Integrated infrared microlens and gas molecule getter grating in a vacuum package

• US 5,701,008 A
• Filed: 11/29/1996
• Issued: 12/23/1997
• Est. Priority Date: 11/29/1996
• Status: Expired due to Term

• Current Assignee: Raytheon Company (Rtx Corporation)
• Original Assignee: HE Holdings, Inc. (Rtx Corporation)
• Inventors: Ray, Michael, Kennedy, Adam M.
• Primary Examiner(s): FIELDS, CAROLYN
• Application Number:
  US08/758,408
• Time in Patent Office: 389 Days
• Field of Search: 250/352, 250/353, 250/349
• US Class Current: 250/352
• CPC Class Codes: G01J 2005/0077 Imaging
• CPC Class Codes: G01J 5/045 Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements getter arrangements per se H01L23/26 and H01L21/3221
• CPC Class Codes: G01J 5/08 Optical arrangements
• CPC Class Codes: G01J 5/0806 Focusing or collimating elements, e.g. lenses or concave mirrors
• CPC Class Codes: G01J 5/0875 Windows; Arrangements for fastening thereof
• CPC Class Codes: H01L 27/14618 Containers
• CPC Class Codes: H01L 27/14625 Optical elements or arrangements associated with the device
• CPC Class Codes: H01L 27/14649 Infrared imagers
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

An infrared (IR) microlens array has a plurality of microlenses (12) aligned with respective IR detector array pixels (6) to focus incoming IR radiation onto the pixels (6) to improve the efficiency of IR detection, and a gas molecule getter grating (14) inside a vacuum-sealed Dewar assembly that houses the detector array (4) increases the surface area of the getter (15) to improve the efficiency of removing residual gas molecules from the Dewar assembly.

Claims

1. A vacuum-sealed Dewar assembly, comprising:

a substrate;

a plurality of infrared (IR) detectors on said substrate; and

an IR window comprising a plurality of microlenses positioned to focus IR radiation transmitting onto respective IR detectors, said IR window being sealed with respect to said substrate to form a substanially vacuum enclosure.

2. The Dewar assembly of claim 1, wherein said IR window is sealed with respect to said substrate by a separate seal.

3. The Dewar assembly of claim 1, wherein said microlenses comprise convex lenses.

4. The Dewar assembly of claim 1, wherein said microlenses are positioned within said enclosure opposite respective IR detectors.

5. The Dewar assembly of claim 1, further comprising an antireflection coating on said microlenses to enhance the transmittance of IR radiation.

6. The Dewar assembly of claim 1, wherein said IR window further comprises a plurality of protrusions having surfaces on which a getter material is positioned to chemically react with residual gas molecules in said enclosure to remove said gas molecules.

7. The Dewar assembly of claim 6, wherein said protrusions comprise rectangular columns defined by a plurality of recesses.

8. The Dewar assembly of claim 6, wherein said microlenses and said IR detectors occupy center portions of said IR window and substrate surfaces, respectively, and said protrusions are positioned adjacent edge portions surrounding said center portion of said IR window surface.

9. A vacuum-sealed Dewar assembly, comprising:

a substrate;

a plurality of infrared (IR) detectors on said substrate; and

an IR window that is sealed with respect to said substrate to form a substantially vacuum enclosure and has a surface portion that is substantially transparent to at least some wavelengths of IR radiation so that said radiation is detectable by said IR detectors, said IR window comprising a plurality of protrusions having surfaces on which a getter material is positioned to chemically react with residual gas molecules in said enclosure to remove said gas molecules.

10. The Dewar assembly of claim 9, wherein said IR window is sealed with respect to said substrate by a separate seal.

11. The Dewar assembly of claim 9, wherein said protrusions comprise rectangular columns defined by a plurality of recesses.

12. The Dewar assembly of claim 9, wherein said IR window further comprises a plurality of microlenses positioned to focus said IR radiation onto respective IR detectors.

13. The Dewar assembly of claim 12, wherein said microlenses comprise convex lenses.

14. The Dewar assembly of claim 12, wherein said microlenses are positioned within said enclosure opposite respective IR detectors.

15. The Dewar assembly of claim 12, further comprising an antireflection coating on said microlenses to enhance the transmittance of said IR radiation.

16. The Dewar assembly of claim 12, wherein said microlenses and said IR detectors occupy center portions of said IR window and substrate surfaces, respectively, and said protrusions are positioned adjacent edge portions surrounding said center portion of said IR window.

17. An infrared (IR) window that is substantially transparent to at least some wavelengths of IR radiation, comprising:

a first surface;

a second surface having a portion contoured to form a plurality of microlenses and another portion contoured to form a plurality of grating columns defined by a plurality of recesses; and

a getter material positioned on said grating column portion of said second surface adapted to chemically react with gas molecules to remove said gas molecules.

18. The IR window of claim 17, further comprising an antireflection coating positioned on said microlens portion of said second surface.

19. The IR window of claim 17, wherein said first surface comprises a substantially flat surface.

20. The IR window of claim 19, further comprising an antireflection coating positioned on said first surface.