Method for forming tin oxide coating on glass
First Claim
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1. A chemical vapor deposition process for applying a fluorine doped tin oxide coating to a surface on a hot glass substrate, comprising the steps of:
- A) providing a hot glass substrate, including a surface upon which a fluorine doped tin oxide coating is to be deposited;
B) providing a uniform, vaporized reactant mixture containing an organotin compound, hydrogen fluoride, oxygen and water; and
C) delivering the vaporized reactant mixture to the surface on the hot glass substrateswherein the uniform, vaporized reactant mixture reacts to deposit a coating of fluorine doped tin oxide on the surface of the hot glass substrate.
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Abstract
Fluorine doped tin oxide coatings on glass are prepared by providing a uniform, vaporized reactant mixture containing an organotin compound, HF, water and oxygen, and delivering the reactant mixture to the surface of the hot ribbon of glass, where the compounds react to form the fluorine doped tin oxide coating. The fluorine doped tin oxide coatings applied in accordance with the invention exhibit lower sheet resistance, and improved uniformity in sheet resistance over the coated surface of the glass.
174 Citations
19 Claims
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1. A chemical vapor deposition process for applying a fluorine doped tin oxide coating to a surface on a hot glass substrate, comprising the steps of:
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A) providing a hot glass substrate, including a surface upon which a fluorine doped tin oxide coating is to be deposited; B) providing a uniform, vaporized reactant mixture containing an organotin compound, hydrogen fluoride, oxygen and water; and C) delivering the vaporized reactant mixture to the surface on the hot glass substrates wherein the uniform, vaporized reactant mixture reacts to deposit a coating of fluorine doped tin oxide on the surface of the hot glass substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A chemical vapor deposition process for applying a fluorine doped tin oxide coating to a surface on a hot glass substrate, comprising the steps of:
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A) providing a hot glass substrate at a temperature from about 750°
F. to about 1,500°
F., including a surface upon which a fluorine doped tin oxide coating is to be deposited;B) providing a uniform, vaporized reactant mixture containing an organotin compound, from about 0.2 to about 2 mole % hydrogen fluoride, from about 2 to about 50 mole % water, and from about 10 to about 60 mole % oxygen; and C) delivering the vaporized reactant mixture to said surface on the hot glass substrate; wherein the uniform, vaporized reactant mixture reacts to deposit a coating of fluorine doped tin oxide on the surface of the hot glass substrate.
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19. A chemical vapor deposition process for applying a fluorine doped tin oxide coating to a surface on a hot glass substrate, comprising the steps of:
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A) providing a hot glass substrate at a temperature from about 750°
F. to about 1,500°
F., including a surface upon which a fluorine doped tin oxide coating is to be deposited, said surface having a layer of silica applied thereto;B) providing a uniform, vaporized reactant mixture containing an organotin compound, from about 0.2 to about 2 mole % hydrogen fluoride, from about 2 to about 50 mole % water, and from about 10 to about 60 mole % oxygen; and C) delivering the vaporized reactant mixture to said surface on the hot glass substrate; wherein the uniform, vaporized reactant mixture reacts to deposit a coating of fluorine doped tin oxide on said layer of silica on the surface of the hot glass substrate.
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Specification