Etch rate monitoring by optical emission spectroscopy

• US 5,694,207 A
• Filed: 12/09/1996
• Issued: 12/02/1997
• Est. Priority Date: 12/09/1996
• Status: Expired due to Term

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Tao, Hun-Jan, Hung, Shu Chi
• Primary Examiner(s): Evans, F. L.
• Application Number:
  US08/762,076
• Time in Patent Office: 358 Days
• Field of Search: 356/311, 356/316, 356/72
• US Class Current: 356/72
• CPC Class Codes: G01N 21/73 using plasma burners or torches
• CPC Class Codes: H01L 21/3065 Plasma etching; Reactive-ion etching

Abstract

The etch rate in a plasma etching system has been monitored in-situ by using optical emission spectroscopy to measure the intensities of two or more peaks in the radiation spectrum and then using the ratio of two such peaks as a direct measure of etch rate. Examples of such peaks occur at 338.5 and 443.7 nm and at 440.6 and 437.6 nm for the fluoride/SOG system. Alternately, the intensities of at least four such peaks may be measured and the product of two ratios may be used. Examples of peaks used in this manner occurred at 440.5, 497.2 and 502.3 nm, also for the fluoride/SOG system. The method is believed to be general and not limited to fluoride/SOG.

Claims

1. A method for in-situ monitoring the etch rate of a layer, comprising:

providing a silicon substrate bearing said layer;

providing a gaseous plasma that emits radiation and that etches said layer;

providing power to form the plasma and inserting the substrate therein, thereby causing etching to take place;

measuring intensity values for said radiation at wavelengths 388.5 and 443.7 nanometers of the radiation; and

computing the quotient of the intensity at 388.5 nanometers divided by the intensity at 443.7 nanometers, thereby providing a number that is proportional to said etch rate.

2. The method of claim 1 wherein said layer is spin-on-glass or silicon oxide.

3. The method of claim 1 wherein said plasma comprises argon, nitrogen, and a gas selected from the group consisting of trifluoro methane and carbon tetrafluoride.

4. The method of claim 1 wherein the power provided to form the plasma is between about 800 and 1,000 watts.

5. The method of claim 1 wherein the etch rate is between about 4,500 and 5,100 Angstroms per minute.

6. A method for in-situ monitoring the etch rate of a layer, comprising:

providing a substrate bearing said layer;

providing a gaseous plasma that emits radiation and that etches said layer;

providing power to form the plasma and inserting the substrate therein, thereby causing etching to take place;

measuring first and second intensity values for said radiation, at first and second wavelengths of the radiation respectively;

measuring third and fourth intensity values for said radiation, at third and fourth wavelengths of the radiation respectively;

computing a first quotient comprising the first intensity value divided by the second intensity value;

computing a second quotient comprising the third intensity value divided by the fourth intensity value; and

computing the product of the first quotient multiplied by the second quotient, thereby providing a number that is proportional to said etch rate.

7. The method of claim 6 wherein the first wavelength is at 440.5 nanometers, the second wavelength is at 497.2 nanometers, the third wavelength is at 440.5 nanometers, the fourth wavelength is at 502.3 nanometers.

8. The method of claim 6 wherein the substrate is a silicon wafer.

9. The method of claim 6 wherein said layer is spin-on-glass or silicon oxide.

10. The method of claim 6 wherein said plasma comprises argon, nitrogen, and a gas selected from the group consisting of trifluoro methane and carbon tetrafluoride.

11. The method of claim 6 wherein the power provided to form the plasma is between about 800 and 1,000 watts.

12. The method of claim 6 wherein the etch rate is between about 4,500 and 5,100 Angstroms per minute.

13. A method for in-situ monitoring the etch rate of a layer, comprising:

providing a silicon substrate bearing said layer;

providing a gaseous plasma that emits radiation and that etches said layer;

providing power to form the plasma and inserting the subtrate therein, thereby causing etching to take place;

measuring intensity values for said radiation at wavelengths 440.6 and 437.6 nanometers of the radiation; and

computing the quotient of the intensity at 440.6 nanometers divided by the intensity at 437.6 nanometers, thereby providing a number that is proportional to said etch rate.

14. The method of claim 13 wherein said layer is spin-on-glass or silicon oxide.

15. The method of claim 13 wherein said plasma comprises argon, nitrogen, and a gas selected from the group consisting of trifluoromethane and carbon tetrafluoride.

16. The method of claim 13 wherein the power provided to form the plasma is between about 800 and 1,000 watts.

17. The method of claim 13 wherein the etch rate is between about 4,500 and 5,100 Angstroms per minute.