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Particulate free vacuum compatible pinch seal

  • US 5,702,533 A
  • Filed: 06/28/1996
  • Issued: 12/30/1997
  • Est. Priority Date: 06/28/1996
  • Status: Expired due to Term
First Claim
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1. A semiconductor processing device comprising:

  • a transport device which transports a substrate within a work environment, the transport device including a transport mechanism and a substrate supporting member attached to the transport mechanism;

    a barrier separating the work environment from the transport mechanism of the transport device, the barrier having an elongated opening through which the substrate supporting member extends;

    a flexible seal sealing the elongated opening in the barrier while allowing the substrate supporting member to move along the elongated opening, the flexible seal being effective to minimize particles from passing through the opening into the work environment; and

    an opening device which opens the flexible seal, the opening device preventing contact between the flexible seal and the substrate supporting member while the substrate supporting member moves along the opening.

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