×

Micromechanical device having an improved beam

  • US 5,696,619 A
  • Filed: 02/27/1995
  • Issued: 12/09/1997
  • Est. Priority Date: 02/27/1995
  • Status: Expired due to Fees
First Claim
Patent Images

1. An improved deformable beam for a micromechanical device which includes a deflectable mass supported by the beam, the beam being deformed upon deflection of the mass, wherein the improvement comprises:

  • the dents being constituted of an electrically conductive layer of titanium-tungsten containing an alloying element at a level above 0.1% atomic, said beam being constituted of at least 90% by weight tungsten, wherein said alloying element is selected from the group of nitrogen, oxygen, boron, silicon and carbon.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×