Support post architecture for micromechanical devices
First Claim
Patent Images
1. A micromirror device comprising:
- a substrate;
at least one hinge support pillar supported by said substrate, said hinge support pillar comprised of a first pillar material inside a first metal sheath;
at least one hinge connected to said hinge support pillar;
at least one mirror support pillar connected to said hinge, said mirror support pillar comprised of a second pillar material inside a second metal sheath; and
at least one mirror element supported by said mirror support pillar.
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Abstract
A support pillar 426 for use with a micromechanical device, particularly a digital micromirror device, comprising a pillar material 422 supported by a substrate 400 and covered with a metal layer 406. The support pillar 426 is fabricated by depositing a layer of pillar material on a substrate 400, patterning the pillar layer to define a support pillar 426, and depositing a metal layer 406 over the support pillar 426 enclosing the support pillar. A planar surface even with the top of the pillar may be created by applying a spacer layer 432 over the pillars 426. After applying the spacer layer 432, the spacer layer 432 is etched to expose the tops of the pillars.
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Citations
28 Claims
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1. A micromirror device comprising:
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a substrate; at least one hinge support pillar supported by said substrate, said hinge support pillar comprised of a first pillar material inside a first metal sheath; at least one hinge connected to said hinge support pillar; at least one mirror support pillar connected to said hinge, said mirror support pillar comprised of a second pillar material inside a second metal sheath; and at least one mirror element supported by said mirror support pillar. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A micromirror device comprising:
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a substrate; at least one hinge support pillar supported by said substrate, said hinge support pillar comprising a pillar material inside a metal sheath; at least one hinge connected to said hinge support pillar; and at least one mirror dement supported by said at least one hinge. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23)
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24. A support pillar for a micromechanical device comprising:
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a substrate; a pillar material supported by said substrate, said pillar material formed in the shape of the desired support pillar; and a metal layer forming a metal sheath at least partially supported by said substrate, wherein said metal layer is formed over said pillar material such that said pillar material is inside said metal sheath. - View Dependent Claims (25, 26, 27, 28)
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Specification