Stripping and cleaning composition

• US 5,698,503 A
• Filed: 11/08/1996
• Issued: 12/16/1997
• Est. Priority Date: 11/08/1996
• Status: Expired due to Term

• Current Assignee: Versum Materials US Inc.
• Original Assignee: Ashland Incorporated (Bank of Montreal)
• Inventors: Michelotti, Francis W., Peters, Darryl W., Ward, Irl E.
• Primary Examiner(s): McGinty, Douglas J.
• Application Number:
  US08/745,754
• Time in Patent Office: 403 Days
• Field of Search: 510/176, 510/255, 510/257, 510/259, 510/475, 510/421, 510/493, 510/175, 134/2, 134/40, 134/41, 134/42
• US Class Current: 510/176
• CPC Class Codes: C09K 13/08 containing a fluorine compound
• CPC Class Codes: C11D 7/08 Acids
• CPC Class Codes: C11D 7/261 Alcohols; Phenols
• CPC Class Codes: C11D 7/265 Carboxylic acids or salts thereof
• CPC Class Codes: C11D 7/32 containing nitrogen
• CPC Class Codes: C11D 7/34 containing sulfur
• CPC Class Codes: C11D 7/5009 containing phosphorus, sulfur or silicon, e.g. dimethylsulfoxide
• CPC Class Codes: C11D 7/5013 containing nitrogen
• CPC Class Codes: C11D 7/5022 containing oxygen
• CPC Class Codes: G03F 7/422 using liquids only G03F7/421 takes precedence
• CPC Class Codes: G03F 7/426 containing organic halogen compounds; containing organic sulfonic acids or salts thereof; containing sulfoxides

Abstract

An aqueous and acidic stripping and cleaning composition is provided which contains a polyhydric alcohol, ammonium fluoride, dimethylsulfoxide and water. The pH of the composition is greater than about 4 but less than 7. Also provided is a method of stripping and cleaning utilizing the compositions of the invention. Optionally, the composition may contain a phosphate buffer.

Claims

1. An aqueous and acidic stripping and cleaning composition consisting essentially of:

a) about 55 to 85% by weight of a polyhydric alcohol having the formula selected from the group consisting of HO CH₂ --CH₂ O!_n H and ##STR4## more;

b) about 5 to 35% by weight of a water soluble organic polar solvent;

c) about 0.5 to 20% by weight of ammonium fluoride;

d) an effective amount of up to about 20% by weight total for acetic acid and ammonium acetate; and

e) the remainder being water;

said composition having a pH greater than 4 and less than 7.

2. The composition of claim 1 wherein said polyhydric alcohol is propylene glycol.

3. The composition of claim 1 further consisting essentially of a corrosion inhibitor.

4. The composition of claim 3 wherein said inhibitor is selected from the group consisting of catechol, pyrogallol, gallic acid and anthranilic acid.

5. The composition of claim 1 wherein said polar solvent is selected from the group consisting of dimethylsulfoxide, dimethylacetamide, N-methylpyrrolidone and gamma butyllactone.

6. The composition of claim 1 with dimethylsulfoxide, ammonium fluoride, propylene glycol, a corrosion inhibitor and water.

7. The composition of claim 6 further consisting essentially of a phosphate buffer.

8. A process for stripping and cleaning an organic coating from a coated substrate which comprises subjecting said coated substrate to a composition according to claim 6 at an elevated temperature for a stripping effective time.

9. A process for stripping and cleaning an organic coating from a coated substrate which comprises subjecting said coated substrate to a composition according to claim 7 at an elevated temperature for a stripping effective time.

10. The composition of claim 1 further consisting essentially of a phosphate buffer.

11. A process for stripping and cleaning an organic coating from a coated substrate which comprises subjecting said coated substrate to a composition according to claim 1 for a period of time to strip organic material from said substrate.

12. The process of claim 11 wherein said process is conducted at a temperature between about ambient to 80°

C.

13. The process of claim 12 wherein said coated substrate is a photoresist.

14. A process for stripping and cleaning an organic coating from a coated substrate which comprises subjecting said coated substrate to a composition according to claim 3 for a stripping effective time.

15. The process of claim 14 wherein said process is conducted at a temperature between about ambient to 80°

C.