Measuring element for a flow sensor

• US 5,703,287 A
• Filed: 03/26/1996
• Issued: 12/30/1997
• Est. Priority Date: 03/29/1995
• Status: Expired due to Fees

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Benz, Rolf, Reihlen, Eckart, Schmidt, Steffen, Muenzel, Horst, Treutler, Christoph, Lock, Andreas
• Primary Examiner(s): Chilcot, Richard
• Assistant Examiner(s): Artis, Jewel
• Application Number:
  US08/622,717
• Time in Patent Office: 644 Days
• Field of Search: 73/204.26, 73/204.22, 73/204.15
• US Class Current: 73/204.26
• CPC Class Codes: G01F 1/6845 Micromachined devices
• CPC Class Codes: G01F 1/692 Thin-film arrangements

Abstract

In a measuring element for a flow sensor and a method for manufacturing the measuring element, a heater, a temperature sensor, and a printed circuit trace are patterned out of a platinum layer. Furthermore, an interconnection region is used for contacting the measuring chip with bonding wires. An additional metal layer is provided for the interconnection region.

Claims

1. A measuring element for a flow sensor, the measuring element attaching to a bonding wire, comprising:

a membrane;

a platinum layer;

at least one heater arranged on the membrane;

at least one temperature sensor arranged on the membrane, the temperature sensor being patterned out of the platinum layer;

at least one printed circuit trace for contacting the heater and the temperature sensor, the printed circuit trace being patterned out of the platinum layer; and

an interconnection region for attaching to the bonding wire, the interconnection region including a metal layer composed of a metal other than platinum.

2. The measuring element according to claim 1, further comprising a silicon substrate having an applied membrane layer.

3. The measuring element according to claim 2, further comprising a passivation layer arranged on the membrane layer.

4. The measuring element according to claim 3, wherein the membrane layer and the passivation layer include silicon, oxygen and nitrogen.

5. The measuring element according to claim 2, wherein the metal layer is arranged on the platinum layer.

6. The measuring element according to claim 2, wherein the metal layer is arranged between the platinum layer and the membrane layer.

7. The measuring element according to claim 1, wherein the metal layer is arranged on a surface of the measuring element in electrical contact with the printed circuit trace and the platinum layer is removed, in the interconnection region.