Surface emission laser and method of manufacturing the same
First Claim
1. A surface emission laser having a semiconductor multilayer reflector of a first conductivity type, a clad layer of the first conductivity type, an active layer, a clad layer of a second conductivity type, and a semiconductor multilayer reflector of the second conductivity type, which are sequentially stacked on each other, wherein said semiconductor multilayer reflector of the second conductivity type has a mesa shape, an electrode is formed on mesa side surfaces and a portion of a mesa bottom surface, and one semiconductor film of said semiconductor multilayer reflector of the second conductivity type which serves as the mesa bottom surface has a thickness (1/4+n/2, where n is a positive integer) times an oscillation wavelength.
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Abstract
A surface emission laser is formed by sequentially stacking an n-type semiconductor multilayer reflector, an n-type clad layer, an active layer, a p-type clad layer, and a p-type semiconductor multilayer reflector on a semiconductor substrate. The p-type semiconductor multilayer reflector is etched to form a mesa. An electrode is formed on at least on the mesa side surfaces and a portion of the mesa bottom surface. The thickness of a GaAs film as the mesa bottom surface of the p-type semiconductor multilayer reflector to which an etching process is stopped is set to be (1/4+n/2, where n is an integer) times the oscillation wavelength. A method of manufacturing the surface emission laser is also disclosed.
18 Citations
7 Claims
- 1. A surface emission laser having a semiconductor multilayer reflector of a first conductivity type, a clad layer of the first conductivity type, an active layer, a clad layer of a second conductivity type, and a semiconductor multilayer reflector of the second conductivity type, which are sequentially stacked on each other, wherein said semiconductor multilayer reflector of the second conductivity type has a mesa shape, an electrode is formed on mesa side surfaces and a portion of a mesa bottom surface, and one semiconductor film of said semiconductor multilayer reflector of the second conductivity type which serves as the mesa bottom surface has a thickness (1/4+n/2, where n is a positive integer) times an oscillation wavelength.
- 3. A surface emission laser having an n-type semiconductor multilayer reflector, an n-type clad layer, an active layer, a p-type clad layer, and a p-type semiconductor multilayer reflector, which are sequentially stacked on a semiconductor substrate, wherein said p-type semiconductor multilayer reflector has a mesa shape, an electrode is formed on at least mesa side surfaces and a portion of a mesa bottom surface, and a GaAs film of said p-type semiconductor multilayer reflector which serves as the mesa bottom surface has a thickness (1/4+n/2, where n is a positive integer) times an oscillation wavelength.
- 5. A method of manufacturing a surface emission laser comprising the steps of forming a resonator structure on a semiconductor substrate, said resonator structure having p- and n-type semiconductor multilayer reflectors on and under a p-n junction structure for producing an optical gain upon injection of a current, each of said reflectors being formed by alternately stacking semiconductor layers having different refractive indexes, forming a mesa by etching, and forming an electrode for current injection to cover said mesa, wherein a thickness of a semiconductor layer, of the semiconductor layers alternately stacked on each other to form said semiconductor multilayer reflector on said p-n junction structure etched on said semiconductor substrate, to which an etching process is stopped, is (1/4+n/2, where n is a positive integer) times an oscillation wavelength.
Specification