film at said second probe is equal in magnitude and opposite in phase to a voltage on said surface of said film at said first probe.

9. A method as recited in claim 2 further comprising engaging said probe assembly with a surface of a film at a plurality of locations on the film surface and calculating a sheet resistance for each location thus engaged.

10. A method as recited in claim 2 wherein said waveform generator creates a cyclical sawtooth current in said film, and wherein said waveform generator includes a digital computer.

11. A method as recited in claim 2 further comprising calculating a film thickness from said sheet resistance.

12. A method as recited in claim 1 further comprising a step of calculating a Figure of Merit from said measured currents and voltages to determine the quality of said measurements of said variable current and said variable voltage.

13. A method for measuring sheet resistance of a film surface comprising:

engaging a probe assembly including a plurality of probes with a surface of a film;

creating a variable voltage on a first one of said probes of said probe assembly using a voltage source;

creating a dependent variable voltage on a second one of said probes of said probe assembly by inverting said variable voltage and providing said inverted variable voltage at said second probe, thereby creating a variable current through said film, wherein said current in said film flows from said first probe to said second probe;

measuring said variable current flowing through said portion of said film at a plurality of points in time, said variable current being measured at a portion of said film between said first and second probes where an average voltage is close to zero;

measuring a film voltage between two of said probes of said probe assembly at a corresponding plurality of points in time to when said variable current is measured; and

calculating a sheet resistance of said film from a plurality of ratios of said measured film voltages to corresponding measured currents.

14. A method as recited in claim 13 wherein said first and second probes are outer probes of said probe assembly and wherein said step of measuring said film voltage between said probes includes measuring said film voltage between third and fourth ones of said probes.

15. A method as recited in claim 13 further comprising engaging said probe assembly with a surface of a film at a plurality of locations on the film surface and calculating a sheet resistance for each location thus engaged.

16. A method as recited in claim 13 further comprising a step of calculating a Figure of Merit from said measured currents and voltages to determine the quality of said measurements of said variable current and said variable voltage.

17. A method as recited in claim 13 wherein said step of creating a dependent variable voltage on said second probe includes coupling an inverting amplifier between said first and second probes and coupling a buffer amplifier between said first and second probes, said buffer amplifier having a high input impedance.

18. A method as recited in claim 13 wherein said step of measuring said current flowing through said film includes coupling a sense resistor between said waveform generator and said first probe, and measuring a voltage across said sense resistor.

19. A method as recited in claim 18 wherein said step of creating a dependent variable voltage on said second probe includes creating a dependent current on said second probe by coupling an inverting amplifier to said output of said voltage source and coupling an output of said inverting amplifier to said second probe by a second resistor, wherein said second resistor has a same resistance value as said sense resistor such that a voltage on said surface of said film at said second probe is equal in magnitude and opposite in phase to a voltage on said surface of said film at said first probe.

20. A method as recited in claim 13 wherein said waveform generator creates a cyclical sawtooth current in said film, and wherein said waveform generator includes a digital computer.

33. A method as recited in claim 13 further comprising calculating a film thickness from said sheet resistance.

34. A method as recited in claim 13 wherein said film surface is provided on a substrate, and further comprising determining the thickness of said substrate and film when said probe assembly is moved to engage said film by detecting a contact current sensed by said probe assembly when said probes of said probe assembly contact said film, wherein a distance between said probes and a surface supporting said substrate is recorded when said contact current is sensed.

35. A method as recited in claim 13 further comprising calculating a Figure of Merit from said measured currents and voltages to determine the quality of said measurements of said variable current and said variable voltage.

36. A method as recited in claim 18 further comprising:

calculating a first Figure of Merit from said measured currents and voltages to determine the quality of said measurements of said variable current and said variable voltage;

changing a value of said sense resistor;

performing said measurements of said current and said sample voltages and calculating a second Figure of Merit; and

providing a sense resistor value for sheet resistance measurements that caused a Figure of Merit indicating the highest quality of measurements.

21. A method for measuring sheet resistance of a sample comprising:

(a) engaging a probe assembly including a plurality of probes with a surface of a sample;

(b) applying a first voltage from a voltage source to a first probe of said probe assembly;

(c) providing an inverted voltage based on and inverted from said first voltage to a second probe of said probe assembly, thereby creating a current through said sample;

(d) measuring said current through said sample;

(e) measuring a sample voltage between said first probe and said second probe;

(f) repeating steps (b) through (e) applying a second voltage in place of and different from said first voltage; and

(g) calculating sheet resistance using a plurality of said measured currents and a plurality of said sample voltages.

22. A method as recited in claim 21 wherein said sample is a film deposited on a substrate.

23. A method as recited in claim 21 wherein said sample is a substrate.

24. A method as recited in claim 21 wherein said first and second probes are outer probes of said probe assembly and wherein said step of measuring said sample voltage between said probes includes measuring said sample voltage between two inner probes of said probe assembly.

25. A method as recited in claim 24 wherein said calculating sheet resistance includes:

calculating a first sheet resistance from the ratio of said sample voltage to said current resulting from said first voltage being applied;

calculating a second sheet resistance from the ratio of said sample voltage to said current resulting from said second voltage being applied; and

calculating a resulting sheet resistance from said first sheet resistance and said second sheet resistance.

26. A method as recited in claim 21 wherein said step of creating an inverted variable voltage on said second probe includes providing third and fourth probes on said probe assembly for measuring said sample voltage, said third and fourth probes positioned between said first and second probes, wherein said first voltage and said inverted voltage create a voltage close to zero in said sample at said third and fourth probes of said probe assembly, thereby allowing accurate measurements of small changes in said sample voltage.

27. A method as recited in claim 21 wherein said step of creating an inverted variable voltage on said second probe includes providing a buffer amplifier between said first and second probes, said buffer amplifier having a high input impedance.

28. A method as recited in claim 21 wherein said first voltage created on said first probe, said inverted voltage, and said current vary with time, and wherein said current and said sample voltage are measured at a plurality of points in time to provide said plurality of currents and sample voltages.

29. A method as recited in claim 28 wherein said sheet resistance of said sample is calculated from a plurality of ratios, each of said ratios being a ratio of a measured sample voltage to a corresponding measured current.

30. A method as recited in claim 21 wherein said step of measuring said current flowing through said sample includes coupling a sense resistor between said waveform generator and said first probe, and measuring a voltage across said sense resistor.

31. A method as recited in claim 30 wherein said step of providing an inverting voltage to said second probe includes inverting said voltage from said voltage source with an inverter and providing a second resistor between said inverter and said second probe.

32. A method as recited in claim 23 further comprising a step of determining the thickness of said substrate when said probe assembly is moved to engage said substrate by detecting a contact current sensed by said probe assembly when said probes of said probe assembly contact said substrate, wherein a distance between said probes and a surface supporting said substrate is recorded when said contact current is sensed.