Position detection of mechanical resonant scanner mirror

• US 5,694,237 A
• Filed: 09/25/1996
• Issued: 12/02/1997
• Est. Priority Date: 09/25/1996
• Status: Expired due to Term

• Current Assignee: University of Washington
• Original Assignee: University of Washington
• Inventors: Melville, Charles D.
• Primary Examiner(s): Phan, James
• Application Number:
  US08/719,767
• Time in Patent Office: 433 Days
• Field of Search: 359/196-200, 359/212-215, 359/221-226, 359/900, 250/234-236, 250/206.1, 235/462, 235/467, 235/472, 310/36, 348/203, 348/205
• US Class Current: 359/214.1
• CPC Class Codes: G01P 15/09 by piezoelectric pick-up
• CPC Class Codes: G02B 26/105 with one or more pivoting mirrors or galvano-mirrors G02B26/101 takes precedence
• CPC Class Codes: G02B 27/017 Head mounted
• CPC Class Codes: G02B 7/1821 for rotating or oscillating mirrors
• CPC Class Codes: Y10S 359/90 Methods

Abstract

Two piezoelectric sensors are mounted on the back of a spring-plate of a mechanical resonance scanner on respective sides of a center line coinciding with an axis of rotation. As the scanner mirror rotates back and forth the two sensors are accelerated and decelerated at a 180° phase difference. Each sensor'"'"'s output voltage crosses a zero level when the acceleration is unchanging. A differential amplifier detects the zero crossings for motion along the axis of rotation. Common mode rejection eliminates the non-rotational accelerations associated with external vibrations and shocks, and prevents masking the mirror'"'"'s zero-crossings.

Claims

1. An optical resonant scanner, comprising:

a reflective surface for deflecting light, the reflective surface alternately rotating about an axis of rotation in a first direction and a second direction, wherein the rotation in the first direction occurs between a first extreme rotational position and a second extreme rotational position, and wherein the rotation in the second direction occurs between the second extreme rotational position and the first extreme rotational position, wherein the alternate rotation about the axis of rotation defines an oscillatory motion of the reflective surface, and wherein the reflective surface undergoes zero acceleration during said oscillatory motion at a third rotational position occurring between the first extreme rotational position and the second extreme rotational position;

a first sensor generating a first output signal varying as a function of accelerated movement of the first sensor and having a zero level in the absence of accelerated movement;

a second sensor generating a second output signal varying as a function of accelerated movement of the second sensor and having a zero level in the absence of accelerated movement, wherein the first sensor and second sensor are equidistant from the axis of rotation and move with the reflective surface, and wherein the first sensor and second sensor are oriented to generate respective first output signal and second output signal components at a 180 degree phase difference attributable to acceleration about the axis of rotation;

means for differencing the first output signal and second output signal to generate a difference signal having a zero level whenever the reflective surface is at the third rotational position.

2. The scanner of claim 1 in which the differencing means comprises a differential amplifier performing common mode rejection on the first output signal and second output signal.

3. The scanner of claim 1, in which the oscillatory motion is characterized by a first frequency, and further comprising:

an actuation circuit for moving the reflective surface in said oscillatory motion, the actuation circuit receiving a drive signal; and

a phase locked loop for locking phase of the drive signal to phase of the oscillatory motion so as to be either one of in phase or at a 180 degree phase difference.

4. The scanner of claim 3, in which the drive signal has a frequency equal to the first frequency.

5. A method for identifying a known position of a reflective surface within an optical resonant scanner, the reflective surface deflecting light along a scan path, the reflective surface alternately rotating about an axis of rotation in a first direction and a second direction, wherein the rotation in the first direction occurs between a first extreme rotational position and a second extreme rotational position, and wherein the rotation in the second direction occurs between the second extreme rotational position and the first extreme rotational position, wherein the alternate rotation about the axis of rotation defines an oscillatory motion of the reflective surface, and wherein the reflective surface undergoes zero acceleration during said oscillatory motion at a third rotational position occurring between the first extreme rotational position and the second extreme rotational position;

the method comprising the steps of;

generating a first output signal at a first sensor, the first output signal varying as a function of accelerated movement of the first sensor and having a zero level in the absence of accelerated movement;

generating a second output signal at a second sensor, the second output signal varying as a function of accelerated movement of the second sensor and having a zero level in the absence of accelerated movement, wherein the first sensor and second sensor are equidistant from the axis of rotation and move with the reflective surface, and wherein the first sensor and second sensor are oriented to generate respective first output signal and second output signal components at a 180 degree phase difference attributable to acceleration about the axis of rotation; and

differencing the first output signal and second output signal to generate a difference signal having a zero level whenever the reflective surface is at the third orientation.

6. The method of claim 5 in which the step of differencing comprises performing common mode rejection on the first output signal and second output signal.

7. The method of claim 5, in which the oscillatory motion is characterized by a resonant frequency, and in which an actuation circuit moves the reflective surface in said oscillatory motion, the method further comprising the step of receiving a drive signal;

and

locking phase of the drive signal to phase of the oscillatory motion so as to be either one of in phase or at a 180 degree phase difference.

8. An optical resonant scanner, comprising:

a reflective surface for deflecting light, the reflective surface alternately rotating about an axis of rotation in a first direction and a second direction, wherein the rotation in the first direction occurs between a first extreme rotational position and a second extreme rotational position, and wherein the rotation in the second direction occurs between the second extreme rotational position and the first extreme rotational position, wherein the alternate rotation about the axis of rotation defines an oscillatory motion of the reflective surface, and wherein the reflective surface undergoes zero acceleration during said oscillatory motion at a third rotational position occurring between the first extreme rotational position and the second extreme rotational position;

a first sensor generating a first output signal varying as a function of accelerated movement of the first sensor and having a zero level in the absence of accelerated movement;

a second sensor generating a second output signal varying as a function of accelerated movement of the second sensor and having a zero level in the absence of accelerated movement, wherein the first sensor and second sensor are equidistant from the axis of rotation and move with the reflective surface, and wherein the first sensor and second sensor are oriented to generate respective first output signal and second output signal components at a 180 degree phase difference attributable to acceleration about the axis of rotation; and

a difference signal derived from the first output signal and second output signal and having a zero level whenever the reflective surface is at the third rotational position.

9. The scanner of claim 8, in which the oscillatory motion is characterized by a resonant frequency, and further comprising:

a drive signal which energizes an electromagnet for actuating the oscillatory motion; and

a phase locked loop for locking phase of the drive signal to phase of the oscillatory motion so as to be either one of in phase or at a 180 degree phase difference.