Two bar resonant beam Coriolis rate sensor

• US 5,696,323 A
• Filed: 06/25/1996
• Issued: 12/09/1997
• Est. Priority Date: 06/25/1996
• Status: Expired due to Term

• Current Assignee: Alliedsignal Inc.
• Original Assignee: Alliedsignal Inc.
• Inventors: Hulsing, Rand H. II
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US08/673,700
• Time in Patent Office: 532 Days
• Field of Search: 73/504.04, 73/504.12, 73/504.13, 73/504.14, 73/504.15, 73/504.16
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5656 the devices involving a micromechanical structure

Abstract

By configuring a mounting ring connected to a center block with a pair of flexures and having a pair of vibrating beam force transducers connected between the mounting ring and the center block, an angular rate sensor utilizing Coriolis acceleration can be fabricated out of silicon. In this sensor, vibration of the sides of the mounting ring along an axis normal to the angular rate axis is provided by a source of magnetic flux which interacts with a drive current applied through conductors deposited on the mounting ring. The magnetic flux is provided by a permanent magnet and a pair of pole pieces that encompass the mounting ring. A digital representation of angular rate is generated by demodulating the frequency of the force transducers by the frequency of vibration drive frequency to obtain the difference in the force transducer frequencies.

Claims

1. An angular rate sensor comprising:

an inertia ring having a first and a second side;

a center block;

a pair of flexures for inertia said inertia ring on said center block for torsional rotation of said inertia ring along an angular rate axis;

a first and a second force sensing transducers connected between said inertia ring and said center block in a push-pull arrangement and in a manner to constrain said inertia ring from rotating about said angular rate axis;

drive means for vibrating said first and second inertia ting sides at a frequency ω

in opposite directions along a vibration axis normal to said rate axis; and

processing means responsive to said first and second force sensing transducers and said drive means for generating an angular rate signal representing the angular rate of the sensor around said angular rate axis.

2. The sensor of claim 1 wherein said inertia ring, said center block and said first and second force transducers are configure out of a single block of material.

3. The sensor of claim 2 wherein said material is silicon.

4. The sensor of claim 1 wherein each of said first and second force sensing transducers are dual beam transducers.

5. The sensor of claim 4 including means for vibrating said first and second dual beam transducers at a frequency fn.

6. The sensor of claim 5 wherein said drive frequency e is substantially lower than said vibration frequency fn.

7. The sensor of claim 6 wherein said drive frequency is approximately 1.5 kHz.

8. The sensor of claim 7 wherein said vibration frequency fn is approximately 100 kHz.

9. The sensor of claim 1 wherein said sensor includes:

a source of magnetic flux for applying a magnetic flux perpendicularly to said first and second sides of said inertia ring;

a pair of conductors disposed one on said first side of said inertia ring and the other on said second sides of said inertia ring; and

wherein said drive means includes drive current means for applying a drive current at said frequency ω

to said first and said second conductors.

10. The sensor of claim 9 wherein said source of said magnetic flux includes a first and a second pole piece spaced apart and located on each side of said inertia ring.

11. The sensor of claim 10 wherein said source of said magnetic flux includes a permanent magnet interposed between said first and second pole pieces.

12. The sensor of claim 1 wherein said first force transducer is connected to a first one of said flexures and to a first side of said center block and wherein said second force transducer is connected to a second one of said flexures and to a second side of said center block.

13. The sensor of claim 1 wherein said first and second force transducers are connected to said inertia ring and said center block at an offset distance r from said angular rate axis.

14. The sensor of claim 13 wherein the ratio of d, the distance from the angular rate axis to the ends of said inertia ring, to said offset distance r is greater than one.

15. The sensor of claim 13 wherein said first force transducer is located between a first side of said inertia ring and said center block and wherein said second force transducer is located between a second side of said inertia block and said center block.

16. The sensor of claim 13 wherein said first and second force transducers are located between a first side of said inertia ring and said center block on a first side of said angular rate axis.

17. The sensor of claim 1 wherein said first and second force transducers have an output frequency and said processing means includes first and second demodulator means for demodulating the output of said force transducers at said frequency ω

.

18. The sensor of claim 17 wherein the processing means includes means for subtracting the output of said first and second demodulators to generate said angular rate signal.

19. A angular rate sensor comprising:

an inertia ring having a first and a second side configured out of a block of silicon;

a center block configured our of said block of silicon;

a pair of flexures configured out of said block of silicon for inertia said block for torsional rotation of said block along an angular rate axis within said inertia ring;

a first and a second dual beam force sensing transducers having output frequencies fn configured out of said block of silicon connected between said inertia ring and said center block in a push-pull arrangement and in a manner to constrain said center block from rotating about said angular rate axis;

a source of magnetic flux including a first and a second pole piece spaced apart and located on each side of said inertia ring and a permanent magnet interposed between said first and second pole pieces;

drive means, including a pair of conductors disposed one on said first and one on said second sides of said inertia ring responsive to said magnetic flux, for vibrating said first and second inertia ring sides in opposite directions at a frequency ω

along a vibration axis normal to said rate axis; and

processing means, including means for demodulating said output frequencies f of first and second force sensing transducers at said vibration frequency ω

, for generating an angular rate signal representing the angular rate of the sensor around said angular rate axis.

20. The sensor of claim 19 wherein said first and said second force transducers are connected between said inertia ring and said center block at an offset distance r from said angular rate axis.

21. The sensor of claim 20 wherein the ratio between d, the distance from the angular rate axis to the ends of said inertia ring, to said offset distance r is approximately 25.

22. The sensor of claim 20 wherein said drive frequency ω

is approximately 100 times lower than said vibration frequency fn.

23. The sensor of claim 22 wherein said drive frequency is approximately 1.5 kHz.