Programmable interconnect structures and programmable integrated circuits
First Claim
Patent Images
1. An integrated structure comprising an antifuse comprising:
- a first conductor;
an insulating layer overlaying said first conductor and having a first opening therethrough;
a conductive plug filling the first opening and contacting the first conductor, a top surface of the insulating layer having a portion adjacent to the plug, the portion being substantially coplanar with a top surface of the plug;
a layer of programmable material having a substantially planar bottom surface overlaying and contacting the plug, wherein the programmable material is non-conductive over the plug when the antifuse is unprogrammed, and wherein the programmable material provides therethrough a conductive path contacting the plug when the antifuse is programmed; and
a second conductor overlaying and contacting the programmable material.
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Accused Products
Abstract
Antifuses and gate arrays with antifuses are disclosed that have high thermal stability, reduced size, reduced leakage current, reduced capacitance in the unprogrammed state, improved manufacturing yield, and more controllable electrical characteristics. Some antifuses include spacers in the antifuse via. In some antifuses, the programmable material is planar, and the top or the bottom electrode is formed in the antifuse via. In some gate arrays, the antifuses are formed above the dielectric separating two levels of routing channels rather than below that dielectric.
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Citations
9 Claims
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1. An integrated structure comprising an antifuse comprising:
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a first conductor; an insulating layer overlaying said first conductor and having a first opening therethrough; a conductive plug filling the first opening and contacting the first conductor, a top surface of the insulating layer having a portion adjacent to the plug, the portion being substantially coplanar with a top surface of the plug; a layer of programmable material having a substantially planar bottom surface overlaying and contacting the plug, wherein the programmable material is non-conductive over the plug when the antifuse is unprogrammed, and wherein the programmable material provides therethrough a conductive path contacting the plug when the antifuse is programmed; and a second conductor overlaying and contacting the programmable material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification